Leveling unit for imprinting and imprint apparatus comprising same

A leveling unit for imprinting, the leveling unit comprising:

• a base plate;
• a moving plate spaced apart from the base plate, and having a reference plane heading for an opposite direction of the base plate;
• and
• a plurality of link parts connecting the base plate with the moving plate, being spaced apart from each other by a predetermined distance along a circumferential direction with respect to a center of the reference plane, and configured to be elastically and independently transformed by a pressing force applied to the reference plane to adjust an inclination of the moving plate,
• wherein each of the link parts comprises,
• an elastic link part combined with the base plate and elastically transformed by the pressing force applied to the reference plane, and
• a link member connecting the elastic link part with the moving plate, being combined with the elastic link part with a rotational joint, and being combined with the moving plate with a spherical joint,
• wherein the elastic link part comprises first and second blocks spaced apart from each other and an elastic member between the first and second blocks, and
• wherein the first block is combined with the base plate,
• the second block is combined with the link member with the rotational joint, and
• the elastic member is configured to connect the first block with the second block and extends between the first block and the second block.