# US 12,009,178 B2 · Ceramic coated quartz lid for processing chamber > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,009,178 B2 - Document ID: US12009178B2 - Status: Granted - Kind: B2 - Application number: 17/981,575 - Filed: 2022-11-07 - Published: 2023-02-23 - Granted: 2024-06-11 - Earliest claimed: 2016-04-28 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Bernard L. Hwang - Web page: https://patentgrep.com/patent/US12009178B2 ## CPC - H01J 37/32119: {Windows} - C23C 16/40: Oxides - C23C 16/405: {of refractory metals or yttrium} - C23C 16/4404: {Coatings or surface treatment on the inside of the reaction chamber or on parts thereof} - C23C 16/45591: {Fixed means, e.g. wings, baffles} - C23C 16/458: characterised by the method used for supporting substrates in the reaction chamber - C23C 16/4585: {Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds} - H01J 37/32495: {Means for protecting the vessel against plasma} - H10P 72/0418: {for etching} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Embodiments of the present disclosure include methods and apparatuses utilized to reduce particle generation within a processing chamber. In one or more embodiments, a lid for a substrate processing chamber is provided and includes a cover member, a central opening, and a trench. An inner profile of the central opening contains a first section having a first diameter, a second section having a second diameter, and a third section having a third diameter. The second section is disposed between and connected to the first section and the third section. The first diameter gradually increases from the second section toward the surface of the cover member, the second diameter cylindrically extends from the first section to the third section, and the third diameter is less than the second diameter. The trench surrounds the central opening and is formed along a closed path in the surface of the cover member. ## Claims ### Claim 1 A lid for a substrate processing chamber comprising: a cover member consisting of a single plate and having a first surface opposite a second surface; a central opening in the cover member, wherein an inner profile of the central opening comprises a first section having a first diameter, a second section having a second diameter, and a third section having a third diameter, wherein: the second section is disposed between and connected to the first section and the third section; the first diameter gradually increases from the second section toward the first surface of the cover member; the second diameter cylindrically extends from the first section to the third section; and the third diameter is less than the second diameter; and a trench surrounding the central opening and formed along a closed path in the first surface of the cover member. ### Claim 2 (depends on 1) The lid of claim 1, wherein the first section has an inner surface that is angled with respect to a central axis of the central opening. ### Claim 3 (depends on 2) The lid of claim 2, wherein the angle of the inner surface of the first section is about 30° to about 60° . ### Claim 4 (depends on 1) The lid of claim 1, wherein the trench providing a recess formed in an inner surface of the trench. ### Claim 5 (depends on 4) The lid of claim 4, wherein the recess has a bevel extending along a direction with respect to a bottom surface of the trench at an angle of about 15° to about 45° . ### Claim 6 (depends on 1) The lid of claim 1, wherein the third section has a rounded corner extending to the second surface of the cover member, and the third diameter cylindrically extends from the second section to the rounded corner. ### Claim 7 (depends on 6) The lid of claim 6, wherein the second surface of the cover member has an average surface roughness of about 2 Angstroms to about 150 Angstroms. ### Claim 8 (depends on 1) The lid of claim 1, wherein the cover member is made of quartz. ### Claim 9 (depends on 1) The lid of claim 1, wherein the cover member is made of sapphire. ### Claim 10 (depends on 1) The lid of claim 1, further comprising a coating disposed on the second surface, wherein the coating comprises a ceramic. ### Claim 11 (depends on 1) The lid of claim 1, further comprising a coating disposed on the second surface, wherein the coating comprises yttrium oxide and at least one of zirconium oxide, aluminum oxide, or a combination thereof. ### Claim 12 (depends on 11) The lid of claim 11, wherein the coating has a thickness of about 0.001 inches to about 0.100 inches. ### Claim 13 (depends on 11) The lid of claim 11, wherein the coating has a thickness of about 0.005 inches to about 0.050 inches. ### Claim 14 (depends on 11) The lid of claim 11, wherein the coating disposed on the second surface comprises yttrium oxide, zirconium oxide, and aluminum oxide. ### Claim 15 (depends on 11) The lid of claim 11, wherein the coating disposed on the second surface comprises yttrium oxide and aluminum oxide. ### Claim 16 (depends on 15) The lid of claim 15, wherein the coating comprises about 30 mol.% to about 60 mol.% of the yttrium oxide and about 30 mol.% to about 60 mol.% of the aluminum oxide. ### Claim 17 (depends on 11) The lid of claim 11, wherein the coating disposed on the second surface comprises yttrium oxide and zirconium oxide. ### Claim 18 (depends on 11) The lid of claim 11, wherein the coating disposed on the second surface comprises a ceramic material comprising a compound having a formula of Y4Al2O9 and a solid solution of Y2O3 and ZrO2. ### Claim 19 A lid for a substrate processing chamber comprising: a cover member consisting of a single plate and having a first surface and a second surface opposite the first surface; a central opening in the cover member, wherein an inner profile of the central opening comprises a first section having a first diameter, a second section having a second diameter, and a third section having a third diameter, wherein: the second section is disposed between and connected to the first section and the third section; the first diameter gradually increases from the second section toward the first surface of the cover member; and the third diameter is less than the second diameter; and a trench surrounding the central opening and formed along a closed path in the first surface of the cover member. ### Claim 20 A processing chamber comprising: a body; and a cover member consisting of a single plate and having a first surface and a second surface opposite the first surface, wherein the cover member further comprises: a central opening in the cover member, wherein an inner profile of the central opening comprises a first section having a first diameter, a second section having a second diameter, and a third section having a third diameter, wherein: the second section is disposed between and connected to the first section and the third section; the first diameter gradually increases from the second section toward the first surface of the cover member; and the third diameter is less than the second diameter; and a trench surrounding the central opening and formed along a closed path in the first surface of the cover member.