# US 12,015,037 B2 · Imaging device and method of manufacturing imaging device

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- Number: US 12,015,037 B2
- Document ID: US12015037B2
- Status: Granted
- Kind: B2
- Application number: 17/044,994
- Filed: 2019-01-17
- Published: 2021-05-20
- Granted: 2024-06-18
- Earliest claimed: 2018-04-11
- Assignees: Sony Semiconductor Solutions Corporation
- Applicants: Sony Semiconductor Solutions Corporation
- Inventors: Yusuke Moriya
- Web page: https://patentgrep.com/patent/US12015037B2

## CPC

- H10F 39/8023: {Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery}
- G02B 5/20: Filters (polarising elements G02B5/30)
- G02B 5/208: {for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation}
- G02B 5/22: Absorbing filters {(G02B5/201 - G02B5/208 take precedence)}
- H10F 39/024: {of coatings or optical elements}
- H10F 39/12: Image sensors
- H10F 39/8053: {Colour filters}
- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- H10F 39/8063: {Microlenses}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

To prevent the occurrence of a defect in an infrared-light attenuation filter and prevent a reduction in image quality. An imaging device includes a photoelectric converter, an on-chip lens, a color filter, the infrared-light attenuation filter, and a protective film. The photoelectric converter performs photoelectric conversion depending on incident light. The on-chip lens collects the incident light into the photoelectric converter. Infrared light and visible light of a specified wavelength from among the collected incident light are transmitted through the color filter. The infrared-light attenuation filter attenuates the infrared light from among the collected incident light, and visible light from among the collected incident light is transmitted through the infrared-light attenuation filter. The protective film is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter.

## Claims

### Claim 1

An imaging device, comprising:
a photoelectric converter that performs photoelectric conversion depending on incident light;
an on-chip lens that collects the incident light into the photoelectric converter;
a color filter through which infrared light and visible light of a specified wavelength from among the collected incident light are transmitted;
an infrared-light attenuation filter that attenuates the infrared light from among the collected incident light and through which visible light from among the collected incident light is transmitted; and
a protective film that is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter,
wherein the protective film is arranged adjacent to the color filter,
wherein the infrared-light attenuation filter attenuates the infrared light transmitted through the color filter, and
wherein the protective film has substantially a same refractive index as the color filter.

### Claim 2 (depends on 1)

The imaging device according to claim 1, wherein
the protective film protects the infrared-light attenuation filter when the color filter is formed.

### Claim 3 (depends on 1)

The imaging device according to claim 1, further comprising:
a pixel that includes the photoelectric converter, the on-chip lens, the color filter, the infrared-light attenuation filter, and the protective film; and
an infrared-light pixel that includes an infrared-light transmission filter through which the infrared light from among the collected incident light is transmitted, the photoelectric converter, and the on-chip lens, wherein
the protective film is further arranged on a face of the infrared-light attenuation filter that is adjacent to the infrared-light pixel.

### Claim 4 (depends on 1)

The imaging device according to claim 1, wherein
the protective film is made of an organic material.

### Claim 5 (depends on 1)

The imaging device according to claim 1, wherein
the protective film is made of an inorganic material.

### Claim 6 (depends on 1)

The imaging device according to claim 1, wherein
the protective film is formed by stacking an organic material and an inorganic material.

### Claim 7

A method of manufacturing an imaging device, the method comprising:
forming a photoelectric converter that performs photoelectric conversion depending on incident light;
forming an on-chip lens that collects the incident light into the photoelectric converter;
forming a color filter through which infrared light and visible light of a specified wavelength from among the collected incident light are transmitted;
forming an infrared-light attenuation filter that attenuates the infrared light from among the collected incident light and through which visible light from among the collected incident light is transmitted; and
forming a protective film that is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter,
wherein the protective film is arranged adjacent to the color filter,
wherein the infrared-light attenuation filter attenuates the infrared light transmitted through the color filter, and
wherein the protective film has substantially a same refractive index as the color filter.

### Claim 8

An imaging device, comprising:
a photoelectric converter that performs photoelectric conversion depending on incident light;
an on-chip lens that collects the incident light into the photoelectric converter;
a color filter through which infrared light and visible light of a specified wavelength from among the collected incident light are transmitted;
an infrared-light attenuation filter that attenuates the infrared light from among the collected incident light and through which visible light from among the collected incident light is transmitted; and
a protective film that is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter, wherein the protective film is formed by stacking an organic material and an inorganic material.

### Claim 9 (depends on 8)

The imaging device according to claim 8, wherein
the protective film is arranged adjacent to the color filter, and the infrared-light attenuation filter attenuates the infrared light transmitted through the color filter.

### Claim 10 (depends on 8)

The imaging device according to claim 8, wherein
the protective film has substantially a same refractive index as the color filter.
