Temperature measurement and temperature calibration methods and temperature measurement system

A system for temperature measurement, comprising:

• a setting circuit, configured to set a set temperature of a chamber, a position of a first test structure corresponding to the set temperature, and a voltage V applied to two opposite ends of the first test structure, the first test structure referring to a structure which is located on a temperature calibrator placed on a stage and of which a resistance R of the temperature calibrator forms a first functional relationship with an actual temperature T;
• a temperature control circuit, configured to control a temperature of the chamber to reach the set temperature, wherein the set temperature comprises a reference temperature T0, a first actual temperature T11 and a second actual temperature T12;
• a measurement circuit, configured to apply the voltage V to the two opposite ends of the first test structure to obtain a current I and a resistance R of the first test structure at the set temperature, wherein the current I and the resistance R comprise a first reference current I01 and a first reference resistance R01 at the reference temperature T0, a first current I11 and a first resistance R11 at the first actual temperature T11 and a second current I12 and a second resistance R12 at the second actual temperature T12;
• and
• a calculation circuit, configured to acquire the voltage V, the resistance R, the reference temperature T0, the first reference current I01, the first current I11, the second current I12, the first reference resistance R01, the first resistance R11, and the second resistance R12;
• the calculation circuit is further configured to acquire a first current difference ΔI11 of the first test structure at the first actual temperature T11 according to a difference between the first current I11 and the first reference current I01, and a second current difference ΔI12 of the first test structure at the second actual temperature T12 according to a difference between the second current I12 and the first reference current I01 respectively;
• the calculation circuit is further configured to acquire a difference ΔT11 between the first actual temperature T11 and the reference temperature T0 according to a product of a negative of a ratio of the voltage V to the first current difference ΔI11 and a first current resolution, and a difference ΔT12 between the second actual temperature T12 and the reference temperature T0 according to a product of a negative of a ratio of the voltage V to the second current difference ΔI12 and the first current resolution respectively;
• the calculation circuit is further configured to perform linear fitting on the first reference resistance R01, the first resistance R11, the second resistance R12, the reference temperature T0, the first actual temperature T11, and the second actual temperature T12 to obtain the first functional relationship between the resistance R of the first test structure and the actual temperature T;
• the calculation circuit is further configured to acquire the actual temperature T corresponding to the temperature calibrator at the set temperature according to the resistance R and the first functional relationship;
• wherein the set temperature is greater than or equal to a minimum critical temperature endurable by the temperature calibrator and is less than or equal to a maximum critical temperature endurable by the temperature calibrator;
• wherein the first current resolution refers to an accuracy of measuring a current of the first test structure by the measurement circuit;
• wherein the temperature calibrator is operable and not destroyed at the set temperature ranging from the minimum critical temperature endurable by the temperature calibrator to the maximum critical temperature endurable by the temperature calibrator.