# US 12,007,349 B2 · Fast humidity sensor and a method for calibrating the fast humidity sensor

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- Number: US 12,007,349 B2
- Document ID: US12007349B2
- Status: Granted
- Kind: B2
- Application number: 17/545,029
- Filed: 2021-12-08
- Published: 2022-06-09
- Granted: 2024-06-11
- Earliest claimed: 2020-12-09
- Assignees: Vaisala Oyj
- Applicants: Vaisala Oyj
- Inventors: Jukka Leppänen; Marko Jalonen
- Web page: https://patentgrep.com/patent/US12007349B2

## CPC

- G01N 27/225: {by using hygroscopic materials}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

According to an example aspect of the present invention, there is provided a sensor structure formed on a substrate comprising a sensor frame, comprising electric contacts for sensors, an active sensor within the sensor frame comprising at least a capacitive humidity sensor. In accordance with the invention the active sensor is connected to the sensor frame only by a thin thermally isolating layer supporting the active sensor, the thermally isolating layer including electric contacts from the sensor frame.

## Claims

### Claim 1

A calibration method using a sensor structure formed on a substrate comprising a sensor frame comprising electric contacts for sensors and an active sensor within the sensor frame comprising at least a capacitive humidity sensor, wherein the active sensor is mechanically attached to the sensor frame only by a thermally isolating layer supporting the active sensor, the thermally isolating layer supporting the electric contacts, the substrate is removed from the active sensor, the active sensor includes at least one of a heating resistor and a temperature measurement resistor, and, wherein:
the active sensor is heated with a heating pulse, and
the capacitance of the capacitive humidity sensor and temperature of the active sensor are determined in connection with the heating pulse, wherein
the sensor structure is configured to produce a difference between a thermal response time and a humidity response time of the active sensor, wherein the difference is utilized for dry capacitance measurement, and
the temperature of the capacitive humidity sensor is measured by the temperature measurement resistor, and
at least a minimum value for the capacitance, which represents a dry capacitance, is determined as a RH 0% point of the humidity sensor at the measurement temperature, and
a RH maximum point during the heating pulse, which represents the point where water has not been removed from the humidity sensor due to heating but the temperature has reached a stable value, is determined in connection with the heating pulse.

### Claim 2 (depends on 1)

The calibration method in accordance with claim 1, wherein the duration of the heating pulse is in the range of 0.05-5 seconds.

### Claim 3 (depends on 1)

The calibration method in accordance with claim 1, wherein the heating power for the active sensor is in the range of 0.1 mW/° C. to 5 mW/° C.

### Claim 4 (depends on 1)

The calibration method in accordance with claim 1, wherein the rate of temperature change during heating of the active sensor is more than 200° C./s.

### Claim 5 (depends on 1)

The calibration method in accordance with claim 1, wherein the thickness of the thermally isolating layer supporting the active sensor is 350 nm.

### Claim 6 (depends on 1)

The calibration method in accordance with claim 1, wherein the thickness of the thermally isolating layer supporting the active sensor is 100-1000 nm.

### Claim 7 (depends on 1)

The calibration method in accordance with claim 1, wherein the capacitive humidity sensor is heated by the heating resistor or by periodically powering or measuring a second temperature measurement resistor.

### Claim 8 (depends on 1)

The calibration method in accordance with claim 1, wherein the active sensor includes the heating resistor and the temperature measurement resistor, and the thermal response time of the active sensor is more than 10 times faster than the humidity response time of the active sensor.

### Claim 9 (depends on 1)

The calibration method in accordance with claim 1, wherein the sensor frame and the active sensor are concentric with each other.

### Claim 10 (depends on 1)

The calibration method in accordance with claim 1, wherein the total thickness of the active sensor is in the range of 1-100 μm.

### Claim 11 (depends on 1)

The calibration method in accordance with claim 1, wherein the total thickness of the active sensor is 2 μm.

### Claim 12 (depends on 1)

The calibration method in accordance with claim 1, wherein the width of the thermally isolating layer between the sensor frame and the active sensor to the width of the active sensor is in the range of 1:6-1:2.

### Claim 13 (depends on 1)

The calibration method in accordance with claim 1, wherein the substrate is of one of: silicon or germanium.

### Claim 14 (depends on 1)

The calibration method in accordance with claim 1, wherein the thermally isolating layer is of SiN.