# US 12,015,319 B2 · Transport system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,015,319 B2 - Document ID: US12015319B2 - Status: Granted - Kind: B2 - Application number: 17/156,243 - Filed: 2021-01-22 - Published: 2021-08-12 - Granted: 2024-06-18 - Earliest claimed: 2020-02-07 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Takeshi Yamamoto - Web page: https://patentgrep.com/patent/US12015319B2 ## CPC - H02K 41/031: {of the permanent magnet type} - B65G 43/08: Control devices operated by article or material being fed, conveyed or discharged {(and controlling the discharging devices B65G47/42)} - B65G 54/02: electrostatic, electric, or magnetic - C23C 14/505: {for rotation of the substrates} - C23C 14/56: Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks - C23C 14/568: {Transferring the substrates through a series of coating stations (C23C14/562 takes precedence)} - H02P 25/064: of the synchronous type - H10P 72/3204: {using magnetic elements} - B65G 2203/0283: Position of the load carrier - B65G 2203/042: Sensors - H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53}) - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H02P: CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A transport system includes: a mover that is movable in a transport direction; a stator that has a plurality of coils arranged in the transport direction and applies force to the mover by using the plurality of coils to which current is applied; an acquisition unit that acquires a position and an attitude of the mover moving in the transport direction; and a control unit that determines a current value applied to the plurality of coils and controls the force based on the position and the attitude of the mover. ## Claims ### Claim 1 A transport system comprising: a mover that is movable in a transport direction; a stator that has a plurality of coils arranged in the transport direction and applies force to the mover by using the plurality of coils to which current is applied; an acquisition unit that acquires a position and an attitude of the mover moving in the transport direction; and a control unit that controls the force by current applied to the plurality of coils based on the acquired position and the acquired attitude of the mover, wherein the acquisition unit acquires, as the position and the attitude, a displacement in a first direction that is the transport direction, and at least one of a displacement in a second direction crossing the first direction, a displacement in a third direction crossing the first direction and the second direction, a displacement in a fourth direction around an axis along the first direction, a displacement in a fifth direction around an axis along the second direction, and a displacement in a sixth direction around an axis along the third direction, wherein the mover has a permanent magnet array including a first permanent magnet array in which a plurality of permanent magnets are arranged along the first direction and a second permanent magnet array in which a plurality of permanent magnets are arranged along the third direction, wherein the plurality of coils face the first permanent magnet array and the second permanent magnet array, wherein the control unit controls at least one of respective components of the first to sixth directions by controlling current applied to the plurality of coils, wherein the acquisition unit acquires a twist of a mover due to a displacement in the first direction or the third direction, and wherein the control unit controls the twist of the mover by controlling current applied to the plurality of coils. ### Claim 2 (depends on 1) The transport system according to claim 1, wherein the mover has a first yoke plate, wherein the plurality of coils include a plurality of first coils facing the first yoke plate, and wherein the control unit controls at least one of a component in the second direction of the force, a component in the fourth direction, and a component in the sixth direction by controlling current applied to the first coils. ### Claim 3 (depends on 2) The transport system according to claim 2, wherein the plurality of first coils face the first yoke plate along the second direction. ### Claim 4 (depends on 3) The transport system according to claim 3, wherein the mover has a conductive plate, wherein the plurality of coils include a plurality of third coils facing the conductive plate, and wherein the control unit controls a component in the first direction of the force by controlling current applied to the plurality of third coils. ### Claim 5 (depends on 2) The transport system according to claim 2, wherein the mover has a permanent magnet array in which a plurality of permanent magnets are arranged along the first direction, wherein the plurality of coils include a plurality of second coils facing the permanent magnet array, and wherein the control unit controls at least any one of a component in the first direction of the force, a component in the third direction of the force, and a component in the fifth direction by controlling current applied to the plurality of second coils. ### Claim 6 (depends on 1) The transport system according to claim 1, wherein the mover has a second yoke plate, wherein the plurality of coils include a plurality of second coils facing the second yoke plate, and wherein the control unit controls at least one of a component in the third direction of the force and a component in the fifth direction by controlling current applied to the plurality of second coils. ### Claim 7 (depends on 6) The transport system according to claim 6, wherein the plurality of second coils face the second yoke plate along the third direction. ### Claim 8 (depends on 1) The transport system according to claim 1, wherein the mover has a permanent magnet array in which a plurality of permanent magnets are arranged along the first direction, wherein the plurality of coils include a plurality of first coils facing the permanent magnet array, and wherein the control unit controls at least one of a component