MEMS device with a dual hinge structure

A micro-electro-mechanical system (MEMS) device, comprising:

• a first layer that includes a set of stator comb actuators;
• and
• a second layer that includes a set of rotor comb actuators, a first set of hinges, and a second set of hinges, wherein:
• the second layer is adjacent to the first layer,
• the first set of hinges and the second set of hinges are configured to tilt a mirror structure about a first axis of the MEMS device based on a driving torque caused by a stator comb actuator, of the set of stator comb actuators, engaging with a rotor comb actuator, of the set of rotor comb actuators,
• the first set of hinges is configured to resist a lateral linear force on the mirror structure in a direction associated with the first axis caused by the stator comb actuator engaging with the rotor comb actuator,
• the second set of hinges is configured to resist an in-plane torque on the mirror structure about a second axis of the MEMS device caused by the stator comb actuator engaging with the rotor comb actuator,
• a pivot center associated with the first set of hinges and the second set of hinges aligns with a mass center of the mirror structure, and
• a position of the pivot center is based on a ratio of a lateral stiffness associated with the first set of hinges and a lateral stiffness associated with the second set of hinges.

A micro-electro-mechanical system (MEMS) device, comprising:

• a first layer that includes a stator comb actuator;
• a second layer that includes a rotor comb actuator and a first set of hinges;
• a third layer that includes a second set of hinges;
• and
• a mirror structure that includes a mirror, wherein:
• the first set of hinges and the second set of hinges are configured to tilt the mirror structure about a first axis of the MEMS device based on a driving torque caused by the stator comb actuator engaging with the rotor comb actuator,
• the first set of hinges is configured to resist a first lateral linear force on the mirror structure in a first direction associated with the first axis caused by the stator comb actuator engaging with the rotor comb actuator, and
• the second set of hinges is configured to resist a second lateral linear force on the mirror structure in a second direction associated with a second axis of the MEMS device caused by the stator comb actuator engaging with the rotor comb actuator.