Hydrogen recycle system and hydrogen recycle method

A method for recycling hydrogen from an exhaust gas emitted by a nitride compound production device using a hydrogen recycle means, the hydrogen recycle means comprising:

• a discharge space, at least part of a wall section of which is defined by a plasma reaction vessel and a hydrogen separation membrane;
• an adsorbent contained in the discharge space;
• and
• a hydrogen flow path divided from the plasma reaction vessel by the hydrogen separation membrane, the method comprising the steps of:
• introducing the exhaust gas emitted by the nitride compound production device into the discharge space via an exhaust gas supply path;
• adsorbing hydrogen molecules and hydrides contained in the exhaust gas onto the adsorbent;
• causing an electric discharge in the discharge space to cause matter adsorbed onto the adsorbent to desorb from the adsorbent as atoms;
• reducing pressure in the hydrogen flow path so that hydrogen atoms in the discharge space permeate the hydrogen separation membrane;
• introducing hydrogen atoms that have permeated the hydrogen separation membrane into the hydrogen flow path as hydrogen molecules;
• and
• supplying hydrogen introduced into the hydrogen flow path to the nitride compound production device via a hydrogen supply path.