# US 12,016,087 B2 · Heater and method of production of same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,016,087 B2 - Document ID: US12016087B2 - Status: Granted - Kind: B2 - Application number: 17/048,706 - Filed: 2019-04-24 - Published: 2021-05-27 - Granted: 2024-06-18 - Earliest claimed: 2018-04-27 - Assignees: KYOCERA Corporation - Applicants: KYOCERA Corporation - Inventors: Yasunori Kawanabe; Yoshihiro Okawa; Yuusaku Ishimine; Shinya Terao - Web page: https://patentgrep.com/patent/US12016087B2 ## CPC - H05B 3/141: {Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds} - H05B 3/286: {the insulating material being an organic material, e.g. plastic} - H05B 3/143: {applied to semiconductors, e.g. wafers heating (H05B3/0047 takes precedence)} - H05B 3/18: the conductor being embedded in an insulating material - H05B 2203/003: using serpentine layout - H05B 2203/017: Manufacturing methods or apparatus for heaters - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL ## Abstract A heater includes a base body and a resistance heating element. The base body is configured by an insulating material and includes a top surface on which a wafer is placed. The resistance heating element extends in the base body along the top surface. A top surface of the resistance heating element and the base body are in contact with each other. A vacuum or gas-filled gap is interposed between a side surface of the resistance heating element and the base body. ## Claims ### Claim 1 A heater comprising: an insulating base comprising a predetermined surface on which a wafer is placed, and a resistance heating element extending in the base body along the predetermined surface, wherein a top surface of the resistance heating element and the base body contact each other, and a vacuum or a gas-filled gap is interposed between a side surface of the resistance heating element and the base body, the gap comprises a first height part, and a second height part that is located on a side opposite to the side surface of the resistance heating element with respect to the first height part and has a size in a vertical direction smaller than that of the first height part. ### Claim 2 (depends on 1) The heater according to claim 1, wherein the gap is continuous in a direction in which the resistance heating element extends, for a length larger than a size of the gap, the size being in a width direction of the resistance heating element. ### Claim 3 (depends on 1) The heater according to claim 1, wherein the gaps are formed on both sides in a width direction of the resistance heating element. ### Claim 4 (depends on 1) The heater according to claim 1, wherein the gap includes a part whose size in a vertical direction is smaller than a size in the vertical direction of the resistance heating element. ### Claim 5 (depends on 1) The heater according to claim 1, wherein the gap includes a part whose size in a vertical direction is larger than a size in the vertical direction of the resistance heating element. ### Claim 6 (depends on 1) The heater according to claim 1, wherein the gap comprises a first position part, and a second position part that is located on a side opposite to the side surface of the resistance heating element with respect to the first position part and below the first position part. ### Claim 7 (depends on 1) The heater according to claim 1, wherein in a plan view of the predetermined surface, the resistance heating element comprises two extending parts that extend alongside each other, and a bent part that constitutes a turn back part from one of the two extending parts to the other, and the gap comprises a first lateral part along one of the extending parts and a second lateral part along the bent part and wider than the first lateral part. ### Claim 8 (depends on 1) The heater according to claim 1, wherein the gaps are formed on both sides of the resistance heating element in a width direction, in a plan view of the predetermined surface, the resistance heating element comprises two extending parts that extend alongside each other, and a bent part that constitutes a turn back part from one of the two extending parts to the other, and the gap inside the bent part comprises a part that is wider than the gap outside the bent part. ### Claim 9 (depends on 1) The heater according to claim 1, wherein the side surface of the resistance heating element comprises a convex surface. ### Claim 10 (depends on 1) The heater according to claim 1, wherein the side surface of the resistance heating element comprises a protrusion, a surface of the protrusion on a side where the predetermined surface is located is in contact with the base body, and the gap comprises a part which is interposed between a surface of the protrusion on a side opposite to the predetermined surface and the base body. ### Claim 11 (depends on 1) The heater according to claim 1, wherein the side surface of the resistance heating element comprises a recess. ### Claim 12 (depends on 1) The heater according to claim 1, wherein another vacuum or gas-filled gap is interposed between a bottom surface of the resistance heating element and the base body.