# US 12,009,803 B2 · Bulk acoustic wave resonator, filter and radio frequency communication system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,009,803 B2 - Document ID: US12009803B2 - Status: Granted - Kind: B2 - Application number: 17/449,836 - Filed: 2021-10-04 - Published: 2022-01-27 - Granted: 2024-06-11 - Earliest claimed: 2019-04-04 - Assignees: Ningbo Semiconductor International Corporation - Applicants: Ningbo Semiconductor International Corporation - Inventors: Hailong Luo - Web page: https://patentgrep.com/patent/US12009803B2 ## CPC - H03H 9/173: {Air-gaps} - H03H 3/02: for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) - H03H 9/02015: {Characteristics of piezoelectric layers, e.g. cutting angles} - H03H 9/02118: {of lateral leakage between adjacent resonators} - H03H 9/131: {consisting of a multilayered structure} - H03H 9/132: {characterized by a particular shape} - H03H 9/54: comprising resonators of piezoelectric or electrostrictive material (comprising resonators using surface acoustic waves H03H9/64) - H03H 2003/021: {the resonators or networks being of the air-gap type} - H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P) ## Abstract A bulk acoustic wave resonator, a filter, and a radio frequency communication system are provided. The bulk acoustic wave resonator includes a substrate and a bottom electrode layer, where a cavity is formed therebetween. The bulk acoustic wave resonator also includes a piezoelectric layer formed on the bottom electrode layer and over the cavity, and a top electrode layer formed over the piezoelectric layer. At least one of the bottom electrode layer and the top electrode layer has a convex portion or concave portion. The convex portion is located in a region of the cavity and is protruded facing away from a bottom of the cavity, and the concave portion is located in the region of the cavity and is recessed towards the bottom of the cavity. Each of the convex portion and the concave portion is located in a peripheral region surrounding the piezoelectric layer. ## Claims ### Claim 1 A bulk acoustic wave resonator, comprising: a substrate; a bottom electrode layer, disposed over the substrate, wherein a cavity is formed between the bottom electrode layer and the substrate; and a piezoelectric layer, formed on the bottom electrode layer and over the cavity; a top electrode layer, formed over the piezoelectric layer, wherein: each of the bottom electrode layer and the top electrode layer has a convex portion or concave portion, wherein the convex portion is located in a region of the cavity and is protruded facing away from a bottom of the cavity, the concave portion is located in the region of the cavity and is recessed towards the bottom of the cavity, and each of the convex portion and the concave portion is located in a peripheral region surrounding the piezoelectric layer. ### Claim 2 (depends on 1) The bulk acoustic wave resonator according to claim 1, wherein: the bottom electrode layer further includes a bottom electrode lap portion, wherein one end of the bottom electrode lap portion is connected to a bottom electrode concave portion or a bottom electrode convex portion, and another end of the bottom electrode lap portion is connected to the substrate at a periphery of the cavity; the top electrode layer further includes a top electrode lap portion, wherein one end of the top electrode lap portion is connected to a top electrode convex portion or a top electrode concave portion, and another end of the top electrode lap portion is extended to be suspended over the substrate at the periphery of the cavity; the bottom electrode lap portion and the top electrode lap portion are staggered from each other; and the bottom electrode layer further includes a bottom electrode resonance portion that overlaps the piezoelectric layer, and the top electrode layer further includes a top electrode resonance portion that overlaps the piezoelectric layer, wherein each of the bottom electrode resonance portion and the top electrode resonance portion has a polygon shape. ### Claim 3 (depends on 2) The bulk acoustic wave resonator according to claim 2, wherein: the bottom electrode concave portion or the bottom electrode convex portion is disposed along an edge of the bottom electrode resonance portion, and is disposed at least in a region where the bottom electrode lap portion and the bottom electrode resonance portion are aligned; and the top electrode convex portion or the top electrode concave portion is disposed along an edge of the top electrode resonance portion, and is disposed at least in a region where the top electrode lap portion and the top electrode resonance portion are aligned. ### Claim 4 (depends on 3) The bulk acoustic wave resonator according to claim 3, wherein: the bottom electrode concave portion or the bottom electrode convex portion is at least staggered from the top electrode lap portion over the cavity, or the bottom electrode concave portion or the bottom electrode convex portion fully surrounds the bottom electrode resonance portion; and the top electrode convex portion or the top electrode concave portion is at least staggered from the bottom electrode lap portion over the cavity, or the top electrode convex portion or the top electrode concave portion fully surrounds the top electrode resonance portion. ### Claim 5 (depends on 3) The bulk acoustic wave resonator according to claim 3, wherein: projections of the top electrode convex portion or the top electrode concave portion and the bottom electrode concave portion or the bottom electrode convex portion on the bottom of the cavity are just connected with, staggered from, or overlapped with, each other. ### Claim 6 (depends on 3) The bulk acoustic wave resonator according to claim 3, wherein: the bottom electrode concave portion or the bottom electrode convex portion, the bottom electrode lap portion and the bottom electrode resonance portion are formed using a same film layer; and the top electrode convex portion or the top electrode concave portion, the top electrode lap portion and the top electrode resonance portion are formed using a same film layer. ### Claim 7 (depends on 4) The bulk acoustic wave resonator according to claim 4, wherein: a portion of the bottom electrode lap portion