Method and system for lot-tool assignment
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRen-Chyi You, An-Wei Peng, Chang-Zong Liu, Jun-Sheng Yeh
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Abstract
A system includes a dispatching system and at least one processor. The dispatching system is configured to provide dispatching preferences indicating that tools feedback preferences thereof for at least one lot. The processor is coupled to the dispatching system and at least one memory. Computer program code encoded in the memory is executed by the processor to cause the system to process the lot using at least one of the tools with utilization of a tool-lot relationship that is generated based on the dispatching preferences. A non-transitory computer readable medium and a method are also disclosed herein.
Claims20
A system, comprising:
- a dispatching system configured to provide dispatching preferences indicating that tools feed back preferences thereof for at least one lot;
- a dispatching rule database coupled to the dispatching system, wherein the dispatching system is configured to write the dispatching preferences into the dispatching rule database;
- and
- at least one processor coupled to the dispatching system and at least one memory, wherein computer program code encoded in the at least one memory is executed by the at least one processor to
- generate a tool-lot relationship, based on the dispatching preferences, for at least one of the tools, and
- cause the at least one of the tools to perform, based on the tool-lot relationship, semiconductor processes on the at least one lot for semiconductor fabrication, the semiconductor processes including:
- a deposition process, a planarization process, and a lithography process.
A non-transitory computer readable medium comprising computer executable instructions executed by a processor for carrying out a method, the method comprising:
- deciding a dispatching rule, based on process information fed back from at least one tool that processes at least one lot, wherein the dispatching rule includes at least one dispatching preference, and the at least one dispatching preference indicates that the at least one tool feeds back preferences thereof for processing the at least one lot;
- and
- generating a tool-lot relationship, based on at least one process constraint and the dispatching rule, for the at least one tool, and causing the at least one tool to perform, based on the tool-lot relationship, semiconductor processes on the at least one lot for semiconductor fabrication, the semiconductor processes including:
- a deposition process, a planarization process, and a lithography process.
A method, comprising:
- generating a tool-lot relationship, based on a dispatching rule, wherein the dispatching rule includes a dispatching preference, the dispatching preference depends on a processing result from at least one tool for running at least one lot, and the dispatching preference indicates that the at least one tool feeds back preferences thereof for the at least one lot;
- assigning the at least one lot to the at least one tool by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot;
- causing the at least one tool to perform, based on the tool-lot relationship, semiconductor processes on the at least one lot for semiconductor fabrication, the semiconductor processes including:
- a deposition process, a planarization process, and a lithography process;
- and
- refreshing the dispatching rule, based on the processing result feeding back from the assigned at least one tool for running the at least one lot.
Dependencies are inferred from the claim text.