# US 12,015,246 B2 · Vertical cavity surface emitting laser and corresponding fabricating method

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- Number: US 12,015,246 B2
- Document ID: US12015246B2
- Status: Granted
- Kind: B2
- Application number: 17/338,155
- Filed: 2021-06-03
- Published: 2021-12-09
- Granted: 2024-06-18
- Earliest claimed: 2020-06-05
- Assignees: Suzhou Hanhua Semiconductor Co., Ltd.
- Applicants: Suzhou Hanhua Semiconductor Co., Ltd.
- Inventors: Qian Fan; Xianfeng Ni; Bin Hua; Ying Cui
- Web page: https://patentgrep.com/patent/US12015246B2

## CPC

- H01S 5/18308: {having a special structure for lateral current or light confinement}
- H01S 5/18361: {Structure of the reflectors, e.g. hybrid mirrors}
- H01S 5/04252: {characterised by the material}
- H01S 5/18369: {based on dielectric materials}
- H01S 5/18377: {comprising layers of different kind of materials, e.g. combinations of semiconducting with dielectric or metallic layers}
- H01S 5/1838: {Reflector bonded by wafer fusion or by an intermediate compound}
- H01S 5/209: {special etch stop layers}
- H01S 5/0215: {Bonding to the substrate}
- H01S 5/0217: {Removal of the substrate}
- H01S 5/18305: {with emission through the substrate, i.e. bottom emission}
- H01S 5/18341: {Intra-cavity contacts}
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A method of fabricating vertical cavity surface emitting laser, comprising: providing a first substrate formed with a dielectric DBR and a first bonding layer, and a second substrate formed with a etch-stop layer, a heavily doped layer, an active region, a current-confinement layer, and an arsenide DBR firstly, then sticking a third substrate on the arsenide DBR, then removing the second substrate and the etch-stop layer, next bonding the heavily doped layer to the dielectric DBR, next removing the third substrate, finally forming a p-type electrode contact and an n-type electrode contact.

## Claims

### Claim 1

A method of fabricating vertical cavity surface emitting laser, comprising:
providing a first substrate stacked with a dielectric distributed Bragg reflector (DBR) and a first bonding layer sequentially, and a second substrate stacked with a etch-stop layer, a heavily doped layer, an active region, a current-confinement layer and an arsenide DBR sequentially;
providing a third substrate, and gluing the third substrate to the arsenide DBR by a temporary bonding process;
removing the second substrate and the etch-stop layer to expose the heavily doped layer;
forming a second bonding layer which covers the heavily doped layer;
bonding the second bonding layer and the first bonding layer by van der Waals direct bonding process to obtain a combined bonding pair;
removing the third substrate to expose the arsenide DBR;
forming a p-type electrode contact on the arsenide DBR;
etching the arsenide DBR, the current-confinement layer, the active region and the heavily doped layer to form a mesa in the heavily doped layer;
forming an n-type electrode contact on the bottom wall of the mesa.

### Claim 2 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein the first substrate includes sapphire, silicon, glass, ceramic or silicon carbide substrate.

### Claim 3 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein the dielectric DBR comprises an interleave stack of first dielectric layers and second dielectric layers.

### Claim 4 (depends on 3)

The method of fabricating vertical cavity surface emitting laser of claim 3, wherein a material of the first dielectric layers is different from that of the second dielectric layers.

### Claim 5 (depends on 3)

The method of fabricating vertical cavity surface emitting laser of claim 3, wherein a material of the first dielectric layers includes SiO2, Si3N4, TiO2, Al2O3 or Ta2O5.

### Claim 6 (depends on 3)

The method of fabricating vertical cavity surface emitting laser of claim 3, wherein a material of the second dielectric layers includes SiO2, Si3N4, TiO2, Al2O3 or Ta2O5.

### Claim 7 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein the arsenide DBR comprises an interleave stack of first arsenide layers and second arsenide layers.

### Claim 8 (depends on 7)

The method of fabricating vertical cavity surface emitting laser of claim 7, wherein a material of the first arsenide layers is different from that of the second arsenide layers.

### Claim 9 (depends on 7)

The method of fabricating vertical cavity surface emitting laser of claim 7, wherein a material of the first arsenide layers includes AlAs, GaAs, AlGaAs or InGaAs.

### Claim 10 (depends on 7)

The method of fabricating vertical cavity surface emitting laser of claim 7, wherein a material of the second arsenide layer includes AlAs, GaAs, AlGaAs or InGaAs.

### Claim 11 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein a material of the heavily doped layer includes n-type AlGaAs, InGaAlP or InP.

### Claim 12 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein a thickness of the heavily doped layer is in the range of 1 μm to 3 μm.

### Claim 13 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein when etching the arsenide DBR, the current-confinement layer, the active region and the heavily doped layer to form a mesa, a thickness of over-etching into the heavily doped layer is less than or equal to 0.3 μm.

### Claim 14 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein patterns of the p-type electrode contact include closed patterns or center opening patterns.

### Claim 15 (depends on 14)

The method of fabricating vertical cavity surface emitting laser of claim 14, wherein a reflectivity of the dielectric DBR is set differently from a reflectivity of the arsenide DBR.

### Claim 16 (depends on 15)

The method of fabricating vertical cavity surface emitting laser of claim 15, wherein the patterns of the p-type electrode contact are the closed patterns, the reflectivity of the arsenide DBR is set higher than that of the dielectric DBR, and the vertical cavity surface emitting laser emits laser light from the side of the first substrate.

### Claim 17 (depends on 15)

The method of fabricating vertical cavity surface emitting laser of claim 15, wherein the patterns of the p-type electrode contact are the center opening patterns, the reflectivity of the dielectric DBR is set higher than that of the arsenide DBR, and the vertical cavity surface emitting laser emits laser light from the side of the arsenide DBR.

### Claim 18 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein a material of the p-type electrode contact includes an alloy of two or more metal elements of Ni, Pt, Au and Ti.

### Claim 19 (depends on 1)

The method of fabricating vertical cavity surface emitting laser of claim 1, wherein a material of the n-type electrode contact includes an alloy of two or more metal elements in Ni, Ge, Au and Ti.