Method for manufacturing de-powder device for piping, and method for installing same

Abstract

The present disclosure relates to a method for manufacturing a de-powder device for piping and a method for installing the same, and more particularly, to a method for manufacturing a de-powder device for piping, which is for suppressing attachment and deposition of exhaust matters to an inner circumferential surface of a pipe exposed to the flow of exhaust matters such as unreacted raw material gas, reaction products, and the like exhausted from substrate processing devices for semiconductors and displays, and a method for installing the same. The method for manufacturing a de-powder device for piping according to the present disclosure includes: a heater manufacturing step (S1) including a step (S11) of manufacturing an intermediate product by installing a heating wire connected to a power source inside a metal pipe and filling it with an insulating agent and a step (S12) of cutting the intermediate product and connecting one end portions of exposed heating wires; a winding step (S2) of manufacturing a heating coil which has a predetermined outer diameter by winding the heater around a jig and at least a portion of which is inserted into a pipe; and a coupling step (S3) of coupling the flange and the heating coil by inserting an end portion of the heating coil into an exposed hole formed in a metal flange.

Dependencies are inferred from the claim text.