Semiconductor arrangement with an integrated temperature sensor

A method for measuring a temperature in a semiconductor body using a temperature sensor that includes a temperature sensor integrated in a semiconductor body, the temperature sensor comprising a first semiconductor region of a first doping type arranged, in a vertical direction of the semiconductor body, between a second semiconductor region of a second doping type and a third semiconductor region of the second doping type, and a contact plug ohmically connecting the first semiconductor region and the second semiconductor region, wherein the first semiconductor region comprises a base region section spaced apart from the contact plug in a first lateral direction of the semiconductor body and a resistor section arranged between the base region section and the contact plug, and wherein the resistor section is implemented such that an ohmic resistance of the resistor section between the base region section and the contact plug is at least 1 MΩ, the method comprising:

• applying a measurement voltage between the third semiconductor region and the contact plug;
• and
• measuring a current flowing between the third semiconductor region and the contact plug.