# US 12,009,347 B1 · Nano-tether micro LED structure

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- Number: US 12,009,347 B1
- Document ID: US12009347B1
- Status: Granted
- Kind: B1
- Application number: 17/345,272
- Filed: 2021-06-11
- Granted: 2024-06-11
- Earliest claimed: 2020-07-13
- Assignees: Apple Inc.
- Applicants: Apple Inc.
- Inventors: Andreas Bibl; Dariusz Golda; Chae Hyuck Ahn; Clayton K Chan; Hyeun-Su Kim
- Web page: https://patentgrep.com/patent/US12009347B1

## CPC

- H10W 90/00: Package configurations
- H10H 20/8506: {Containers}
- H10H 20/857: Interconnections, e.g. lead-frames, bond wires or solder balls
- H10H 20/0364: {of interconnections}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS

## Abstract

Donor substrate micro device stabilization structures and display structures are described. In an embodiment, a patterned electrically conductive layer is used to stabilize an array of micro devices on donor substrate with a plurality of tethers, which can be broken during a transfer sequence to transfer the array of micro devices from the donor substrate.

## Claims

### Claim 1

A display structure comprising:
a display substrate;
a landing pad; and
a micro light emitting diode (LED) mounted on the landing pad, the micro LED including a p-n diode and a patterned electrically conductive layer, the patterned electrically conductive layer including a contact pad and a plurality of tethers that extend from the contact pad.

### Claim 2 (depends on 1)

The display structure of claim 1, wherein each tether includes an internal region and a terminal region adjacent a terminal end of the tether.

### Claim 3 (depends on 2)

The display structure of claim 2, wherein the terminal region includes a larger grain boundary dislocation density than the internal region.

### Claim 4 (depends on 2)

The display structure of claim 2, wherein the terminal region includes an intermetallic compound along a surface of the patterned electrically conductive layer.

### Claim 5 (depends on 2)

The display structure of claim 2, wherein the terminal end is adjacent an edge of the p-n diode.

### Claim 6 (depends on 2)

The display structure of claim 2, wherein the patterned electrically conductive layer is a metallic layer.

### Claim 7 (depends on 6)

The display structure of claim 6, wherein the micro LED includes a metal-stack bottom contact coupled with the contact pad underneath the p-n diode.

### Claim 8 (depends on 7)

The display structure of claim 7, wherein the micro LED has a maximum width of less than 10 μm.

### Claim 9 (depends on 2)

The structure of claim 2, wherein the patterned electrically conductive layer comprises a material selected from the group consisting of Ni, NiCr, Ru, Au, Cu, Cr, Mo, Ti, and a conductive metal nitride.

### Claim 10 (depends on 2)

The display structure of claim 2, wherein the micro LED includes a bottom contact coupled to the contact pad, the bottom contact including a multiple layer stack.

### Claim 11 (depends on 10)

The display structure of claim 10, wherein the multiple layer stack includes a reflector layer, a diffusion barrier layer, and a bonding layer.

### Claim 12 (depends on 10)

The display structure of claim 10, wherein the bottom contact is underneath the contact pad.

### Claim 13 (depends on 12)

The display structure of claim 12, wherein the bottom contact is bonded to the landing pad with a bonding layer.

### Claim 14 (depends on 2)

The display structure of claim 2, wherein each tether includes a terminal end that extends between corresponding edges of the micro LED.

### Claim 15 (depends on 14)

The display structure of claim 14, the micro LED includes tapered corners.

### Claim 16 (depends on 2)

The display structure of claim 2, wherein the contact pad is on a top side of the micro LED, and the micro LED includes a bottom contact.

### Claim 17 (depends on 16)

The display structure of claim 16, wherein the bottom contact is bonded to the landing pad with a bonding layer.

### Claim 18 (depends on 16)

The display structure of claim 16, wherein the patterned electrically conductive layer is a transparent layer.

### Claim 19 (depends on 2)

The display structure of claim 2, wherein each tether includes side edges and a terminal region adjacent a terminal end of the tether, wherein the terminal end has a more irregular surface profile than the side edges.