# US 12,009,181 B2 · Match efficiency-variation compensation

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- Number: US 12,009,181 B2
- Document ID: US12009181B2
- Status: Granted
- Kind: B2
- Application number: 17/524,659
- Filed: 2021-11-11
- Published: 2022-06-09
- Granted: 2024-06-11
- Earliest claimed: 2020-11-12
- Assignees: Advanced Energy Industries, Inc.
- Applicants: Advanced Energy Industries, Inc.
- Inventors: Denis Shaw; Holger Philipp Kley; Suryan Emani
- Web page: https://patentgrep.com/patent/US12009181B2

## CPC

- H01J 37/32183: {Matching circuits}
- H03H 7/38: Impedance-matching networks
- H03H 7/40: Automatic matching of load impedance to source impedance
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

This disclosure describes systems, methods, and apparatus for identifying and compensating for variances between match networks. Each match network can be calibrated at the factory against a golden load and a reference load to turn a generalized model of the match network into an operation model. The operation model can be stored with the match network or shipped with the match network, and used by an operator to determine a correction factor during processing. This correction factor can be used to adjust a generator setpoint, frequency, or aspects of the match network.

## Claims

### Claim 1

A system comprising:
a generator;
a match network u comprising:
an input coupled to the generator;
an output configured for electrical coupling to a plasma load within a plasma chamber; and
variable reactance components with variable positions described by states, C1 to CK;
an operation model, E_u(C,f), characterizing a deviation from nominal of the match network u over its operating range, the operation model, E_u(C,f), having parameters, p1 to pL, determined via calibration using one or more golden load fixtures, the states, C1 to CK, and one or more generator frequencies, f;
a correction component configured to, during a processing recipe of the generator and the match network u:
access an operating frequency, f′, of the generator;
access the states, C1 to CK, after the match network u has been tuned for the plasma load;
input the operating frequency, f′, as well as the states, C1 to CK, to the operation model, E_u(C,f), to generate a correction factor ε; and
instruct the generator and/or match network u to adjust based on the correction factor ε.

### Claim 2 (depends on 1)

The system of claim 1, wherein the correction component is arranged within the match network u.

### Claim 3 (depends on 2)

The system of claim 2, wherein the operation model is arranged within the match network u.

### Claim 4 (depends on 2)

The system of claim 2, wherein the operation model is arranged external to the match network u.

### Claim 5 (depends on 1)

The system of claim 1, wherein the correction component is arranged external to the match network u.

### Claim 6 (depends on 5)

The system of claim 5, wherein the operation model is arranged within the match network u.

### Claim 7 (depends on 5)

The system of claim 5, wherein the operation model is arranged external to the match network u.

### Claim 8 (depends on 7)

The system of claim 7, wherein the correction component and the operation model are arranged in the generator.

### Claim 9 (depends on 1)

The system of claim 1, wherein the one or more golden load fixtures is a single golden load fixture with variable reactance components.

### Claim 10 (depends on 1)

The system of claim 1, wherein the pre-processing calibration involves developing a set of M constraints by, for M combinations of the one or more golden load fixtures and frequencies f, of a test generator for each of the M combinations:
applying power from the test generator to a selected golden load fixture through the match network at a selected one of the frequencies f;
tuning the match network to the selected golden load fixture;
measuring an input characteristic between the generator and the match network;
measuring an output characteristic after the selected golden load fixture;
given known resistance and reactance of the selected golden load fixture and the model of the match network, extrapolating an intermediate characteristic between the match network and the selected golden load fixture;
calculating a characteristic of the match network for a selected one of the combinations based on the input characteristic, the intermediate characteristic, and the output characteristic; and
using the characteristic of the match network for the selected one of the combinations to form one of the M constraints.

### Claim 11 (depends on 10)

The system of claim 10, wherein the test generator is the generator.

### Claim 12 (depends on 10)

The system of claim 10, wherein the characteristic of the match network is selected from a group selected from: power, efficiency, resistance, reactance, voltage, current.

### Claim 13 (depends on 1)

The system of claim 1, wherein additional correction factors ε are determined from the operation model E_u(C,f) as the match network continues to tune.

### Claim 14

A non-transitory, tangible computer readable storage medium, encoded with processor readable instructions to perform a method for identifying M constraints that can be used to form an operation model of a match network that accounts for variances from nominal, the method comprising, for M combinations of golden load fixtures and test generator frequencies f, generating a set of M constraints by:
applying power from the test generator to a selected one of the golden load fixtures through a match network at a selected one of the frequencies f;
tuning the match network to the selected one of the golden load fixtures and a reference load;
measuring an input characteristic between the test generator and the match networks;
measuring an output characteristic after the selected one of the golden load fixtures;
using the input and output characteristics to extrapolate an intermediate characteristic between the match network and the selected one of the golden load fixtures;
calculating one or more characteristics of the match network for a selected one of the M combinations based on the input characteristic, the intermediate characteristic, and the output characteristic.

### Claim 15

A method comprising:
for M combinations of golden load fixtures and test generator frequencies f, generating a set of M constraints by:
applying power from the test generator to a selected one of the golden load fixtures through a match network at a selected one of the frequencies f;
tuning the match network to the selected one of the golden load fixtures in series with a reference load;
measuring an input characteristic between the test generator and the match network;
measuring an output characteristic after the selected one of the golden load fixtures;
using the input and output characteristics to extrapolate an intermediate characteristic between the match network and the selected one of the golden load fixtures;
calculating one or more characteristics of the match network for a selected one of the M combinations based on the input characteristic, the intermediate characteristic, and the output characteristic; and
using the one or more characteristics of the match network for the selected one of the M combinations to form one of the M constraints.

### Claim 16 (depends on 15)

The method of claim 15, wherein the one or more characteristics of the match network is an efficiency of power transfer.

### Claim 17 (depends on 15)

The method of claim 15, wherein the one or more characteristics of the match network is selected from a group selected from: power, resistance, reactance, voltage, and current.