# US 12,010,919 B2 · Heterogeneous integration chip of micro fluid actuator

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- Number: US 12,010,919 B2
- Document ID: US12010919B2
- Status: Granted
- Kind: B2
- Application number: 17/241,506
- Filed: 2021-04-27
- Published: 2021-11-04
- Granted: 2024-06-11
- Earliest claimed: 2020-04-30
- Assignees: Microjet Technology Co., Ltd.
- Applicants: Microjet Technology Co., Ltd.
- Inventors: Hao-Jan Mou; Hsien-Chung Tai; Lin-Huei Fang; Yung-Lung Han; Chi-Feng Huang; Chun-Yi Kuo; Tsung-I Lin; Chin-Wen Hsieh
- Web page: https://patentgrep.com/patent/US12010919B2

## CPC

- B01L 3/50273: {characterised by the means or forces applied to move the fluids}
- H10N 30/802: {Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1433: {Structure of nozzle plates}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1626: {etching}
- B41J 2/1631: {photolithography}
- B41J 2/1634: {laser machining}
- B41J 2/164: {thin film formation}
- B81B 3/0021: {Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00)}
- H10N 30/2047: {Membrane type}
- B01L 2200/16: Reagents, handling or storing thereof
- B01L 2300/0681: Filter
- B01L 2300/0887: Laminated structure
- B01L 2400/0439: ultrasonic vibrations, vibrating piezo elements
- B41J 2002/14306: {Flow passage between manifold and chamber}
- B41J 2002/14362: {Assembling elements of heads}
- B41J 2002/14403: {including a filter}
- B41J 2002/14491: {Electrical connection}
- B41J 2202/11: characterised by specific geometrical characteristics
- B41J 2202/13: Heads having an integrated circuit
- B41J 2202/18: Electrical connection established using vias
- B81B 2201/036: Micropumps
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)

## Abstract

A heterogeneous integration chip of a micro fluid actuator is disclosed and includes a first substrate, a first insulation layer, a first conductive layer, a piezoelectric layer, a second conductive layer, a second substrate, a control element, a perforated trench and a conductor. The first substrate includes a first chamber. The first insulation layer is disposed on the first substrate. The first conductive layer is disposed on the first insulation layer and includes an electrode pad. The piezoelectric layer and the second conductive layer are stacked on the first conductive layer sequentially. The second substrate is assembled to the first substrate through a bonding layer to define a second chamber and includes an orifice, a fluid flowing channel and a third chamber. The control element is disposed in the second substrate. The perforated trench filled with the conductor is penetrated from the electrode pad to the second substrate.

## Claims

### Claim 1

A heterogeneous integration chip of a micro fluid actuator, comprising:
a first substrate comprising a first chamber;
a first insulation layer disposed on the first substrate;
a first conductive layer disposed on the first insulation layer and comprising at least one electrode pad;
a piezoelectric layer disposed on the first conductive layer;
a second conductive layer disposed on the piezoelectric layer;
a second substrate assembled to the first substrate to define a second chamber and comprising an orifice, a fluid flowing channel and a third chamber;
a bonding layer connected between the first substrate and the second substrate;
a control element disposed in the second substrate;
at least one perforated trench penetrated from the at least one electrode pad to the second substrate; and
at least one conductor filled in the at least one perforated trench.

### Claim 2 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, wherein the first substrate and the second substrate are silicon substrates.

### Claim 3 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, wherein the first insulation layer is made of a silicon nitride material.

### Claim 4 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, wherein the control element is a metal-oxide-semiconductor field-effect transistor.

### Claim 5 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, further comprising at least one wiring body electrically connected between the control element and the at least one conductor.

### Claim 6 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, wherein the first chamber has a first depth ranging from 50 μm to 200 μm.

### Claim 7 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, wherein the bonding layer has a second depth ranging from 10 μm to 35 μm.

### Claim 8 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, wherein a third depth defined from a bottom of the bonding layer to a bottom of the second substrate ranges from 370 μm to 525 μm.

### Claim 9 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, wherein the second substrate comprises at least one engaging protrusion.

### Claim 10 (depends on 9)

The heterogeneous integration chip of the micro fluid actuator according to claim 9, wherein the shape of the at least one engaging protrusion is selected from the group consisting of a cube, a cuboid and a quadrilateral.

### Claim 11 (depends on 10)

The heterogeneous integration chip of the micro fluid actuator according to claim 10, wherein the first substrate comprises at least one engaging recess, and the shape of the at least one engaging recess is corresponding to the at least one engaging protrusion of the second substrate.

### Claim 12 (depends on 1)

The heterogeneous integration chip of the micro fluid actuator according to claim 1, further comprising a filter structure disposed in the second chamber.

### Claim 13 (depends on 12)

The heterogeneous integration chip of the micro fluid actuator according to claim 12, wherein the shape of the filter structure is selected from the group consisting of a guide groove, a square column and a cylindrical.

### Claim 14

A heterogeneous integration chip of a micro fluid actuator, comprising:
a first substrate comprising at least one first chamber;
a first insulation layer disposed on the first substrate;
a first conductive layer disposed on the first insulation layer and comprising at least one electrode pad;
a piezoelectric layer disposed on the first conductive layer;
a second conductive layer disposed on the piezoelectric layer, wherein at least one actuation region is collaboratively defined by the first conductive layer, the piezoelectric layer and the second conductive layer;
a second substrate assembled to the first substrate to define at least one second chamber and comprising at least one orifice, at least one fluid flowing channel and at least one third chamber, wherein the positions of the at least one first chamber of the first substrate, the at least one second chamber of the second substrate, the at least one orifice, the at least one fluid flowing channel and the at least one third chamber are corresponding to the at least one actuation region;
a control element disposed in the second substrate;
at least one perforated trench penetrated from the at least one electrode pad to the second substrate; and
at least one conductor filled in the at least one perforated trench.