in the first direction of the force, a component in the second direction of the force, a component in the fourth direction of the force, and a component in the sixth direction of the force by controlling current applied to the plurality of first coils. ### Claim 9 (depends on 8) The transport system according to claim 8, wherein the mover has a yoke plate, wherein the plurality of coils include a plurality of second coils facing the yoke plate, and wherein the control unit controls at least any one of a component in the third direction of the force and a component in the fifth direction of the force by controlling current applied to the plurality of second coils. ### Claim 10 (depends on 9) The transport system according to claim 9, wherein the plurality of second coils face the yoke plate along the third direction. ### Claim 11 (depends on 1) The transport system according to claim 1, wherein a yoke plate installed along the first direction is further provided in the first permanent magnet array. ### Claim 12 (depends on 1) The transport system according to claim 1, wherein the permanent magnet array is installed on an under face of the mover. ### Claim 13 (depends on 1) The transport system according to claim 1, wherein the coil has a core and a winding wound around the core, and wherein a permanent magnet is provided inside the core. ### Claim 14 (depends on 1) A processing system comprising: the transport system according to claim 1; and a process apparatus that performs processing on a workpiece transported by the mover. ### Claim 15 A transport system comprising: a mover that is movable in a transport direction; a stator that has a plurality of coils arranged in the transport direction and applies force to the mover by using the plurality of coils to which current is applied; an acquisition unit that acquires a position and an attitude of the mover moving in the transport direction; and a control unit that controls the force by current applied to the plurality of coils based on the acquired position and the acquired attitude of the mover, wherein the acquisition unit acquires, as the position and the attitude, a displacement in a first direction that is the transport direction, and at least one of a displacement in a second direction crossing the first direction, a displacement in a third direction crossing the first direction and the second direction, a displacement in a fourth direction around an axis along the first direction, a displacement in a fifth direction around an axis along the second direction, and a displacement in a sixth direction around an axis along the third direction, wherein the mover has a permanent magnet array including a first permanent magnet array in which a plurality of permanent magnets are arranged along the first direction and a second permanent magnet array in which a plurality of permanent magnets are arranged along the third direction, wherein the plurality of coils face the first permanent magnet array and the second permanent magnet array, wherein the control unit controls at least one of respective components of the first to sixth directions by controlling current applied to the plurality of coils, wherein the mover is larger in the second direction than in the third direction, and wherein the permanent magnet arrays are installed on at least one selected from a side face and an under face of the mover and on a top face of the mover. ### Claim 16 (depends on 15) A processing system comprising: the transport system according to claim 15; and a process apparatus that performs processing on a workpiece transported by the mover. ### Claim 17 A transport system comprising: a mover that is movable in a transport direction; a stator that has a plurality of coils arranged in the transport direction and applies force to the mover by using the plurality of coils to which current is applied; an acquisition unit that acquires a position and an attitude of the mover moving in the transport direction; and a control unit that controls the force by current applied to the plurality of coils based on the acquired position and the acquired attitude of the mover, wherein the acquisition unit acquires, as the position and the attitude, a displacement in a first direction that is the transport direction, and at least one of a displacement in a second direction crossing the first direction, a displacement in a third direction crossing the first direction and the second direction, a displacement in a fourth direction around an axis along the first direction, a displacement in a fifth direction around an axis along the second direction, and a displacement in a sixth direction around an axis along the third direction, wherein the mover has a permanent magnet array including a first permanent magnet array in which a plurality of permanent magnets are arranged along the first direction and a second permanent magnet array in which a plurality of permanent magnets are arranged along the third direction, wherein the plurality of coils face the first permanent magnet array and the second permanent magnet array, wherein the control unit controls at least one of respective components of the first to sixth directions by controlling current applied to the plurality of coils, wherein the mover is configured to be inverted so that a top face and an under face are exchanged, and wherein the permanent magnet array is provided to the mover so that the plurality of coils are configured to face the mover before and after inversion of the mover. ### Claim 18 (depends on 17) A processing system comprising: the transport system according to claim 17; and a process apparatus that performs processing on a workpiece transported by the mover. ### Claim 19 (depends on 14) An article manufacturing method for manufacturing an article by using the processing system according to claim 14, the article manufacturing method comprising steps of: transporting the workpiece by using the mover; and performing, by using the process apparatus, the processing on the workpiece transported by the mover.