# US 12,007,481 B2 · Sensor and distance measuring device

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- Number: US 12,007,481 B2
- Document ID: US12007481B2
- Status: Granted
- Kind: B2
- Application number: 18/297,875
- Filed: 2023-04-10
- Published: 2023-08-03
- Granted: 2024-06-11
- Earliest claimed: 2019-03-22
- Assignees: Kabushiki Kaisha Toshiba; Toshiba Electronic Devices & Storage Corporation
- Applicants: Kabushiki Kaisha Toshiba; Toshiba Electronic Devices & Storage Corporation
- Inventors: Hiroshi Kubota; Nobu Matsumoto
- Web page: https://patentgrep.com/patent/US12007481B2

## CPC

- G01S 7/4863: Detector arrays, e.g. charge-transfer gates
- G01S 17/10: using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32)
- H10F 39/802: {Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes}
- H10F 39/803: {Pixels having integrated switching, control, storage or amplification elements}
- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- H10F 39/811: {Interconnections}
- G01C 3/08: Use of electric radiation detectors
- G01J 1/44: Electric circuits {(for command of an exposure part G03B7/02)}
- G01J 2001/4466: {Avalanche}
- G01S 17/14: wherein a voltage or current pulse is initiated and terminated in accordance with the pulse transmission and echo reception respectively, e.g. using counters
- G01S 17/42: Simultaneous measurement of distance and other co-ordinates (indirect measurement G01S17/46)
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

A sensor includes an avalanche photodiode (APD), a first resistor, a second resistor, and a rectification element. The first resistor is connected between a current output terminal of the APD and a first output terminal. The second resistor and the rectification element are connected in series between the current output terminal and a second output terminal. The rectification element is connected between the second resistor and the second output terminal.

## Claims

### Claim 1

A sensor, comprising:
a plurality of sensor elements, each of the sensor elements comprising:
an avalanche photodiode (APD);
a first resistor connected between a current output terminal of the APD and a first output terminal; and
a second resistor and a rectification element connected in series between the current output terminal and a second output terminal, a second voltage equal to or less than a first voltage at the first output terminal being applied to the second output terminal,
the second output terminals of the plurality of sensor elements being connected to each other.

### Claim 2 (depends on 1)

The sensor according to claim 1, wherein the second voltage applied to the second output terminal is equal to or less than a value equal to the first voltage minus an overvoltage of the APD minus a threshold voltage of the rectification element.

### Claim 3 (depends on 1)

The sensor according to claim 1, wherein a resistance value of the second resistor is lower than a resistance value of the first resistor.

### Claim 4 (depends on 1)

The sensor according to claim 1, wherein, in at least one of the sensor elements,
the rectification element is a diode including an anode connected to the second resistor and a cathode connected to the second output terminal, and
the APD includes an anode connected to a power source and a cathode, which is the current output terminal.

### Claim 5 (depends on 1)

The sensor according to claim 1, wherein the first output terminals of the plurality of sensor elements are connected to each other.

### Claim 6 (depends on 1)

The sensor according to claim 1, wherein, in at least one of the sensor elements,
the APD is provided in a first region of a substrate,
the rectification element is connected between the second resistor and the second output terminal,
the sensor element further comprises:
a second APD in a second region of a substrate that is aligned with respect to the first region in a first direction;
a third resistor connected in series between a second current output terminal of the second APD and the first output terminal;
a fourth resistor connected in series between the second current output terminal of the second APD and the second output terminal; and
a second rectification element connected in series between the fourth resistor and the second output terminal, and
the rectification element and the second rectification element are provided in a third region of the substrate.

### Claim 7 (depends on 6)

The sensor according to claim 6, wherein in said at least one of the sensor elements, the third region of the substrate is aligned with respect to the first region and the second region in the first direction.

### Claim 8 (depends on 6)

The sensor according to claim 6, wherein, in said at least one of the sensor elements,
the first resistor is provided between the APD and the second APD, and
the third resistor is provided between the second APD and the third region.

### Claim 9 (depends on 6)

The sensor according to claim 6, wherein, in said at least one of the sensor elements, the first region and the second region of the substrate are in a center region of the substrate, and the third region is located outside of the center region.

### Claim 10 (depends on 6)

The sensor according to claim 6, wherein, in said at least one of the sensor elements, the third region of the substrate is aligned with respect to the first region in a second direction that crosses the first direction.

### Claim 11 (depends on 6)

The sensor according to claim 6, wherein, in said at least one of the sensor elements, the third region of the substrate is surrounded by a plurality of APDs including the APD and the second APD.

### Claim 12 (depends on 1)

A distance measuring device, comprising:
an optical unit configured to direct light toward a target object;
a sensor according to claim 1, which is configured to receive light reflected by the target object; and
a processor configured to determine a distance to the target object based on a signal output from the sensor.

### Claim 13

A sensor, comprising:
a plurality of sensor elements, each of the sensor elements comprising:
an avalanche photodiode (APD);
a first resistor connected between a current output terminal of the APD and a first output terminal; and
a second resistor and a rectification element connected in series between the current output terminal and a second output terminal, the rectification element having a breakdown voltage equal to or greater than an absolute value of an overvoltage of the APD,
the second output terminals of the plurality of sensor elements being connected to each other.

### Claim 14 (depends on 13)

The sensor according to claim 13, wherein in at least one of the sensor elements,
the rectification element is a Zener diode including an anode connected to the second resistor and a cathode connected to the second output terminal, and
the APD includes an anode connected to a power source and a cathode, which is the current output terminal.

### Claim 15 (depends on 13)

The sensor according to claim 13, wherein a resistance value of the second resistor is lower than a resistance value of the first resistor.

### Claim 16 (depends on 13)

The sensor according to claim 13, wherein the first output terminals of the plurality of sensor elements are connected to each other.

### Claim 17 (depends on 13)

The sensor according to claim 13, wherein, in at least one of the sensor elements,
the APD is provided in a first region of a substrate,
the rectification element is connected between the second resistor and the second output terminal,
the sensor element further comprises:
a second APD in a second region of a substrate that is aligned with respect to the first region in a first direction;
a third resistor connected in series between a second current output terminal of the second APD and the first output terminal;
a fourth resistor connected in series between the second current output terminal of the second APD and the second output terminal; and
a second rectification element connected in series between the fourth resistor and the second output terminal, and
the rectification element and the second rectification element are provided in a third region of the substrate.

### Claim 18 (depends on 17)

The sensor according to claim 17, wherein in said at least one of the sensor elements, the third region of the substrate is aligned with respect to the first region and the second region in the first direction.

### Claim 19 (depends on 17)

The sensor according to claim 17, wherein, in said at least one of the sensor elements,
the first resistor is provided between the APD and the second APD, and
the third resistor is provided between the second APD and the third region.

### Claim 20 (depends on 17)

The sensor according to claim 17, wherein, in said at least one of the sensor elements, the first region and the second region of the substrate are in a center region of the substrate, and the third region is located outside of the center region.

### Claim 21 (depends on 17)

The sensor according to claim 17, wherein, in said at least one of the sensor elements, the third region of the substrate is aligned with respect to the first region in a second direction that crosses the first direction.

### Claim 22 (depends on 17)

The sensor according to claim 17, wherein, in said at least one of the sensor elements, the third region of the substrate is surrounded by a plurality of APDs including the APD and the second APD.

### Claim 23 (depends on 13)

A distance measuring device, comprising:
an optical unit configured to direct light toward a target object;
a sensor according to claim 13, which is configured to receive light reflected by the target object; and
a processor configured to determine a distance to the target object based on a signal output from the sensor.