# US 12,007,276 B2 · Sensor for hyperspectral imaging based on a metasurface-integrated light detector array

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- Number: US 12,007,276 B2
- Document ID: US12007276B2
- Status: Granted
- Kind: B2
- Application number: 16/362,598
- Filed: 2019-03-22
- Published: 2020-01-23
- Granted: 2024-06-11
- Earliest claimed: 2018-03-22
- Assignees: Purdue Research Foundation
- Applicants: Purdue Research Foundation
- Inventors: Rohith Chandrasekar; Amr Shaltout; Vladimir Shalaev; Alexander Chubykin; Alexei Lagutchev
- Web page: https://patentgrep.com/patent/US12007276B2

## CPC

- G01J 3/0237: {Adjustable, e.g. focussing}
- G01J 3/0208: {using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction}
- G01J 3/0224: {using polarising or depolarising elements}
- G01J 3/2803: {using photoelectric array detector}
- G01J 3/2823: {Imaging spectrometer}
- G01J 3/44: Raman spectrometry; Scattering spectrometry {; Fluorescence spectrometry}
- G01J 3/4412: {Scattering spectrometry (particle sizing by light scattering G01N15/0205; optical velocimetry of particles G01P5/20, G01P5/26)}
- G01N 21/19: Dichroism
- G01N 21/251: {Colorimeters; Construction thereof}
- G01N 21/31: Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry {(G01N21/72 takes precedence)}
- G01N 21/65: Raman scattering
- G02B 21/361: {Optical details, e.g. image relay to the camera or image sensor (G02B21/364 takes precedence; illumination details G02B21/06 and subgroups)}
- G02B 27/56: Optics using evanescent waves, i.e. inhomogeneous waves
- G01J 2003/282: {Modified CCD or like}
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A spectroscopic microscope device, including at least one array of metasurfaces, and at least one CCD array integrated with the array of metasurfaces. The metasurfaces in the array are configured to separately direct LCP an RCP components of light incident on the metasurface to separate pixels in the CCD array.

## Claims

### Claim 1

A spectroscopic device, comprising:
a. a unitary surface having an array of transmissive metasurfaces configured to interact with an incident light reflected from a specimen, wherein each transmissive metasurface of the array of transmissive metasurfaces is positioned to interact with a different respective portion of the incident light; and
b. a CCD array including a plurality of pixels integrated with the array of transmissive metasurfaces such that each transmissive metasurface is associated with a unique pair of pixels of the plurality of pixels, thereby forming a plurality of unique pairs of pixels,
wherein each transmissive metasurface is configured to direct Left circularly polarized (LCP) components of the respective portion of the incident light on the transmissive metasurface to a first pixel of the unique pair of pixels and Right circularly polarized (RCP) components of the respective portion of the incident light on the transmissive metasurface to a second pixel of the unique pair of pixels,
wherein the plurality of unique pairs of pixels collectively form a spectroscopically resolved image of the specimen.

### Claim 2 (depends on 1)

The spectroscopic device of claim 1, wherein the array of transmissive metasurfaces is sub-millimeter in thickness.

### Claim 3 (depends on 1)

The spectroscopic device of claim 1, wherein the spectroscopically resolved image includes a colorimetric image.

### Claim 4 (depends on 1)

The spectroscopic device of claim 1, wherein the spectroscopically resolved image includes a Raman spectroscopic image.

### Claim 5 (depends on 1)

The spectroscopic device of claim 1, wherein the spectroscopically resolved image includes a Circular Dichroic (CD) image.

### Claim 6 (depends on 1)

The spectroscopic device according to claim 1, wherein the array of transmissive metasurfaces is fabricated on top of the CCD array.

### Claim 7 (depends on 1)

The spectroscopic device according to claim 1, wherein the array of transmissive metasurfaces is adjustable to work within a plurality of wavelengths including ultraviolet, visible, and infrared.

### Claim 8 (depends on 1)

The spectroscopic device according to claim 1, wherein the array of transmissive metasurfaces and the CCD array are each configured to couple with a microscope, wherein the array of transmissive metasurfaces and the CCD array are configured generate spectroscopically resolved images from samples observed by the microscope.