over the cavity fully covers the cavity, and does not overlap the top electrode lap portion in a width direction of the top electrode lap portion. ### Claim 8 (depends on 1) The bulk acoustic wave resonator according to claim 1, wherein: a sidewall of a top electrode convex portion or a top electrode concave portion is inclined with respect to a top surface of the piezoelectric layer; and a sidewall of a bottom electrode concave portion or a bottom electrode convex portion is inclined with respect to a bottom surface of the piezoelectric layer. ### Claim 9 (depends on 8) The bulk acoustic wave resonator according to claim 8, wherein: an angle between the sidewall of the top electrode convex portion or the top electrode concave portion and the top surface of the piezoelectric layer is less than or equal to 45°, and an angle between the sidewall of the bottom electrode concave portion or the bottom electrode convex portion and the bottom surface of the piezoelectric layer is less than or equal to 45°. ### Claim 10 (depends on 1) The bulk acoustic wave resonator according to claim 1, wherein: the cavity has a groove structure having an entirety of the bottom recessed into the substrate, or the cavity has a cavity structure overall protruded on the substrate. ### Claim 11 (depends on 1) The bulk acoustic wave resonator according to claim 1, wherein: a line width of a top electrode convex portion or a top electrode concave portion is a minimum line width allowed by a process for forming the top electrode convex portion or the top electrode concave portion, and a line width of a bottom electrode concave portion or a bottom electrode convex portion is a minimum line width allowed by a process for forming the bottom electrode concave portion or the bottom electrode convex portion. ### Claim 12 (depends on 1) The bulk acoustic wave resonator according to claim 1, wherein: a horizontal distance between a top electrode convex portion or a top electrode concave portion and the piezoelectric layer is a minimum distance allowed by a process for forming the top electrode convex portion or the top electrode concave portion, and a horizontal distance between a bottom electrode concave portion or a bottom electrode convex portion and the piezoelectric layer is a minimum distance allowed by a process for forming the bottom electrode concave portion or the bottom electrode convex portion. ### Claim 13 (depends on 1) The bulk acoustic wave resonator according to claim 1, wherein: a portion of one of the top electrode layer and the bottom electrode layer over the cavity is extended flat. ### Claim 14 (depends on 1) The bulk acoustic wave resonator according to claim 1, wherein: the bottom electrode layer has the convex portion, and the top electrode layer has the concave portion; or the bottom electrode layer has the convex portion, and the top electrode layer has the convex portion; or the bottom electrode layer has the concave portion, and the top electrode layer has the convex portion; or the bottom electrode layer has the concave portion, and the top electrode layer has the concave portion. ### Claim 15 A filter, comprising: a bulk acoustic wave resonator, the bulk acoustic wave resonator including: a substrate; a bottom electrode layer, disposed over the substrate, wherein a cavity is formed between the bottom electrode layer and the substrate; a piezoelectric layer, formed on the bottom electrode layer and over the cavity; and a top electrode layer, formed over the piezoelectric layer, wherein: each of the bottom electrode layer and the top electrode layer has a convex portion or concave portion, wherein the convex portion is located in a region of the cavity and is protruded facing away from a bottom of the cavity, the concave portion is located in the region of the cavity and is recessed towards the bottom of the cavity, and each of the convex portion and the concave portion is located in a peripheral region surrounding the piezoelectric layer. ### Claim 16 (depends on 15) The filter according to claim 15, wherein: a portion of one of the top electrode layer and the bottom electrode layer over the cavity is extended flat. ### Claim 17 (depends on 15) The filter according to claim 15, wherein: the bottom electrode layer has the convex portion, and the top electrode layer has the concave portion; or the bottom electrode layer has the convex portion, and the top electrode layer has the convex portion; or the bottom electrode layer has the concave portion, and the top electrode layer has the convex portion; or the bottom electrode layer has the concave portion, and the top electrode layer has the concave portion. ### Claim 18 A radio frequency communication system, comprising: a filter including a bulk acoustic wave resonator, the bulk acoustic wave resonator including: a substrate; a bottom electrode layer, disposed over the substrate, wherein a cavity is formed between the bottom electrode layer and the substrate; a piezoelectric layer, formed on the bottom electrode layer and over the cavity; and a top electrode layer, formed over the piezoelectric layer, wherein: each of the bottom electrode layer and the top electrode layer has a convex portion or concave portion, wherein the convex portion is located in a region of the cavity and is protruded facing away from a bottom of the cavity, the concave portion is located in the region of the cavity and is recessed towards the bottom of the cavity, and each of the convex portion and the concave portion is located in a peripheral region surrounding the piezoelectric layer. ### Claim 19 (depends on 18) The radio frequency communication system according to claim 18, wherein: a portion of one of the top electrode layer and the bottom electrode layer over the cavity is extended flat. ### Claim 20 (depends on 18) The radio frequency communication system according to claim 18, wherein: the bottom electrode layer has the convex portion, and the top electrode layer has the concave portion; or the bottom electrode layer has the convex portion, and the top electrode layer has the convex portion; or the bottom electrode layer has the concave portion, and the top electrode layer has the convex portion; or the bottom electrode layer has the concave portion, and the top electrode layer has the concave portion.