# US 12,015,115 B2 · Optoelectronic modules having fluid permeable channels and methods for manufacturing the same

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- Number: US 12,015,115 B2
- Document ID: US12015115B2
- Status: Granted
- Kind: B2
- Application number: 17/148,087
- Filed: 2021-01-13
- Published: 2021-05-06
- Granted: 2024-06-18
- Earliest claimed: 2016-01-20
- Assignees: ams Sensors Singapore Pte. Ltd.
- Applicants: ams Sensors Singapore Pte. Ltd.
- Inventors: Tobias Senn; Julien Boucart; Susanne Westenhöfer
- Web page: https://patentgrep.com/patent/US12015115B2

## CPC

- H10H 20/8586: {comprising fluids, e.g. heat-pipes}
- H01S 5/0232: Lead-frames
- H01S 5/0236: using an adhesive
- H01S 5/02423: {Liquid cooling, e.g. a liquid cools a mount of the laser}
- H10F 39/024: {of coatings or optical elements}
- H10F 39/804: {Containers or encapsulations}
- H10H 20/01: Manufacture or treatment
- H10H 20/8506: {Containers}
- H10H 20/854: characterised by their material, e.g. epoxy or silicone resins
- H10H 20/0363: {of optical field-shaping means}
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

An optoelectronic module includes a spacer with an optical component mounting surface, a fluid permeable channel, and a module mounting surface. The fluid permeable channel and module mounting surface allow the channels to be sealed to foreign matter during certain manufacturing steps and to remain free from blockages, such as solidified flux, during certain manufacturing steps. Further, the channels can permit heat to escape from the optoelectronic module during operation.

## Claims

### Claim 1

A method of manufacturing an optoelectronic module from a plurality of optoelectronic modules, the method comprising the steps of:
electrically mounting a plurality of active optoelectronic components to an active optoelectronic component substrate, the active optoelectronic component substrate being laterally surrounded by a spacer forming a chamber, the spacer including
an optical component mounting surface,
a fluid permeable channel formed within the spacer which comprises a fluid-permeable membrane and is operable to permit the outflow of fluids from the chamber, and
module mounting surface, and wherein an adhesive channel partially surrounds the chamber from a top view facing the optical component mounting surface, wherein the fluid-permeable channel extends into the module mounting surface;
applying an adhesive to the optical component mounting surface comprising filling the adhesive channel with the adhesive;
mounting an optical component to the optical component mounting surface;
curing the adhesive;
mounting the optoelectronic module via the module mounting surface to an adhesive substrate; and
separating the plurality of optoelectronic modules into singulated optoelectronic modules.

### Claim 2 (depends on 1)

The method of claim 1 further comprising the step of removing the adhesive substrate from the plurality of optoelectronic modules with thermal and/or electromagnetic radiation.

### Claim 3 (depends on 2)

The method of claim 2 further comprising the step of mounting the optoelectronic module into a host device.

### Claim 4 (depends on 3)

The method of claim 3 further comprising the step of subjecting the optoelectronic module to a heat treatment.

### Claim 5 (depends on 1)

The method of claim 1 wherein the adhesive substrate is a dicing tape.

### Claim 6 (depends on 1)

The method of claim 1, wherein the spacer comprises the adhesive channel, wherein the adhesive channel is adjacent to and recessed with respect to the optical component mounting surface.

### Claim 7 (depends on 6)

The method of claim 6, wherein the spacer further comprises an alignment component, wherein the alignment component is located laterally between the adhesive channel and the chamber from the top view facing the optical component mounting surface.

### Claim 8 (depends on 1)

The method of claim 1, wherein the optical component comprises the adhesive channel, wherein the adhesive channel is recessed with respect to a bottom surface of the optical component facing the optical component mounting surface.

### Claim 9 (depends on 8)

The method of claim 8, wherein the optical component further comprises an alignment component, wherein the alignment component is located laterally between the adhesive channel and the chamber from the top view facing the optical component mounting surface.