# US 12,009,184 B2 · Lift pin assembly for a plasma processing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,009,184 B2 - Document ID: US12009184B2 - Status: Granted - Kind: B2 - Application number: 17/411,493 - Filed: 2021-08-25 - Published: 2023-01-12 - Granted: 2024-06-11 - Earliest claimed: 2021-07-06 - Assignees: Beijing E-Town Semiconductor Technology Co., Ltd.; Mattson Technology, Inc. - Applicants: Beijing E-Town Semiconductor Technology Co., Ltd.; Mattson Technology, Inc. - Inventors: Changle Guan; Maolin Long - Web page: https://patentgrep.com/patent/US12009184B2 ## CPC - H01J 37/32715: {Workpiece holder} - H10P 72/72: using electrostatic chucks - H10P 72/722: {Details of electrostatic chucks} - H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A lift pin assembly for a lift pin of a plasma processing apparatus is provided. The lift pin assembly includes a pin housing defining an opening into which a lift pin extends. The pin housing is positioned such that the opening is aligned with an opening defined by an electrostatic chuck. The assembly includes a pin height adjustment member partially positioned within the opening defined by the pin housing. The pin height adjustment member is movable along an axis in a first direction and a second direction to move the lift pin into and out of the opening defined by the electrostatic chuck. The assembly includes a pin holder assembly at least partially positioned within an opening defined by the pin height adjustment member. The pin holder assembly is configured to hold the lift pin such that the lift pin is aligned with the opening defined by the electrostatic chuck. ## Claims ### Claim 1 A lift pin assembly for a lift pin of a plasma processing apparatus, the lift pin assembly comprising: a pin housing defining an opening into which the lift pin extends, the pin housing positioned such that the opening is aligned with an opening defined by an electrostatic chuck of the plasma processing apparatus; a pin height adjustment member partially positioned within the opening defined by the pin housing, the pin height adjustment member movable along an axis in a first direction and a second direction, the pin height adjustment member movable in the first direction to move the lift pin into the opening defined by the electrostatic chuck, the pin height adjustment member movable in the second direction to move the lift pin out of the opening defined by the electrostatic chuck; a pin holder assembly at least partially positioned within an opening defined by the pin height adjustment member, the pin holder assembly configured to hold the lift pin such that the lift pin is aligned with the opening defined by the electrostatic chuck; and a fastener configured to prohibit movement of the pin height adjustment member along the axis. ### Claim 2 (depends on 1) The lift pin assembly of claim 1, wherein the pin height adjustment member comprises: a first portion positioned within the opening defined by the pin housing, the first portion having a first shape; and a second portion positioned outside of the opening defined by the pin housing, the second portion having a second shape, the second shape being different than the first shape. ### Claim 3 (depends on 2) The lift pin assembly of claim 2, wherein the first portion of the pin height adjustment member is positioned within a notch defined by an interior surface of the pin housing. ### Claim 4 (depends on 1) The lift pin assembly of claim 1 wherein the fastener extends through an opening defined by an end of the pin housing. ### Claim 5 (depends on 4) The lift pin assembly of claim 4, wherein the fastener comprises a lock screw. ### Claim 6 (depends on 1) The lift pin assembly of claim 1, wherein the pin holder assembly comprises: an inner sleeve surrounding a periphery of the lift pin; an outer sleeve surrounding a portion of the inner sleeve; and a base configured to support the inner sleeve. ### Claim 7 (depends on 6) The lift pin assembly of claim 6, wherein: the base has a shape corresponding to a sphere, the base defining a cavity; and when an end of the lift pin is positioned within the cavity, the lift pin is tiltable about the axis to facilitate alignment of the lift pin with the opening defined by the electrostatic chuck. ### Claim 8 (depends on 6) The lift pin assembly of claim 6, further comprising: a locker assembly comprising a locker and the fastener, the locker removably coupled to the pin height adjustment member via the fastener. ### Claim 9 (depends on 8) The lift pin assembly of claim 8, wherein when the locker is coupled to the pin height adjustment member via the fastener, the locker restricts movement of the pin holder assembly along the axis. ### Claim 10 (depends on 1) The lift pin assembly of claim 1, wherein the pin height adjustment member is movable relative to the pin housing along the axis. ### Claim 11 (depends on 10) The lift pin assembly of claim 10, wherein the pin holder assembly comprises: a base configured to support the lift pin; and a clamp configured to apply a clamping force to tee the lift pin. ### Claim 12 (depends on 11) The lift pin assembly of claim 11, further comprising: a locker partially positioned within the opening defined by the pin height adjustment member such that the locker restrict movement of the pin holder assembly along the axis. ### Claim 13 (depends on 12) The lift pin assembly of claim 12, wherein the pin holder assembly further comprises: a gasket surrounding a periphery of the clamp such that the clamp applies the clamping force to the lift pin. ### Claim 14 (depends on 13) The lift pin assembly of claim 13, wherein the gasket and the base are positioned within a recess defined by the locker. ### Claim 15 A plasma processing apparatus comprising: a processing chamber; an electrostatic chuck positioned within the processing chamber, the electrostatic chuck configured to support a workpiece; and a lift pin assembly comprising: a pin housing defining an opening into which a lift pin extends, the pin housing positioned such that the opening defined by the pin housing is aligned with an opening defined by the electrostatic chuck; a pin height adjustment member partially positioned within the opening defined by the pin housing, the pin height adjustment member movable along an axis in a first direction and a second direction, the pin height adjustment member movable in the first direction to move the lift pin into the opening defined by the electrostatic chuck to lift the workpiece off of the electrostatic chuck, the pin height adjustment member movable in the second direction to move the lift pin out of the opening defined by the electrostatic chuck to lower the workpiece onto the electrostatic chuck; and a pin holder assembly at least partially positioned within an opening defined by the pin height adjustment member, the pin holder assembly configured to hold the lift pin such that the lift pin is aligned with the opening defined by the electrostatic chuck, the pin holder assembly being configured to hold the lift pin such that the lift pin is rotatable about the axis. ### Claim 16 (depends on 15) The plasma processing apparatus of claim 15, wherein the pin holder assembly is configured to hold the lift pin to prohibit movement of the lift pin relative to the pin height adjustment member along the axis. ### Claim 17 (depends on 15) The plasma processing apparatus of claim 15, wherein the pin holder assembly comprises a clamp configured to clamp an end of the lift pin. ### Claim 18 (depends on 17) The plasma processing apparatus of claim 17, wherein the end of the lift pin comprises a ball end. ### Claim 19 (depends on 15) The plasma processing apparatus of claim 15, wherein the pin height adjustment member comprises: a first portion positioned within the opening defined by the pin housing, the first portion having a first shape; and a second portion positioned outside of the opening defined by the pin housing, the second portion having a second shape, the second shape being different than the first shape.