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US 12,017,234 B2Granted
Nozzle apparatus and apparatus for treating substrate
AssigneeSemes Co., Ltd.
InventorMin Jung Park
Life of this patent
Estimating the term…
Abstract
A nozzle apparatus may comprise a nozzle body having a nozzle tip with a discharge port for spraying a treatment fluid onto a substrate; a nozzle moving member for moving the nozzle body relative to the substrate; a rotating member for rotating the nozzle body or the nozzle tip so that a treatment fluid is sprayed onto the substrate during rotation; and a control unit configured to control an operation of the nozzle moving member and the rotating member.
Claims18
A nozzle apparatus, comprising:
- a nozzle body having a nozzle tip with a discharge port for spraying a treatment fluid onto a substrate;
- a nozzle moving means for moving the nozzle body relative to the substrate;
- a rotating member for rotating the nozzle body or the nozzle tip so that a treatment fluid is rotationally sprayed onto the substrate;
- and
- a control unit for controlling an operation of the nozzle moving means and the rotating member,
- wherein the rotating member rotates the nozzle tip along an axis of rotation inclined with respect to a surface of the substrate,
- wherein the rotating member is embedded inside a recess provided in the nozzle body to rotate the nozzle tip inside the nozzle body, and
- wherein the substrate treatment apparatus further comprises a bearing provided between the nozzle tip and the nozzle body to facilitate the rotation of the nozzle tip inside the recess of the nozzle body.
5 more elements
A substrate treatment apparatus, comprising:
- a supporter rotating in one direction with a substrate seated thereon;
- a nozzle apparatus disposed above the supporter and having a nozzle body for spraying a treatment fluid onto a substrate,
- wherein the nozzle body sprays the treatment fluid onto the substrate while scanning and rotating, and
- wherein the nozzle body comprises a nozzle tip rotationally provided in the nozzle body and having a discharge port;
- and
- a rotating member for rotating the nozzle tip,
- wherein the rotating member rotates the nozzle tip along an axis of rotation inclined with respect to a surface of the substrate.
4 more elements
A substrate treatment apparatus, comprising:
- a supporter rotating in one direction with a substrate seated thereon;
- and a nozzle discharging a treatment fluid onto a substrate, wherein the nozzle comprises:
- a nozzle tip with a discharge port in a slit shape discharging the treatment fluid;
- and a rotating member for rotating the nozzle tip about an axis of rotation, and wherein the axis of rotation is perpendicular to a longitudinal direction of the discharge port and a width direction of the discharge port, respectively, and passes through a center of the discharge port in the longitudinal direction, wherein the nozzle comprises a nozzle body having the nozzle tip, and wherein the rotating member rotates directly the nozzle tip relative to the nozzle body.
1 more element
Dependencies are inferred from the claim text.