# US 12,009,187 B2 · Plasma shutter and substrate processing apparatus including the same

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- Number: US 12,009,187 B2
- Document ID: US12009187B2
- Status: Granted
- Kind: B2
- Application number: 18/208,046
- Filed: 2023-06-09
- Published: 2024-03-21
- Granted: 2024-06-11
- Earliest claimed: 2022-09-15
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Hyungsik Ko
- Web page: https://patentgrep.com/patent/US12009187B2

## CPC

- H01J 37/32807: {Construction (includes replacing parts of the apparatus)}
- H01J 37/32477: {characterised by the means for protecting vessels or internal parts, e.g. coatings}
- H01J 37/32495: {Means for protecting the vessel against plasma}
- H01J 37/32513: {Sealing means, e.g. sealing between different parts of the vessel}
- H01J 37/32651: {Shields, e.g. dark space shields, Faraday shields}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Provided is a substrate processing apparatus, including a process chamber, a plasma shutter configured ascend to close the process chamber, and an upper liner on the process chamber, wherein the process chamber includes a process space in which a substrate process is performed, and an insertion passage adjacent to the process space and connecting the process space to an outside of the process chamber, wherein the upper liner includes an extension liner, wherein the extension liner faces a connection inner surface that upwardly extends from an inner end of a passage ceiling forming the insertion passage, and wherein, in a state where the plasma shutter ascends to close the process space, an upper end of the plasma shutter is inserted between the connection inner surface and the extension liner.

## Claims

### Claim 1

A substrate processing apparatus, comprising:
a process chamber;
a plasma shutter configured ascend to close the process chamber; and
an upper liner on the process chamber,
wherein the process chamber comprises:
a process space in which a substrate process is performed; and
an insertion passage adjacent to the process space and connecting the process space to an outside of the process chamber,
wherein the upper liner comprises an extension liner,
wherein the extension liner faces a connection inner surface that upwardly extends from an inner end of a passage ceiling forming the insertion passage, and
wherein, in a state where the plasma shutter ascends to close the process space, an upper end of the plasma shutter is inserted between the connection inner surface and the extension liner.

### Claim 2 (depends on 1)

The substrate processing apparatus of claim 1, wherein a level of a bottom surface of the extension liner is lower than a level of the passage ceiling in a vertical direction.

### Claim 3 (depends on 1)

The substrate processing apparatus of claim 1, wherein a distance between the extension liner is and the connection inner surface is from 1 mm to 15 mm.

### Claim 4 (depends on 1)

The substrate processing apparatus of claim 1, wherein the upper liner further comprises an upper liner body on the process chamber, and
wherein the extension liner downwardly extends from the upper liner body in a vertical direction.

### Claim 5 (depends on 4)

The substrate processing apparatus of claim 4, wherein the upper liner further comprises an inner liner that downwardly extends from the upper liner body in a vertical direction,
wherein the inner liner downwardly extends beyond a level of a floor of the insertion passage in the vertical direction,
wherein a liner insertion hole penetrates the inner liner and connects the insertion passage and the process space to each other,
wherein the extension liner is a portion of the inner liner that is above the liner insertion hole in the vertical direction, and
wherein a bottom surface of the extension liner forms the liner insertion hole.

### Claim 6 (depends on 4)

The substrate processing apparatus of claim 4, further comprising a stage included in the process space,
wherein the stage comprises a chuck configured to support a substrate.

### Claim 7 (depends on 6)

The substrate processing apparatus of claim 6, further comprising a showerhead above and spaced apart from the stage in the vertical direction,
wherein the showerhead is disposed on the upper liner body.

### Claim 8 (depends on 1)

The substrate processing apparatus of claim 1, further comprising a shutter driving mechanism configured to move the plasma shutter up and down,
wherein the shutter driving mechanism is below the insertion passage in a vertical direction.

### Claim 9 (depends on 1)

The substrate processing apparatus of claim 1, wherein the plasma shutter comprises a shield door,
wherein the shield door comprises:
a shield member having a plasma shield surface exposed to the process space; and
a support member on the shield member opposite to the plasma shield surface,
wherein a level of a top surface of the shield member is higher than a level of a top surface of the support member in a vertical direction,
wherein an upper end of the plasma shutter is the top surface of the shield member, and
wherein the plasma shield surface is disposed closer to an outer side of the process chamber than the extension liner.

### Claim 10 (depends on 9)

The substrate processing apparatus of claim 9, wherein the plasma shield surface has an arc shape when viewed in a plan view.

### Claim 11 (depends on 9)

The substrate processing apparatus of claim 9, wherein, in a state where the plasma shutter ascends to close the process space, the top surface of the support member is in contact with the passage ceiling.

### Claim 12

A plasma shutter, comprising:
a shield door; and
a connection block adjacent to the shield door,
wherein the shield door comprises:
a shield member having a plasma shield surface; and
a support member on a surface of the shield member opposite to the plasma shield surface,
wherein the plasma shield surface is convexly curved toward the connection block, and
wherein a level of a top surface of the shield member is higher than a level of a top surface of the support member in a vertical direction.

### Claim 13 (depends on 12)

The plasma shutter of claim 12, wherein the plasma shield surface comprises Y2O3.

### Claim 14 (depends on 12)

The plasma shutter of claim 12, further comprising a gasket on the support member,
wherein a gasket groove is formed on the top surface of the support member, and
wherein the gasket is inserted into the gasket groove.

### Claim 15 (depends on 14)

The plasma shutter of claim 14, wherein the gasket comprises a nickel alloy.

### Claim 16 (depends on 12)

The plasma shutter of claim 12, wherein a difference between the level of the top surface of the shield member and the level of the top surface of the support member in the vertical direction is in a range of 4 mm to 8 mm.

### Claim 17 (depends on 12)

The plasma shutter of claim 12, wherein the plasma shield surface has an arc shape,
wherein a curvature radius of the plasma shield surface is in a range of 270 mm to 295 mm.

### Claim 18

A plasma shutter, comprising:
a shield door;
a connection block adjacent to the shield door; and
a gasket,
wherein the shield door comprises:
a shield member having a plasma shield surface; and
a support member on a surface of the shield member opposite to the plasma shield surface,
wherein a level of a top surface of the shield member is higher than a level of a top surface of the support member in a vertical direction,
wherein a gasket groove is formed on the top surface of the support member, the gasket being inserted in the gasket groove, and
wherein the gasket comprises a nickel alloy.

### Claim 19 (depends on 18)

The plasma shutter of claim 18, wherein a diameter of the gasket is in a range of 3.0 mm to 6.0 mm.

### Claim 20 (depends on 18)

The plasma shutter of claim 18, wherein the gasket comprises a spiral gasket.