# US 12,009,755 B2 · High-frequency power supply device

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- Number: US 12,009,755 B2
- Document ID: US12009755B2
- Status: Granted
- Kind: B2
- Application number: 17/581,039
- Filed: 2022-01-21
- Published: 2022-07-28
- Granted: 2024-06-11
- Earliest claimed: 2021-01-28
- Assignees: Shimadzu Corporation
- Applicants: Shimadzu Corporation
- Inventors: Naoki Yasuda
- Web page: https://patentgrep.com/patent/US12009755B2

## CPC

- H02M 3/3385: {with automatic control of output voltage or current (H02M3/33561 takes precedence)}
- H01J 37/321: {the radio frequency energy being inductively coupled to the plasma}
- H01J 37/32174: {Circuits specially adapted for controlling the RF discharge}
- H02M 1/32: Means for protecting converters other than automatic disconnection
- H02M 7/003: {Constructional details, e.g. physical layout, assembly, wiring or busbar connections}
- H02M 7/4815: {Resonant converters (H02M7/4811 and H02M7/4826 take precedence)}
- H02M 7/4818: {with means for adaptation of resonance frequency, e.g. by modification of capacitance or inductance of resonance circuits}
- H02M 7/5383: in a self-oscillating arrangement (H02M7/538 takes precedence)
- H02M: APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF (transformers H01F; dynamo-electric converters H02K47/00; controlling transformers, reactors or choke coils, control or regulation of electric motors, generators or dynamo-electric converters H02P)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Provided is a high-frequency power supply device capable of causing an appropriate current to flow through a transformer. A self-oscillation high-frequency power supply device is provided with a DC power supply, an LC resonant circuit, a switching circuit, and a transformer. The LC resonant circuit includes an induction coil for plasma generation and a capacitor. The switching circuit includes a semiconductor element, the switching circuit being configured to subject DC power supplied from the DC power supply to switching processing to supply high-frequency power to the LC resonant circuit. The transformer includes a primary coil included in the LC resonant circuit and a secondary coil connected to the semiconductor element to turn on/off a semiconductor element. The transformer has a coaxial structure in which the primary coil and the secondary coil are coaxially provided. The LC resonant circuit includes a resistor connected in parallel to the primary coil.

## Claims

### Claim 1

A self-oscillation high-frequency power supply device, comprising:
a DC power supply;
an LC resonant circuit including an induction coil for plasma generation and a capacitor;
a switching circuit including a semiconductor element, the switching circuit being configured to subject DC power supplied from the DC power supply to switching processing to supply high-frequency power to the LC resonant circuit, and
a transformer including a primary coil included in the LC resonant circuit and a secondary coil connected to the semiconductor element to turn on/off the semiconductor element,
wherein the transformer is formed in a coaxial structure in which the primary coil and the secondary coil are coaxially provided, and
wherein the LC resonant circuit includes a parallel circuit consisting only of the primary coil of the transformer and a resistor.

### Claim 2 (depends on 1)

The self-oscillation high-frequency power supply device as recited in claim 1,
wherein the transformer and the resistor are each formed in a U-shape.

### Claim 3 (depends on 1)

The self-oscillation high-frequency power supply device as recited in claim 1, further comprising:
a heat sink with electrical insulation properties,
wherein the heat sink is in contact with both the transformer and the resistor.

### Claim 4 (depends on 3)

The self-oscillation high-frequency power supply device as recited in claim 3,
wherein the transformer and the resistor extend in parallel to each other in a state of facing each other, and
wherein the heat sink is positioned between the transformer and the resistor.

### Claim 5 (depends on 1)

The self-oscillation high-frequency power supply device as recited in claim 1,
wherein the resistor is a variable resistor.