Infrared sensor and infrared sensor array
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsKouhei Takahashi, Naoki Tambo, Kunihiko Nakamura, Masaki Fujikane, Yasuyuki Naito
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AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsKouhei Takahashi, Naoki Tambo, Kunihiko Nakamura, Masaki Fujikane, Yasuyuki Naito
Estimating the term…
Each of first and second beams has a connection portion connected to a base substrate and a separated portion away from the base substrate, and is physically joined to an infrared receiver at the separated portion. The infrared receiver is supported by the first and second beams, and includes lower electrode, upper electrode, and a resistance change film. The resistance change film is sandwiched by the lower electrode and upper electrode in a thickness direction, each of the lower and upper electrodes is electrically connected to the resistance change film, the lower and upper electrodes are electrically connected to first wiring and second wiring, respectively, at least one electrode selected from the lower electrode and the upper electrode has a line-and-space structure, and an infrared reflection film is provided at a position on a surface of the base substrate facing the infrared receiver.
An infrared sensor comprising:
An infrared sensor comprising:
Dependencies are inferred from the claim text.