# US 12,009,244 B2 · Tunable temperature controlled substrate support assembly > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,009,244 B2 - Document ID: US12009244B2 - Status: Granted - Kind: B2 - Application number: 16/741,330 - Filed: 2020-01-13 - Published: 2020-05-14 - Granted: 2024-06-11 - Earliest claimed: 2014-07-23 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Vijay D. Parkhe; Steven E. Babayan; Konstantin Makhratchev; Zhiqiang Guo; Phillip R. Sommer; Dan A. Marohl - Web page: https://patentgrep.com/patent/US12009244B2 ## CPC - H10P 72/722: {Details of electrostatic chucks} - H05B 1/023: {Industrial applications} - H05B 1/0233: {for semiconductors manufacturing} - H05B 3/02: Details - H10P 72/0432: {mainly by conduction} - H10P 72/0602: {Temperature monitoring} - H10P 72/72: using electrostatic chucks - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL ## Abstract Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters. ## Claims ### Claim 1 A method for controlling a temperature of a support surface on a substrate support assembly, the method comprising: applying power to a main resistive heater formed in a substrate support wherein the power is supplied to achieve a desired temperature profile for the support surface; measuring the temperature profile of the substrate support surface with one or more temperature sensors; comparing the temperature profile to a desired temperature profile; creating a temperature profile map for the support surface in response to the comparison of the temperature profile to the desired temperature map; and controlling power to a plurality of spatially tunable heaters in accordance with the temperature profile map, wherein the spatially tunable heaters are coupled through a tuning heater controller to a single power supply, the single power supply providing power to each combination of spatially tunable heaters, wherein each combination of spatially tunable heaters are individually and independently controlled with respect to every other spatially tunable heater by the tuning heater controller. ### Claim 2 (depends on 1) The method of claim 1 wherein the one or more temperature sensors provides temperature feedback information to the tuning heater controller. ### Claim 3 (depends on 2) The method of claim 2 further comprising: controlling the power applied by the main heater power source to the main resistive heater, the operations of a cooling base, and the power applied by a tuning heater power source to the spatially tunable heaters with the tuning heater controller. ### Claim 4 (depends on 1) The method of claim 1 wherein the spatially tunable heaters provide localized adjustments to the temperature profile of the substrate support surface. ### Claim 5 (depends on 4) The method of claim 4 wherein the spatially tunable heaters reduce variations in the temperature profile to about +/−0.3 degrees Celsius. ### Claim 6 (depends on 1) The method of claim 1, wherein the tuning heater controller simultaneously provides power to two or more spatially tunable heaters at different overlapping time intervals. ### Claim 7 (depends on 1) The method of claim 1 wherein the temperature profile map correlates the temperature to the power distribution curve for each spatially tunable heater. ### Claim 8 (depends on 7) The method of claim 7 wherein the tuning heater controller comprises: an electrical controller, wherein the electrical controller is configured to provide individually controllable power to each spatially tunable heater; and an optical controller optically connected to an external controller and configured to transmit instructions to the electrical controller for powering each spatially tunable heater. ### Claim 9 (depends on 8) The method of claim 8 wherein the logic is in the optical controller of the tuning heater controller. ### Claim 10 (depends on 8) The method of claim 8 wherein a fiber optic interface coupling the optical controller to the electrical controller wherein the optical interface is not subject to electromagnetic interference or radio frequency (RF) energy. ### Claim 11 (depends on 10) The method of claim 10, wherein fiber optic interface is a fiber optic cable. ### Claim 12 (depends on 8) The method of claim 8, wherein the electrical controller further has an optical converter is coupled to the optical controller, wherein the optical converter is configured to provide signals controlling the function of the spatially tunable heaters from the optical controller. ### Claim 13 (depends on 12) The method of claim 12, wherein the electrical controller further has a plurality of switches, wherein each switch accepts a positive power lead to control individual spatially tunable heaters. ### Claim 14 (depends on 13) The method of claim 13 further comprising: managing the switches by the optical controller via a fiber optic interface to the electrical controller. ### Claim 15 (depends on 1) The method of claim 1 wherein, wherein the tuning heater controller has an RF filter isolating the controller from the tunable heaters.