### Claim 9 (depends on 1)

The spectroscopic device according to claim 1, wherein the array of transmissive metasurfaces and the CCD array are each configured to couple adjacent to or within a body, wherein the array of transmissive metasurfaces and the CCD array are configured to perform biological sensing in vitro or in vivo relative to the body.

### Claim 10 (depends on 1)

The spectroscopic device according to claim 1, wherein the spectroscopic device is configured to perform DNA structural analysis.

### Claim 11 (depends on 1)

The spectroscopic device according to claim 1, wherein the spectroscopic device is configured to perform stereochemical applications.

### Claim 12 (depends on 1)

The spectroscopic device according to claim 1, wherein the spectroscopic device is configured to perform crystallography.

### Claim 13 (depends on 1)

The spectroscopic device according to claim 1, wherein the spectroscopic device is configured to perform live monitoring of biological molecules in naturally behaving subjects.

### Claim 14 (depends on 1)

The spectroscopic device of claim 1, wherein the plurality of unique pairs of pixels simultaneously capture spectral data from the incident light reflected from the specimen to form a snapshot hyperspectral image of the specimen.

### Claim 15 (depends on 1)

The spectroscopic device of claim 1, wherein the unitary surface includes an outer metallic layer, wherein the outer metallic layer includes a plurality of voids, wherein each void of the plurality of voids exposes one transmissive metasurface of the array of transmissive metasurfaces.

### Claim 16 (depends on 15)

The spectroscopic device of claim 15, wherein each void of the plurality of voids extends from 100 to 400 micrometers wide.

### Claim 17

A spectroscopic device, comprising:
a. a unitary surface having an array of transmissive metasurfaces configured to interact with an incident light reflected from a specimen, wherein each transmissive metasurface of the array of transmissive metasurfaces includes a plurality of nanoantennas, wherein each nanoantenna is formed having a top metallic layer, a central dielectric layer, and a bottom metallic layer;
b. a dielectric disposed adjacent to the array of transmissive metasurfaces; and
c. a CCD array disposed adjacent to the dielectric, wherein the dielectric is positioned in between the array of transmissive metasurfaces and the CCD array, wherein the CCD array includes a first pixel and a second pixel spatially separate from the first pixel for each transmissive metasurface of the array of transmissive metasurfaces thereby forming a plurality of first pixels and a plurality of second pixels;
wherein each transmissive metasurface is configured to direct Left circularly polarized (LCP) components of incident light on the transmissive metasurface to the respective first pixel and Right circularly polarized (RCP) components of incident light on the transmissive metasurface to the respective second pixel, wherein the plurality of first pixels and the plurality of second pixels capture an entire light spectrum reflected from the specimen to form a spectroscopically resolved image.

### Claim 18

A spectroscopic sensor, comprising:
a. a unitary surface having an array of transmissive metasurfaces configured to interact with an incident light reflected from a specimen, wherein each transmissive metasurface of the array of transmissive metasurfaces extends from 10 micrometers to 1 millimeter wide and is positioned to interact with a respective portion of the incident light; and
b. a CCD array including a plurality of pixels, wherein each pixel of the plurality of pixels extends from 0.5 millimeters wide to 1 millimeter wide, wherein each transmissive metasurface of the array of transmissive metasurfaces is associated with a unique pair of pixels from the plurality of pixels, wherein each transmissive metasurface is configured to direct Left circularly polarized (LCP) components of the respective portion of the incident light to a first pixel of the unique pair of pixels and Right circularly polarized (RCP) components of the respective portion of the incident light to a second pixel of the unique pair of pixels, whereby a first spectral dataset is generated from all LCP components of the incident light and a second spectral dataset is generated from all RCP components of the incident light,
wherein the first and second spectra datasets collectively form a spectroscopically resolved image.

### Claim 19 (depends on 18)

The spectroscopic sensor according to claim 18, wherein the array of transmissive metasurfaces is fabricated on top of the CCD array.

### Claim 20 (depends on 18)

The spectroscopic sensor according to claim 18, wherein the array of transmissive metasurfaces and the CCD array are each configured to couple with a microscope, wherein the array of transmissive metasurfaces and the CCD array are configured generate the spectroscopically resolved image from a sample observed by the microscope.
