Fixed temperature liquid supply apparatus
AssigneeDisco Corporation
InventorsKazuma Sekiya, Miki Yoshida, Kei Mine
Life of this patent
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Abstract
A fixed temperature liquid supply apparatus for supplying liquid adjusted in temperature to a processing apparatus including a processing unit includes a tank that accommodates the liquid, a thermometer that measures the temperature of the liquid accommodated in the tank, and a compressed gas supply pipe one end of which is connected to a compressed gas source reserving a compressed gas, the other end of which reaches the tank, and which supplies the compressed gas from the compressed gas source to the tank. The liquid accommodated in the tank is cooled by bubbles of the compressed gas, and the cooled liquid is supplied to the processing apparatus.
Claims5
A fixed temperature liquid supply apparatus that supplies liquid adjusted in temperature to a processing apparatus, the fixed temperature liquid supply apparatus comprising:
- a tank that accommodates the liquid;
- a thermometer that measures the temperature of the liquid accommodated in the tank;
- and
- a compressed gas supply pipe which reaches the tank, and which supplies compressed gas to the tank,
- wherein the liquid accommodated in the tank is cooled by bubbles of the compressed gas, and the cooled liquid is supplied to the processing apparatus.
Dependencies are inferred from the claim text.