# US 12,009,234 B2 · Control system for semiconductor manufacturing > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,009,234 B2 - Document ID: US12009234B2 - Status: Granted - Kind: B2 - Application number: 16/748,547 - Filed: 2020-01-21 - Published: 2020-08-06 - Granted: 2024-06-11 - Earliest claimed: 2019-02-01 - Assignees: Ebara Corporation - Applicants: Ebara Corporation - Inventors: Masayuki Fujiki; Nobuhito Kiyosawa; Kei Kitamura - Web page: https://patentgrep.com/patent/US12009234B2 ## CPC - H10P 72/0472: {comprising at least one polishing chamber} - G05B 19/41835: {characterised by program execution} - G05B 2219/45031: Manufacturing semiconductor wafers - Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS] - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G) - Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS ## Abstract A control system which can efficiently perform an operational adjustment work and can safely adjust a unit is disclosed. The control system 20 includes a controller 10 and a plurality of terminal devices connectable to the controller 10. The controller 10 includes a storage device 110 storing a processing program, and a processor 120 for performing operations and calculations based on the processing program. The processing program including instructions to give an access operation right, which permits access by an adjustment target unit to an access target unit, to a target terminal device which is one of the terminal devices in response to a request for the access operation right, transmitted from the target terminal device to the controller 10, on the condition that an exclusive operation right for the access target unit has not been given to any of the terminal devices. ## Claims ### Claim 1 A control system for controlling a plurality of units constituting a semiconductor manufacturing apparatus, the control system comprising: a controller; and a plurality of terminal devices connectable to the controller, the plurality of terminal devices comprising a target terminal device; wherein the controller is configured to prevent any two of the plurality of terminal devices from simultaneously operating any one of the plurality of units, wherein the plurality of units comprise an access target unit and a transport unit, and wherein the controller comprises a storage device storing instructions executable by a processor, the instructions upon execution by the processor configure the processor to: process a request from the target terminal device to acquire an access operation right to the access target unit; give an access operation right to the transport unit to access the access target unit without the need to give the target terminal device exclusive operation rights to the access target unit, and permitting access by the transport unit to the access target unit, in response to receiving from the target terminal device the request for the access operation right, the permitting access being based on the condition that an exclusive operation right for the access target unit has not been given to any other of the plurality of terminal devices. ### Claim 2 (depends on 1) The control system according to claim 1, wherein the instructions upon execution by the processor are further configured to give the access operation right to the target terminal device on the condition that an exclusive operation right for the transport unit has been given to the target terminal device. ### Claim 3 (depends on 1) The control system according to claim 1, wherein the units include a first adjustment target unit corresponding to said transport unit, and a second adjustment target unit, and wherein the instructions upon execution by the processor are further configured to give the access operation right to the target terminal device on the condition that no other terminal device has acquired an access operation right which permits access by the second adjustment target unit to the access target unit. ### Claim 4 (depends on 1) The control system according to claim 1, wherein each of the plurality of terminal devices includes an image generating section for generating a unit operation image to operate each of the units, and an image display for displaying the unit operation image, the unit operation image including an access operation right request icon which indicates whether to request the access operation right. ### Claim 5 (depends on 4) The control system according to claim 4, wherein the access operation right request icon is one of a button, a check box and a combo box, and wherein the image generating section includes a second storage device storing an image display instructions, and a second processor, the image display instructions upon execution by the second processor switch the display of the access operation right request icon subject to the acquisition of the access operation right. ### Claim 6 (depends on 5) The control system according to claim 5, wherein the unit operation image includes an exclusive operation right request icon which indicates whether to request an exclusive operation right for the adjustment target unit, the exclusive operation right request icon being one of a button, a check box and a combo box, and wherein the image display instructions upon execution by the second processor switch the display of the exclusive operation right request icon subject to the acquisition of the exclusive operation right. ### Claim 7 A non-transitory computer-readable storage medium storing instructions for a control system for controlling a plurality of units constituting a semiconductor manufacturing apparatus, the instruction upon execution by a processor, at least cause the operations comprising: receiving from a target terminal device among a plurality of terminal devices provided in the control system, a request to a controller to give the target terminal device an access operation right, the access operation right permitting access by a transport unit, a unit among the plurality of units, to an access target unit, another unit among the plurality of units; and giving the access operation right to the target terminal device after determining that an exclusive operation right for the access target unit has not been given to any other terminal device among the plurality of terminal devices, without giving the target terminal device exclusive operation rights for the access target unit; and permitting access by the transport unit to the access target unit, in response to receiving from the target terminal device the request for the access operation right, the permitting access being based on the condition that an exclusive operation right for the access target unit has not been given to any other of the plurality of terminal devices. ### Claim 8 (depends on 7) The storage medium according to claim 7, wherein the instruction upon execution by the processor further cause the operations comprising: giving the access operation right to the target terminal device after determining that an exclusive operation right for the transport unit has previously been given to the target terminal device. ### Claim 9 (depends on 7) The storage medium according to claim 7, wherein the instruction upon execution by the processor further cause the operations comprising: giving the access operation right to the target terminal device after determining that no other terminal device among the plurality of terminal devices has acquired an access operation right permitting access by a second adjustment target unit, different from a first adjustment target unit corresponding to said transport unit, to the access target unit. ### Claim 10 A method for a control system for controlling a plurality of units constituting a semiconductor manufacturing apparatus, the method comprising: receiving from a target terminal device among a plurality of terminal devices provided in the control system, a request to a controller to give the target terminal device an access operation right, the access operation right permitting access by a transport unit, a unit among the plurality of units, to an access target unit, another unit among the plurality of units; and giving the access operation right to the target terminal device after determining that an exclusive operation right for the access target unit has not been given to any other terminal device among the plurality of terminal devices, without giving the target terminal device exclusive operation rights to the access target unit; and permitting access by the transport unit to the access target unit, in response to receiving from the target terminal device the request for the access operation right, the permitting access being based on the condition that an exclusive operation right for the access target unit has not been given to any other of the plurality of terminal devices. ### Claim 11 (depends on 10) The method according to claim 10, wherein the access operation right is given to the target terminal device on the condition that an exclusive operation right for the transport unit has been given to the target terminal device. ### Claim 12 (depends on 10) The method according to claim 10, wherein the access operation right is given to the target terminal device on the condition that no other terminal device has acquired an access operation right which permits access by a second adjustment target unit, different from a first adjustment target unit corresponding to said transport unit, to the access target unit.