# US 12,007,698 B2 · Information processing apparatus and information processing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,007,698 B2 - Document ID: US12007698B2 - Status: Granted - Kind: B2 - Application number: 18/153,242 - Filed: 2023-01-11 - Published: 2023-05-25 - Granted: 2024-06-11 - Earliest claimed: 2020-04-28 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Takahiro Takiguchi; Kenta Kita - Web page: https://patentgrep.com/patent/US12007698B2 ## CPC - G03F 7/70633: {Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching} - G05B 19/042: using digital processors (G05B19/05 takes precedence) - G03F 7/70525: {Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure} - G03F 7/70625: {Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness} - G03F 9/7046: {Strategy, e.g. mark, sensor or wavelength selection} - G05B 19/41875: {characterised by quality surveillance of production} - G06F 16/9024: {Graphs; Linked lists (G06F16/9027 takes precedence)} - G05B 2219/2602: Wafer processing - G05B 2219/37224: Inspect wafer - Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS] - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G) - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS ## Abstract An information processing apparatus includes an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a process condition, and a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit, wherein the display control unit selectively displays, on the display apparatus, a first screen that displays the process data of a lot including a plurality of substrates on a lot-by-lot basis and a second screen that displays the process data of a first lot on a substrate-by-substrate basis, the first lot being a lot designated by a user from the lot displayed on the first screen. ## Claims ### Claim 1 An information processing apparatus comprising: an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a recipe; and a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit, wherein the display control unit is configured to selectively display, on the display apparatus, a first screen or a second screen, wherein the first screen displays the process data of a plurality of lots, on a lot-by-lot basis, and wherein the second screen simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen, the second lot being processed by the same recipe as a recipe by which the first lot is processed, and wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot. ### Claim 2 (depends on 1) The information processing apparatus according to claim 1, wherein the process data is information including a result of an operation of a processing apparatus that performs the substrate process and a state of the substrate having undergone the substrate process. ### Claim 3 (depends on 1) The information processing apparatus according to claim 1, wherein the display control unit is configured to display, on the display apparatus, the second screen that displays the process data of the plurality of lots on a substrate-by-substrate basis and the recipe of the plurality of lots. ### Claim 4 (depends on 1) The information processing apparatus according to claim 1, wherein at least one of the first screen and the second screen displays the process data as a graph. ### Claim 5 (depends on 1) The information processing apparatus according to claim 1, wherein a display method by which the second screen is displayed on the display apparatus is changeable to highlight a process condition that has a difference among process conditions of the plurality of lots. ### Claim 6 (depends on 1) The information processing apparatus according to claim 1, further comprising a calculation unit configured to calculate lot-based process data based on a plurality of pieces of substrate-based process data acquired by the acquisition unit. ### Claim 7 (depends on 6) The information processing apparatus according to claim 6, wherein the calculation unit is configured to calculate the lot-based process data based on at least one statistical process from a maximum value, a minimum value, a mean value, a median value, and a standard deviation of the plurality of pieces of substrate-based process data. ### Claim 8 An information processing apparatus comprising: an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a recipe; and a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit, wherein the display control unit is configured to display, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, together with a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen, the second lot being processed by the same recipe as a recipe by which the first lot is processed, and wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot. ### Claim 9 (depends on 8) The information processing apparatus according to claim 8, wherein the process data is information including a result of an operation of a processing apparatus that performs the substrate process and a state of the substrate having undergone the substrate process. ### Claim 10 (depends on 8) The information processing apparatus according to claim 8, wherein the display control unit is configured to display, on the display apparatus, the second screen that displays the process data of the plurality of lots on a substrate-by-substrate basis and the recipe of the plurality of lots. ### Claim 11 (depends on 8) The information processing apparatus according to claim 8, wherein at least one of the first screen and the second screen displays the process data as a graph. ### Claim 12 (depends on 8) The information processing apparatus according to claim 8, wherein a display method by which the second screen is displayed on the display apparatus is changeable to highlight a process condition that has a difference among process conditions of the plurality of lots. ### Claim 13 (depends on 8) The information processing apparatus according to claim 8, further comprising a calculation unit configured to calculate lot-based process data based on a plurality of pieces of substrate-based process data acquired by the acquisition unit. ### Claim 14 (depends on 13) The information processing apparatus according to claim 13, wherein the calculation unit is configured to calculate the lot-based process data based on at least one statistical process from a maximum value, a minimum value, a mean value, a median value, and a standard deviation of the plurality of pieces of substrate-based process data. ### Claim 15 An information processing method comprising: acquiring process information about a substrate process, the process information including process data and a recipe; and controlling a display on a display apparatus based on the acquired process information, wherein, control is performed to selectively display, on the display apparatus, a first screen or a second screen, wherein the first screen displays the process data of a plurality of lots, on a lot-by-lot basis, wherein the second screen simultaneously displays a first process data of a plurality of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen, the second lot being processed by the same recipe as a recipe by which the first lot is processed, and wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot. ### Claim 16 An information processing method comprising: acquiring process information about a substrate process, the process information including process data and a recipe; and controlling a display on a display apparatus based on the acquired process information, wherein controlling is configured to display, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, together with a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen, the second lot being processed by the same recipe as a recipe by which the first lot is processed, and wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot. ### Claim 17 A non-transitory computer-readable storage medium that stores a program for causing a computer to execute an information processing method including acquiring and controlling a display, wherein process information about a substrate process, the process information including process data and a recipe are acquired, and wherein control is performed to selectively display, on the display apparatus, a first screen or a second screen, wherein the first screen displays the process data of a plurality of lots, on a lot-by-lot basis, wherein the second screen simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen, the second lot being processed by the same recipe as a recipe by which the first lot is processed, and wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot. ### Claim 18 A system comprising: an information processing apparatus; and a pattern forming apparatus configured to form a pattern on a substrate, wherein the information processing apparatus manages a plurality of apparatuses including the pattern forming apparatus, the information processing apparatus including: an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a recipe; and a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit, wherein the display control unit selectively displays, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, and a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen, the second lot being processed by the same recipe as a recipe by which the first lot is processed, and wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot. ### Claim 19 An article manufacturing method comprising: forming a pattern on a substrate by a pattern forming apparatus managed by an information processing apparatus; and performing at least one process from oxidation, film forming, vapor deposition, doping, flattening, etching, resist removing, dicing, bonding, and packaging on the substrate having the pattern formed thereon, wherein an article is manufactured from the processed substrate, the information processing apparatus including: an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a recipe; and a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit, wherein the display control unit performs control to selectively display, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, and a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen, the second lot being processed by the same recipe as a recipe by which the first lot is processed, and wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot.