Back to results
US 12,027,190 B1Granted
Method of for bonding noble metal structure with a dielectric layer using an adhesive layer
AssigneeSeagate Technology LLC
InventorXiaoyue Huang
Life of this patent
Estimating the term…
Abstract
A first layer that includes a metal seed layer, a refractive seed or a refractive dopant is formed on a dielectric substrate. A peg of a near-field transducer is formed on the first layer such that a first surface of the peg is formed on and is in contact with the metal seed. An adhesive layer is formed over the peg using atomic layer deposition. The adhesive layer includes alumina and is 4 nm or less in thickness. A silicon dioxide overcoat is deposited over the adhesive layer. The alumina bonds the silicon dioxide to the peg.
Claims19
A method comprising:
- forming a metal seed layer on a dielectric substrate;
- forming a peg of a near-field transducer on the metal seed layer such that a first surface of the peg is formed on and is in contact with the metal seed, the peg formed of a noble metal, the first surface being parallel to the dielectric substrate;
- depositing an adhesive layer over a second surface of the peg using atomic layer deposition, the adhesive layer comprising alumina and being 4 nm or less in thickness, the second surface being parallel and opposed to the first surface;
- and
- depositing a silicon dioxide overcoat over the adhesive layer, the alumina bonding the silicon dioxide to the peg.
2 more elements
A method comprising:
- forming a refractive seed or refractive dopant on a dielectric substrate;
- forming a peg of a near-field transducer on the refractive seed or refractive dopant such that a first surface of the peg is formed on and is in contact with the refractive seed or refractive dopant, the peg formed of a noble metal, the first surface being parallel to the dielectric substrate;
- depositing an adhesive layer over a second surface of the peg using atomic layer deposition, the adhesive layer comprising alumina and being 4 nm or less in thickness, the second surface being parallel and opposed to the first surface;
- and
- depositing a silicon dioxide overcoat over the adhesive layer, the alumina bonding the silicon dioxide to the peg.
2 more elements
Dependencies are inferred from the claim text.