# US 12,009,248 B2 · Pin lifting device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,009,248 B2 - Document ID: US12009248B2 - Status: Granted - Kind: B2 - Application number: 17/276,744 - Filed: 2019-09-16 - Published: 2022-02-10 - Granted: 2024-06-11 - Earliest claimed: 2018-09-17 - Assignees: VAT Holding AG - Applicants: VAT Holding AG - Inventors: Michael Dür; Rico Rohner; Adrian Eschenmoser; Marco Apolloni - Web page: https://patentgrep.com/patent/US12009248B2 ## CPC - H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins} - H01J 2237/20: Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract Disclosed is a pin lifting device which includes a housing extending along an adjustment axis, a housing end at a first end region of the housing and has a housing opening, a drive part arranged at a second end region of the housing, an adjusting device having a part which can move in the housing in the direction of the adjustment axis, a guide section for the adjusting device formed on the inside of the housing between a first stop at the frontal housing end and a second stop remote therefrom, a tight connecting device formed inside the housing between the frontal housing end and the adjusting device, and a connecting channel extending from the first stop to the second stop at the guide section. A contiguous second inner region leads to minimal changes in the volume of the second inner region even during movements of the movable part. ## Claims ### Claim 1 A pin lifting device configured to move and position a substrate to be processed, in a process atmosphere region provided by a vacuum process chamber, comprises: a housing which extends along an adjustment axis, a frontal housing end which is arranged at a first end region of the housing and has a housing opening, and a drive part which is arranged at a second end region of the housing, an adjusting device having a part movable in the housing in a direction of the adjustment axis, a guide section for the adjusting device formed internally on the housing between a first stop at the frontal housing end and a second stop remote therefrom, a coupling leading from the adjusting device through the housing opening for carrying a support pin, wherein a tight connecting device which is formed inside the housing between the frontal housing end and the adjusting device and which is formed and fastened to the frontal housing end and to the adjusting device in such a way that access through the housing opening leads only into a first inner region which is closed off by the tight connecting device and the adjusting device, and a connecting channel extending from the first stop to the second stop at the guide section and ensuring the connection of a second inner region between the housing, the frontal housing end, the connecting device, the adjusting device and the drive part. ### Claim 2 (depends on 1) The pin lifting device according to claim 1, wherein the adjusting device is adjustably guided on the guide section by means of a guide sleeve. ### Claim 3 (depends on 2) The pin lifting device according to claim 2, wherein the guide sleeve and the guide section have a circular-cylindrical contact region. ### Claim 4 (depends on 1) The pin lifting device according to claim 1, wherein the tight connecting device comprises a bellows-shaped sealing element. ### Claim 5 (depends on 1) The pin lifting device according to claim 1, wherein the connecting channel is formed as a longitudinal groove on an inside of the housing. ### Claim 6 (depends on 5) The pin lifting device according to claim 5, wherein a feather key, which is guided in the longitudinal groove, is arranged on the part movable in the housing, wherein the feather key leaves a passage free in the longitudinal groove for the connecting channel. ### Claim 7 (depends on 1) The pin lifting device according to claim 1, wherein a compensation opening adjoins the second inner region. ### Claim 8 (depends on 7) The pin lifting device according to claim 7, wherein the compensation opening adjoins the connecting channel. ### Claim 9 (depends on 7) The pin lifting device according to claim 7, wherein a filter is disposed at the compensation opening which reduces an escape of particles into an environment. ### Claim 10 (depends on 7) The pin lifting device according to claim 7, wherein the compensation opening is connected to a compensation container or to a vacuum pump, via an adjustable valve. ### Claim 11 (depends on 1) The pin lifting device according to claim 1, wherein the drive part comprises a threaded rod and the adjusting device comprises a slide, wherein the slide is coupled to the threaded rod and is linearly movable along the threaded rod. ### Claim 12 (depends on 11) The pin lifting device according to claim 11, wherein the drive part has a controllable electric motor which is coupled to the threaded rod and in operation provides rotation of the threaded rod. ### Claim 13 (depends on 1) The pin lifting device according to claim 1, the drive part comprises a drive cylinder coupled to the adjusting device. ### Claim 14 (depends on 1) The pin lifting device according to claim 1, wherein the tight connecting device separates the first inner region from the second inner region.