Sequencer time leaping execution
AssigneeApplied Materials, Inc.
InventorChongyang Wang
Life of this patent
Estimating the term…
Abstract
A method includes generating a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing. The method further includes sorting the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations. The method further includes, for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe.
Claims15
A method comprising:
- generating, by a processing system comprising a memory and a processing device, a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing;
- sorting, by the processing system, the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations;
- and
- for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe, the method further comprising one or more of:
- causing, based on the schedule, one or more processing chambers of a substrate processing system to be prepared for one or more corresponding processing operations;
- or
- causing performance of a corrective action based on the schedule.
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing system comprising a memory and a processing device to:
- generate a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing;
- sort the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations;
- for each operation of the plurality of operations in the queue, obtain a next operation in the queue and set a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe, wherein the processing device is further to one or more of:
- cause, based on the schedule, one or more processing chambers of a substrate processing system to be prepared for one or more corresponding processing operations;
- or
- cause performance of a corrective action based on the schedule.
A system comprising:
- memory;
- and
- a processing device coupled to the memory, the processing device to:
- generate a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing;
- sort the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations;
- and
- for each operation of the plurality of operations in the queue, obtain a next operation in the queue and set a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe, wherein the processing device is further to one or more of:
- cause, based on the schedule, one or more processing chambers of a substrate processing system to be prepared for one or more corresponding processing operations;
- or
- cause performance of a corrective action based on the schedule.
Dependencies are inferred from the claim text.