# US 12,009,260 B2 · Method and system of forming integrated circuit > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,009,260 B2 - Document ID: US12009260B2 - Status: Granted - Kind: B2 - Application number: 17/011,801 - Filed: 2020-09-03 - Published: 2020-12-24 - Granted: 2024-06-11 - Earliest claimed: 2018-08-13 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Company Ltd. - Inventors: Ka Fai Chang; Fong-Yuan Chang; Chin-Chou Liu; Yi-Kan Cheng - Web page: https://patentgrep.com/patent/US12009260B2 ## CPC - H10D 84/038: {using silicon technology, e.g. SiGe} - G06F 30/398: Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36) - H10D 88/01: {Manufacture or treatment} - H10W 20/427: {Power or ground buses} - H10W 20/497: {Inductive arrangements or effects of, or between, wiring layers} - H10W 72/50: Bond wires - G06F 2119/06: Power analysis or power optimisation - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A method for forming an integrated circuit (IC) is provided. The method includes the following operations. A circuit layout including a first load region and a second load region is received. A full power network of the circuit layout is obtained. The full power network is transformed into a first power network according to the first load region. A first power simulation is performed upon the first power network. The full power network is transformed into a second power network according to the second load region. A second power simulation is performed upon the second power network. The IC is fabricated according to the circuit layout. ## Claims ### Claim 1 A system for forming an integrated circuit (IC), comprising: a design tool including instructions to provide a circuit layout including a first load region and a second load region, wherein the circuit layout includes a full power network; a verification tool including instructions to transform the full power network into a first power network according to the first load region and perform a first power simulation upon the first power network including simulating applying a first current to the first load region, and to transform the full power network into a second power network according to the second load region and perform a second power simulation upon the second power network including simulating applying a second current to the second load region; and a fabricating device arranged to fabricate the IC according to the circuit layout, wherein the first power network comprises a densely meshed region corresponding to the first load region and a roughly meshed region corresponding to the second load region, and the second power network comprises a densely meshed region corresponding to the second load region and a roughly meshed region corresponding to the first load region. ### Claim 2 (depends on 1) The system of claim 1, wherein simulating applying the first current to the first load region is within a first time period. ### Claim 3 (depends on 2) The system of claim 2, wherein the verification tool is further arranged to perform the first power simulation upon the first load region based on the first current simulated passing through the first power network within the first time period. ### Claim 4 (depends on 2) The system of claim 2, wherein the IC is a three-dimensional IC comprising a first chip package and a second chip package stacked over the first chip package, and the first power network comprises a first sub-power network corresponding to the first chip package and a second sub-power network corresponding to the second chip package, and the first sub-power network is coupled to the second sub-power network through a first path and a second path. ### Claim 5 (depends on 4) The system of claim 4, wherein the first current comprises a first sub-current simulated passing through the first path and a second sub-current simulated passing through the second path, and the verification tool is further arranged to obtain conductivity information of the first path and the second path based on the first sub-current and the second sub-current, respectively. ### Claim 6 (depends on 5) The system of claim 5, wherein the verification tool is further arranged to perform the first power simulation upon the first load region by utilizing the first path and without utilizing the second path when a ratio of an impedance of the first path to an impedance of the second path is less than 0.05. ### Claim 7 (depends on 5) The system of claim 5, wherein the verification tool is further arranged to perform the first power simulation upon the first load region by utilizing the first path and the second path when a ratio of an impedance of the first path to an impedance of the second path is within 0.05 to 20. ### Claim 8 (depends on 2) The system of claim 2, wherein the simulating applying the second current to the second load region is within a second time period free from overlapping the first time period; and the verification tool includes instructions to perform the second power simulation upon the second load region independently based on the second current passing through the second power network within the second time period. ### Claim 9 (depends on 8) The system of claim 8, wherein the circuit layout further comprises a third load region, and the verification tool is further arranged to: transform the full power network into a third power network according to the first load region and the third load region; and perform a third power simulation upon the third power network within a third time period free from overlapping the first time period and the second time period. ### Claim 10 (depends on 1) The system of claim 1, wherein the first power network comprises a first inductive element and a second inductive element electrically connected to the first inductive element and at a downstream position of the first inductive element, and the verification tool is further arranged to simulate applying the first current to the first inductive element. ### Claim 11 (depends on 10) The system of claim 10, wherein the verification tool is further arranged to estimate a voltage across the first inductive element based on the simulated first current. ### Claim 12 (depends on 11) The system of claim 11, wherein the verification tool is further arranged to determine a current profile of the second current simulated passing through the second inductive element based on the simulated first current. ### Claim 13 A system for forming a three-dimensional (3D) integrated circuit (IC) comprising a first chip package and a second chip package stacked over the first chip package, the system comprising: a design tool including instructions to provide a first circuit layout corresponding to the first chip package and a second circuit layout corresponding to the second chip package, wherein the first circuit layout and the second circuit layout include a f first sub-power network and a second sub-power network, respectively, and the first sub-power network is coupled to the second sub-power network through a first path and a second path; a verification tool including instructions to obtain conductivity information of the first path and the second path, and perform a power simulation upon the first sub-power network, the second sub-power network, and at least one of the first path and the second path based on the conductivity information comprising simulating applying a current to only one of the first path and the second path or simulating applying a first sub-current to the first path and applying a second sub-current to the second path; and a fabricating device arranged to fabricate the 3D IC according to the first circuit layout and the second circuit layout. ### Claim 14 (depends on 13) The system of claim 13, wherein the verification tool is further arranged to: obtain an impedance of the first path and an impedance of the second path. ### Claim 15 (depends on 14) The system of claim 14, wherein the verification tool is further arranged to: perform the power simulation upon the first sub-power network, the second sub-power network, and the first path when a ratio of the impedance of the first path to the impedance of the second path is less than 0.05. ### Claim 16 (depends on 14) The system of claim 14, wherein the verification tool is further arranged to: perform the power simulation upon the first sub-power network, the second sub-power network, the first path, and the second path when a ratio of the impedance of the first path to the impedance of the second path is within 0.05 to 20. ### Claim 17 A system for forming a three-dimensional (3D) integrated circuit (IC) including a first chip package and a second chip package stacked over the first chip package, the system comprising: a design tool including instructions to provide a first circuit layout corresponding to the first chip package and a second circuit layout corresponding to the second chip package, wherein the first circuit layout and the second circuit layout include a f first sub-power network and a second sub-power network, respectively; a verification tool including instructions to transform the first sub-power network and the second sub-power network into a first power network and perform a first power simulation upon the first power network including simulating applying a first current to a first load region, and transform the first sub-power network and the second sub-power network into a second power network different from the first power network and perform a second power simulation upon the second power network including simulating applying a second current to the second load region; and a fabricating device arranged to fabricate the IC according to the first circuit layout and the second circuit layout, wherein each of the first and second sub-power networks comprises a densely meshed region and a roughly meshed region. ### Claim 18 (depends on 17) The system of claim 17, wherein the first sub-power network is coupled to the second sub-power network through a first path and a second path. ### Claim 19 (depends on 17) The system of claim 17, wherein the first power network comprises a first inductive element and a second inductive element electrically connected to the first inductive element and at a downstream position of the first inductive element, and the performing of the first power simulation upon the first power network comprises: simulating applying the first current to the first inductive element. ### Claim 20 (depends on 17) The system of claim 17, wherein the simulating applying the first current to the first load region is within a first time period.