Purification apparatus and method of purifying hot zone parts

A purification apparatus, which is configured to remove impurities attached on at least one hot zone part, the purification apparatus comprising:

• a crystal high temperature furnace including a furnace body, a furnace cover mounted on the furnace body, and a thermal field module disposed in the furnace body;
• an enclosed box disposed in the thermal field module and including a box body and a box cover detachably mounted on the box body, wherein the box body is configured to accommodate the at least one hot zone part;
• an outer tube passing through the furnace cover and including a first outer tube opening, a second outer tube opening, and a third outer tube opening, wherein the first outer tube opening and the second outer tube opening are spaced apart from a side of the furnace cover, the side of the furnace cover is distant from the furnace body, and the third outer tube opening is connected to the box cover;
• an inner tube disposed within the outer tube and spaced apart from an inner side of the outer tube, wherein the inner tube includes a first inner tube opening and a second inner tube opening;
• and
• a gas inlet cover connected to the first outer tube opening and configured to input a noble gas into the enclosed box through the inner tube, wherein the thermal field module is configured to heat the noble gas in the enclosed box so that the impurities are heated and vaporized through the noble gas.