Scroll pump with a plurality of bellows sealing a plurality of adjustment members
AssigneeEdwards Limited
InventorsNigel Paul Schofield, Alan Ernest Kinnaird Holbrook
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AssigneeEdwards Limited
InventorsNigel Paul Schofield, Alan Ernest Kinnaird Holbrook
Estimating the term…
A scroll vacuum pump has an axially extending drive shaft with an eccentric shaft portion, such that rotation of the drive shaft imparts an orbiting motion to an orbiting scroll relative to a fixed scroll. An axial adjustment mechanism has a plurality of adjustment members angularly spaced around the drive shaft and extending through the pump housing towards the orbiting scroll, the plurality of adjustment members each being configured to provide an independently adjustable axial position of the orbiting scroll. A plurality of sealing means isolate the plurality of adjustment members from a pump chamber, the plurality of sealing means extending around each of the plurality of adjustment members and comprising at least one flexible portion such that one end of the sealing means may orbit relative to a fixed other end of the sealing means.
A scroll vacuum pump comprising:
Dependencies are inferred from the claim text.