# US 12,005,545 B2 · Fixing device and detection system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,005,545 B2 - Document ID: US12005545B2 - Status: Granted - Kind: B2 - Application number: 17/477,857 - Filed: 2021-09-17 - Published: 2022-05-19 - Granted: 2024-06-11 - Earliest claimed: 2020-11-17 - Assignees: Changxin Memory Technologies, Inc. - Applicants: Changxin Memory Technologies, Inc. - Inventors: Chao Li; Chin-Chung Ku - Web page: https://patentgrep.com/patent/US12005545B2 ## CPC - B24B 37/205: {provided with a window for inspecting the surface of the work being lapped} - B24B 37/005: Control means for lapping machines or devices - B24B 37/27: Work carriers - B24B 37/32: Retaining rings - B24B 41/047: Grinding heads for working on plane surfaces - B24B 49/00: Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (B24B33/06, B24B37/005 take precedence; if applicable to other machine tools, B23Q15/00 - B23Q17/00 take precedence) - B24B 49/12: involving optical means - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H10P 72/10: using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] - Y02P 70/10: Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working - B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS ## Abstract The embodiments of the present application provide a fixing device and a detection system. The fixing device includes: a bearing disk used for bearing a lapping head, the bearing disk being provided with positioning holes and a first positioning ring, the positioning holes being used for accommodating and fixing a positioning pin of a first type of lapping head, and the first positioning ring being used for fixing a positioning disk of a second type of lapping head. ## Claims ### Claim 1 A fixing device, comprising: a bearing disk, used for bearing a lapping head, the bearing disk being provided with positioning holes and a first positioning ring, the positioning holes being used for accommodating and fixing a positioning pin of a first type of lapping head, and the first positioning ring being used for fixing a positioning disk of a second type of lapping head; wherein the bearing disk comprises a bearing plate and a second positioning ring surrounding an outer edge of the bearing plate, with the positioning holes and the first positioning ring being located in the bearing plate, the first type of lapping head is provided with a positioning disk used for fixing the positioning pin, and the second positioning ring is used for accommodating and fixing the positioning disk of the first type of lapping head. ### Claim 2 (depends on 1) The fixing device according to claim 1, wherein the positioning disk of the second type of lapping head has a second projected height, and in a direction perpendicular to a surface of the bearing disk, a height difference between a top surface of the second positioning ring and a top surface of the bearing plate is less than the second projected height. ### Claim 3 (depends on 1) The fixing device according to claim 1, further comprising: a datum ring and a moving unit, a top surface of the datum ring being a datum plane, an internal diameter of the datum ring being less than external diameters of the first type of lapping head and the second type of lapping head, and the moving unit being used for controlling the bearing disk to move up or down along a first central axis of the datum ring. ### Claim 4 (depends on 1) A detection system, comprising: the fixing device according to claim 1; and a detector used for detecting surface characteristic parameters of the lapping head. ### Claim 5 (depends on 4) The detection system according to claim 4, wherein the surface characteristic parameters comprise a surface curve and a groove depth of a retaining ring of the lapping head. ### Claim 6 (depends on 5) The detection system according to claim 5, further comprising: an analyzer used for analyzing a service life of the retaining ring according to surface curves and groove depths of the retaining ring at different times and according to characteristic parameters of wafers formed by using a same lapping head at different times. ### Claim 7 (depends on 1) The fixing device according to claim 1, wherein the bearing disk comprises the first positioning ring located at a center and the positioning holes surrounding the first positioning ring. ### Claim 8 (depends on 7) The fixing device according to claim 7, wherein the bearing disk further comprises gas passage holes used for being communicated with vent holes of the first type of lapping head to convey a released gas of the first type of lapping head. ### Claim 9 (depends on 8) The fixing device according to claim 8, wherein the first positioning ring is a through hole running through the bearing disk, and the gas passage holes are partially superposed with the first positioning ring. ### Claim 10 (depends on 8) The fixing device according to claim 8, wherein a size of each of the gas passage holes is greater than that of the vent holes. ### Claim 11 (depends on 7) A detection system, comprising: the fixing device according to claim 7; and a detector used for detecting surface characteristic parameters of the lapping head. ### Claim 12 (depends on 11) The detection system according to claim 11, wherein the surface characteristic parameters comprise a surface curve and a groove depth of a retaining ring of the lapping head. ### Claim 13 (depends on 12) The detection system according to claim 12, further comprising: an analyzer used for analyzing a service life of the retaining ring according to surface curves and groove depths of the retaining ring at different times and according to characteristic parameters of wafers formed by using a same lapping head at different times.