# US 12,007,356 B2 · Field effect transistor sensor and a corresponding array device

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- Number: US 12,007,356 B2
- Document ID: US12007356B2
- Status: Granted
- Kind: B2
- Application number: 16/963,885
- Filed: 2018-01-26
- Published: 2020-11-05
- Granted: 2024-06-11
- Earliest claimed: 2018-01-26
- Assignees: Universita' Degli Studi Di Bari Aldo Moro
- Applicants: Università Degli Studi Di Bari Aldo Moro
- Inventors: Luisa Torsi; Gaetano Scamarcio; Eleonora Macchia; Kyriaki Manoli; Gerardo Palazzo; Nicola Cioffi; Rosaria Anna Picca
- Web page: https://patentgrep.com/patent/US12007356B2

## CPC

- G01N 27/4143: {Air gap between gate and channel, i.e. suspended gate [SG] FETs (work function measurement per se G01N27/002)}
- G01N 27/4148: {Integrated circuits therefor, e.g. fabricated by CMOS processing}
- G01N 27/4145: {specially adapted for biomolecules, e.g. gate electrode with immobilised receptors}
- G01N 33/5438: {Electrodes}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A field effect transistor sensor includes: a source-drain channel, a semiconductor layer on said source-drain channel, a first gate electrode arranged above said semiconductor layer, a first well enclosing said source-drain channel, said semiconductor layer and said first gate electrode, the first well being configured to be filled, in use, with a first liquid, particularly a gating electrolyte, a second gate electrode arranged above the first gate electrode and exposed to an interior of the first well. Also disclosed is an array device including an array of field effect transistor sensors according to the above.

## Claims

### Claim 1

A field effect transistor (BS, BS′) sensor including:
a source-drain channel (2),
a semiconductor layer (4) on said source-drain channel (2),
a first gate electrode (14, 14′) arranged above said semiconductor layer (4),
a first well (6) enclosing said source-drain channel (2), said semiconductor layer (4) and said first gate electrode (14, 14′), the first well (6) being configured to be filled, in use, with a first liquid (8),
a second well (20) configured to be filled, in use, with a second liquid (23), the second well (20) being arranged above the first well (6), and
a second gate electrode (24, 24′) arranged above the first gate electrode (14, 14′) and exposed to an interior of the first well (6),
wherein the second gate electrode (24, 24′) provides at least a portion of a bottom wall of the second well (20).

### Claim 2 (depends on 1)

The field effect transistor (BS, BS′) of claim 1, wherein the second gate electrode (24, 24′) is a sensing gate electrode and includes a first face (28) carrying a layer of biological recognition elements (30) including one or more specific-binding-pair-forming substances, and a second face (26) exposed to the interior of the first well (6).

### Claim 3 (depends on 2)

The field effect transistor sensor (BS, BS′) of claim 2, wherein said first face (28) covered and second face (26) are opposite and equipotential.

### Claim 4 (depends on 3)

The field effect transistor sensor (BS, BS′) of claim 3, wherein the second gate electrode (24, 24′) includes a precursor (24P) coated with a layer of electrically conductive material, which is continuous across said opposite first and second faces (26, 28), thereby being equipotential on said opposite first and second faces (26, 28).

### Claim 5 (depends on 1)

The field effect transistor sensor (14; 14′) of claim 1, wherein the first gate electrode (14; 14′) is an electronic reference gate electrode.

### Claim 6 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, including a substrate (12) carrying said source-drain channel (2), said substrate (12) laying at a bottom (10) of the first well (6).

### Claim 7 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, including a substrate (12) carrying said source-drain channel, said substrate (12) being provided by a bottom (10) of the first well (6).

### Claim 8 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, wherein the first well (6) includes a plurality of pillars (18) supporting the second well (20).

### Claim 9 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, wherein a rim on side walls of the first well (6) supports the second well (20).

### Claim 10 (depends on 1)

The field effect transistor sensor of claim 1, wherein said second gate electrode (24, 24′) includes a core substrate (KS), and a first layer (GL1) and a second layer (GL2) of electrically conductive material, coating opposite faces of said core substrate (KS), said first and second layers of electrically conductive material being equipotential via a conductive bridge extending through said core substrate (KS).

### Claim 11 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, wherein the second gate electrode (24, 24′) includes first and second faces (A, B, C, D, E) on opposite sides of a circuit board (BRD) with electrical connections departing from each of the first and second faces and ending at corresponding locations on said opposite sides of the circuit board (BRD).

### Claim 12 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, wherein said semiconductor layer comprises a P3HT+ZnO-NP p-type semiconductor.

### Claim 13 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, wherein the first gate electrode (14, 14′) is spaced from the semiconductor layer (4).

### Claim 14 (depends on 1)

The field effect transistor sensor (BS, BS′) of claim 1, wherein the second gate electrode (24; 24′) is spaced from the first gate electrode (14; 14′).

### Claim 15 (depends on 1)

An array device (AD, AD′) including an array of field effect transistor sensors (BS, BS′) according to claim 1.

### Claim 16 (depends on 15)

The array device (AD, AD′) of claim 15, including a lower plate (60) defining a first volume, a bottom of said first volume comprising a pattern of resistor units (RU), each resistor unit including said source-drain channel (2) and said semiconductor layer (4), said first volume providing the first well (6) for said pattern of resistor units (RU).

### Claim 17 (depends on 16)

The array device (AD) of claim 16, including an upper plate (200) provided with a corresponding pattern of receptacles defining the second wells (20) for corresponding resistor units (RU), a bottom of each receptacle being provided by a corresponding second gate electrode (24) located above one or more corresponding first gate electrodes (14′) housed in the lower plate (60), the upper plate (200) being stacked onto said lower plate (60).

### Claim 18 (depends on 16)

The array device (AD′) of claim 16, including an upper plate (200′) having a framework-like structure with bridging members (B24) extending across the framework-like structure, said bridging members supporting a pattern of said second gate electrodes (24′) above one or more corresponding first gate electrodes (14′) housed in the lower plate (60), the upper plate (200) being stacked onto said lower plate (60).