# US 12,009,454 B2 · Light emitting device

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- Number: US 12,009,454 B2
- Document ID: US12009454B2
- Status: Granted
- Kind: B2
- Application number: 17/507,058
- Filed: 2021-10-21
- Published: 2022-05-19
- Granted: 2024-06-11
- Earliest claimed: 2020-11-16
- Assignees: Nichia Corporation
- Applicants: Nichia Corporation
- Inventors: Takuya Okada
- Web page: https://patentgrep.com/patent/US12009454B2

## CPC

- H10H 20/812: within the light-emitting regions, e.g. having quantum confinement structures
- H10H 20/825: containing nitrogen, e.g. GaN
- H10H 20/811: having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H 20/8252: {characterised by the dopants}
- H10H 20/815: having stress relaxation structures, e.g. buffer layers
- H10H 20/8215: {characterised by crystalline imperfections, e.g. dislocations; characterised by the distribution of dopants, e.g. delta-doping}
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS

## Abstract

A light-emitting device includes an n-side semiconductor layer comprising an n-type contact layer and an intermediate layer located on the n-type contact layer; an active layer located on the intermediate layer; and a p-side semiconductor layer located on the active layer. The intermediate layer includes at least one stacked portion comprising a first layer and a second layer. The first layer is an n-type nitride semiconductor layer comprising an n-type impurity, Al, and Ga. The second layer is a nitride semiconductor layer that includes Al and Ga, has a lower n-type impurity concentration than the first layer, and has a larger thickness than the first layer. An Al composition ratio of the first layer is higher than an Al composition ratio of the second layer.

## Claims

### Claim 1

A light-emitting device comprising:
an n-side semiconductor layer comprising an n-type contact layer, and an intermediate layer located on the n-type contact layer;
an active layer located on the intermediate layer;
a p-side semiconductor layer located on the active layer; and
an n-side electrode contacting the n-type contact layer, wherein:
the intermediate layer comprises at least one stacked portion comprising a first layer and a second layer,
the first layer is an n-type nitride semiconductor layer comprising an n-type impurity, Al, and Ga,
the second layer is a nitride semiconductor layer that comprises Al and Ga, and has a larger thickness than the first layer,
an n-type impurity concentration of the first layer is lower than an n-type impurity concentration of the n-type contact layer,
an n-type impurity concentration of the second layer is lower than the n-type impurity concentration of the first layer, and
an Al composition ratio of the first layer is higher than an Al composition ratio of the second layer.

### Claim 2 (depends on 1)

The device according to claim 1,
wherein the at least one stacked portion comprises a plurality of the stacked portions.

### Claim 3 (depends on 2)

The device according to claim 2,
wherein an Al composition ratio of a first layer located closest to the active layer, among a plurality of first layers of the plurality of stacked portions, is higher than an Al composition ratio of other first layers of the plurality of first layers.

### Claim 4 (depends on 3)

The device according to claim 3,
wherein an n-type impurity concentration of a first layer located closest to the active layer, among a plurality of first layers of the plurality of stacked portions, is higher than an n-type impurity concentration of other first layers of the plurality of first layers.

### Claim 5 (depends on 4)

The device according to claim 4,
wherein the intermediate layer further comprises a nitride semiconductor layer that is located between the first layer located closest to the active layer and the active layer, has a lower n-type impurity concentration than the first layer located closest to the active layer, and comprises Al and Ga.

### Claim 6 (depends on 3)

The device according to claim 3,
wherein an n-type impurity concentration of a second layer located closest to the active layer, among a plurality of second layers of the plurality of stacked portions, is higher than an n-type impurity concentration of other second layers of the plurality of stacked portions.

### Claim 7 (depends on 3)

The device according to claim 3,
wherein the thickness of the second layer is 10 times or more the thickness of the first layer.

### Claim 8 (depends on 3)

The device according to claim 3,
wherein the thickness of the second layer is 50 nm or more and 100 nm or less.

### Claim 9 (depends on 3)

The device according to claim 3,
wherein the first layer is made of Ala1Ga1−a1N (0<a1<1),
the second layer is made of Ala2Ga1−a2N (0<a2<1), and
an Al composition ratio a1 of the first layer and an Al composition ratio a2 of the second layer are 0.01 or less.

### Claim 10 (depends on 2)

The device according to claim 2,
wherein an n-type impurity concentration of a first layer located closest to the active layer, among a plurality of first layers of the plurality of stacked portions, is higher than an n-type impurity concentration of other first layers of the plurality of first layers.

### Claim 11 (depends on 10)

The device according to claim 10,
wherein the intermediate layer further comprises a nitride semiconductor layer that is located between the first layer located closest to the active layer and the active layer, has a lower n-type impurity concentration than the first layer located closest to the active layer, and comprises Al and Ga.

### Claim 12 (depends on 10)

The device according to claim 10,
wherein an n-type impurity concentration of a second layer located closest to the active layer, among a plurality of second layers of the plurality of stacked portions, is higher than an n-type impurity concentration of other second layers of the plurality of stacked portions.

### Claim 13 (depends on 2)

The device according to claim 2,
wherein an n-type impurity concentration of a second layer located closest to the active layer, among a plurality of second layers of the plurality of stacked portions, is higher than an n-type impurity concentration of other second layers of the plurality of stacked portions.

### Claim 14 (depends on 2)

The device according to claim 2,
wherein the thickness of the second layer is 10 times or more the thickness of the first layer.

### Claim 15 (depends on 2)

The device according to claim 2,
wherein the thickness of the second layer is 50 nm or more and 100 nm or less.

### Claim 16 (depends on 2)

The device according to claim 2,
wherein the first layer is made of Ala1Ga1−a1N (0<a1<1),
the second layer is made of Ala2Ga1−a2N (0<a2<1), and
an Al composition ratio a1 of the first layer and an Al composition ratio a2 of the second layer are 0.01 or less.

### Claim 17 (depends on 1)

The device according to claim 1,
wherein the n-type impurity is silicon.

### Claim 18 (depends on 1)

The device according to claim 1,
wherein the thickness of the second layer is 10 times or more the thickness of the first layer.

### Claim 19 (depends on 1)

The device according to claim 1,
wherein the thickness of the second layer is 50 nm or more and 100 nm or less.

### Claim 20 (depends on 1)

The device according to claim 1,
wherein the first layer is made of Ala1Ga1−a1N (0<a1<1),
the second layer is made of Ala2Ga1−a2N (0<a2<1), and
an Al composition ratio a1 of the first layer and an Al composition ratio a2 of the second layer are 0.01 or less.
