# US 12,016,239 B2 · Mask and method of manufacturing the same

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- Number: US 12,016,239 B2
- Document ID: US12016239B2
- Status: Granted
- Kind: B2
- Application number: 18/187,033
- Filed: 2023-03-21
- Published: 2023-07-13
- Granted: 2024-06-18
- Earliest claimed: 2020-07-17
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Seil Kim; Euigyu Kim; Kwanhee Lee; Sang Min Yi; Junhyeuk Ko; Seungju Hong
- Web page: https://patentgrep.com/patent/US12016239B2

## CPC

- C23C 14/042: {using masks}
- B05C 21/005: {Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20)}
- H10K 71/164: {using vacuum deposition}
- H10K 71/166: {using selective deposition, e.g. using a mask}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A mask includes a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction and that includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction. The mask further includes a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction and that includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction. The first welded portion is in contact with the second welded portion.

## Claims

### Claim 1

A mask, comprising:
a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction, wherein the first long side is longer than the first short side, wherein the first mask includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction; and
a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction, wherein the second long side is longer than the second short side, wherein the second mask includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction,
wherein the first welded portion is in contact with the second welded portion,
wherein the first welded portion includes a first concave-convex portion that has an oscillating shape in a plane, the second welded portion includes a second concave-convex portion that has an oscillating shape in a plane, and the first concave-convex portion is engaged with the second concave-convex portion.

### Claim 2 (depends on 1)

The mask of claim 1, wherein
the first welded portion extends from the first center portion, one end of the first welded portion is the first short side,
the second welded portion extends from the second center portion, and one end of the second welded portion is the second short side.

### Claim 3 (depends on 1)

The mask of claim 1, wherein the first short side of the first mask is in contact with the second short side of the second mask.

### Claim 4 (depends on 1)

The mask of claim 1, wherein the first long side is aligned with the second long side in the first direction.

### Claim 5 (depends on 1)

The mask of claim 1, wherein
the first mask further includes a first alignment mark disposed on an upper surface of the first welded portion, wherein the first alignment mark is in contact with the first short side,
the second mask further includes a second alignment mark disposed on an upper surface of the second welded portion, wherein the second alignment mark is in contact with the second short side,
wherein the first alignment mark is in contact with the second alignment mark.

### Claim 6 (depends on 1)

The mask of claim 1, wherein
the first welded portion further includes a first half-etching portion, and
the second welded portion further includes a second half-etching portion.

### Claim 7 (depends on 1)

The mask of claim 1,
wherein each of the first welded portion and the second welded portion includes one of an inclined surface or steps,
wherein the inclined surface or steps of the first welded portion and the inclined surface or steps of the second welded portion overlaps each other.

### Claim 8 (depends on 1)

The mask of claim 1, wherein
the first mask further includes a first perforated hole formed through the first concave-convex portion,
the second mask further includes a second perforated hole formed through the second concave-convex portion, and
the first perforated hole overlaps the second perforated hole.

### Claim 9 (depends on 1)

The mask of claim 1, further comprising a metallic film that overlaps the first and second concave-convex portions and is disposed on an upper surface of each of the first and second masks.

### Claim 10 (depends on 9)

The mask of claim 9, wherein
the first mask further includes a first perforated hole formed through the first welded portion,
the second mask further includes a second perforated hole formed through the second welded portion,
wherein the first perforated hole and the second perforated hole overlap each other.

### Claim 11 (depends on 10)

The mask of claim 10, wherein a plurality of each of the first perforated holes and the second perforated hole are provided.

### Claim 12 (depends on 1)

The mask of claim 1, wherein
the first center portion includes a first open area in which an opening is formed and a first non-open area adjacent to the first open area, and
the second center portion includes a second open area in which another opening is formed and a second non-open area adjacent to the second open area.

### Claim 13 (depends on 1)

The mask of claim 1, wherein each of the first and second masks has a thickness equal to or less than about 50 micrometers.
