US 12,007,744 B2Granted

Abatement system, abatement device, and system control device

AssigneesEdwards Japan Limited, Edwards Limited

InventorsKobayashi Kenichiro, Adrian Fisher, Christopher Peter Jones, Philip Carr

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Abstract

A plurality of system control devices respectively include network interfaces for communicating with each other via a network. One of the plurality of system control devices functions as a master system control device, and the remaining system control devices function as slave system control devices. The master system control device transmits a control command to the slave system control devices by means of the network interface. The slave system control devices receive the control command by means of the network interfaces and supply an operation command to abatement devices in accordance with the control command. When unable to communicate with the master system control device, the slave system control devices either function as master system control devices or enter stand-alone operation mode.

An abatement system, comprising:

a plurality of abatement devices;
a plurality of valves,
wherein each valve of the plurality of valves is three-way valve,
wherein each abatement device of the plurality of abatement devices is associated with a respective valve of the plurality of valves,
wherein each abatement device of the plurality of abatement devices is configured to control the respective valve by a signal to the respective valve, and
wherein the respective valve controls a flow of gas to be treated by the associated abatement device of the plurality of abatement devices;
and
a plurality of system control devices that are provided corresponding to the plurality of abatement devices, wherein each system control device supplies an operation command to a corresponding abatement device of the plurality of abatement devices, wherein:
the plurality of system control devices respectively include network interfaces for communicating with each other via a network,
any one of the plurality of system control devices determines to operate as a master system control device and functions as the master system control device,
remaining system control devices of the plurality of system control devices determine to operate as a slave system control device and function as the slave system control devices,
the master system control device transmits a control command to the slave system control devices using the network interface,
the slave system control devices receive the control command by the network interfaces and supply the operation command to the corresponding abatement device in accordance with the received control command,
when unable to communicate with the master system control device, the slave system control devices either function as new master system control devices or enter a stand-alone operation mode, and
in the stand-alone operation mode, the operation command is supplied to the corresponding abatement device in accordance with a predetermined setting.

12 more elements

Abstract

Claims11