# US 12,007,508 B2 · Scanner control for Lidar systems

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- Number: US 12,007,508 B2
- Document ID: US12007508B2
- Status: Granted
- Kind: B2
- Application number: 18/138,869
- Filed: 2023-04-25
- Published: 2023-10-26
- Granted: 2024-06-11
- Earliest claimed: 2019-05-06
- Assignees: Hesai Technology Co., Ltd.
- Applicants: Hesai Technology Co., Ltd.
- Inventors: Yongfeng Gao; Shengping Mao; Liangchen Ye; Shaoqing Xiang
- Web page: https://patentgrep.com/patent/US12007508B2

## CPC

- G01S 7/4817: {relating to scanning}
- G01S 7/484: Transmitters
- G01S 17/10: using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32)
- G01S 17/894: Three-dimensional [3D] imaging with simultaneous measurement of time-of-flight at a two-dimensional [2D] array of receiver pixels, e.g. time-of-flight cameras or flash lidar
- G01S 17/931: of land vehicles
- G02B 26/0816: {by means of one or more reflecting elements}
- G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
- G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)}
- G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)}
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A scanner and a method for controlling the scanner for a Lidar system are provided. The method comprises: producing a trigger signal by a positional sensor of the scanner; generating a single drive signal comprising a first component at a first frequency and a second component at a second frequency, the first component and the second component are superposed with a fixed phase relationship with aid of the trigger signal; transmitting the single drive signal to the scanner, and the scanner has resonant responses at the first frequency; and actuating the scanner to move in a first periodic motion at the first frequency about a first axis, and move in a second periodic motion at the second frequency about a second axis.

## Claims

### Claim 1

A scanner for a Lidar system comprising:
a scanner comprising a scan plate coupled to an actuator via a plurality of torsion arms, wherein the plurality of torsion arms comprise a first torsion arm and a third torsion arm allowing the scan plate to move about a slow scan axis, and a second torsion arm allowing the scan plate to move about a fast scan axis; and
a controller configured to generate a drive signal to the actuator to drive a motion of the scanner, wherein the drive signal comprises a first component at a first frequency to drive a motion of the scanner about the fast scan axis, and a second component at a second frequency and a third component at a third frequency to drive a motion of the scanner about the slow axis, and wherein a value of the third frequency is twice of a value of the first frequency.

### Claim 2 (depends on 1)

The scanner of claim 1, wherein the second and the third torsion arm couple the scan plate to a gimbal.

### Claim 3 (depends on 1)

The scanner of claim 1, wherein the second and the third torsion form an H shape.

### Claim 4 (depends on 1)

The scanner of claim 1, wherein the first torsion arm couples the scan plate to the actuator.

### Claim 5 (depends on 1)

The scanner of claim 1, wherein the drive signal comprises a ramp waveform.

### Claim 6 (depends on 1)

The scanner of claim 1, wherein the first component and the second component of the drive signal have a predetermined phase relationship.

### Claim 7 (depends on 6)

The scanner of claim 6, wherein the first component and the second component of the drive signal are superposed based on the predetermined phase relationship with an aid of a trigger signal.

### Claim 8 (depends on 7)

The scanner of claim 7, wherein the trigger signal comprises a positional signal generated by a sensor.

### Claim 9 (depends on 1)

The scanner of claim 1, wherein the motion of the scanner about the slow scan axis comprises oscillation.

### Claim 10 (depends on 9)

The scanner of claim 9, wherein the first frequency comprises a resonant frequency of the fast scan axis.

### Claim 11 (depends on 1)

The scanner of claim 1, wherein a raster pinch distortion is corrected at least by the third component of the drive signal.

### Claim 12

A method for controlling scanner of a Lidar system comprising:
generating a drive signal to an actuator to drive a motion of the scanner, wherein the drive signal comprises a first component at a first frequency to drive a motion of the scanner about a fast scan axis, and a second component at a second frequency and a third component at a third frequency to drive a motion of the scanner about a slow axis, and wherein a value of the third frequency is twice of a value of the first frequency,
wherein the scanner comprising a scan plate coupled to the actuator via a plurality of torsion arms, wherein the plurality of torsion arms comprise a first torsion arm and a third torsion arm allowing the scan plate to move about the slow scan axis, and a second torsion arm allowing the scan plate to move about the fast scan axis.

### Claim 13 (depends on 12)

The method of claim 12, wherein the second and the third torsion arm couple the scan plate to a gimbal.

### Claim 14 (depends on 12)

The method of claim 12, wherein the second and the third torsion form an H shape.

### Claim 15 (depends on 12)

The method of claim 12, wherein the first torsion arm couples the scan plate to the actuator.

### Claim 16 (depends on 12)

The method of claim 12, wherein the drive signal comprises a ramp waveform.

### Claim 17 (depends on 12)

The method of claim 12, wherein the first component and the second component of the drive signal have a predetermined phase relationship.

### Claim 18 (depends on 17)

The method of claim 17, wherein the first component and the second component of the drive signal are superposed based on the predetermined phase relationship with an aid of a trigger signal.

### Claim 19 (depends on 18)

The method of claim 18, wherein the trigger signal comprises a positional signal generated by a sensor.

### Claim 20 (depends on 12)

The method of claim 12, wherein a raster pinch distortion is corrected at least by the third component of the drive signal.