Conical coil for rapid thermal anneal lamps
AssigneeApplied Materials, Inc.
InventorsVilen K. Nestorov, Kaushik Rao, Govinda Raj
Life of this patent
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Abstract
Examples disclosed herein relate to a lamp configured to provide heat for a processing chamber. The lamp includes a housing filled with a gas. A filament is disposed within the housing. The filament has an upper diameter, a lower diameter, and a length. A pair of electrodes is electrically coupled to the filament. A pair of pins is electrically coupled to the pair of electrodes. The pair of pins is configured to transfer energy to the filament. A ratio between either the upper diameter or the lower diameter to the length is about 0.3. The upper diameter is not equal to the lower diameter.
Claims20
A lamp configured to provide heat, the lamp comprising:
- a housing filled with a gas;
- a filament disposed within the housing and having an upper diameter, a lower diameter, and a length, the length being about 18 mm to about 22 mm;
- a pair of electrodes electrically coupled to the filament;
- and
- a pair of pins electrically coupled to the pair of electrodes, the pair of pins configured to transfer energy to the filament, wherein:
- the lower diameter is closer to the pair of pins than the upper diameter, and
- a ratio of the lower diameter to the length is about 0.3, and the upper diameter is not equal to the lower diameter.
A lamp configured to provide heat, the lamp comprising:
- a housing filled with a gas;
- a filament disposed within the housing and having a lower base and an upper base;
- a pair of electrodes electrically coupled to the filament;
- and
- a pair of pins electrically coupled to the pair of electrodes, wherein:
- the pair of pins is configured to transfer energy to the filament,
- the lower base is closer to the pair of pins than the upper base, and
- a ratio of a diameter of the lower base to a diameter of the upper base is greater than or equal to about 3:1.
A lamp comprising:
- a housing filled with a gas;
- a filament disposed within the housing and having a lower base and an upper base, wherein the filament comprises a coil wire having a diameter of about 0.03 mm to about 0.07 mm;
- a pair of electrodes electrically coupled to the filament;
- and
- a pair of pins electrically coupled to the pair of electrodes, wherein:
- the pair of pins is configured to transfer energy to the filament,
- the lower base is closer to the pair of pins than the upper base, and
- a ratio of a diameter of the lower base to a diameter of the upper base is equal to or less than about 1:3.
Dependencies are inferred from the claim text.