# US 12,005,446 B2 · High throughput compact microfluidic cell counter > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,005,446 B2 - Document ID: US12005446B2 - Status: Granted - Kind: B2 - Application number: 17/505,628 - Filed: 2021-10-20 - Published: 2022-04-28 - Granted: 2024-06-11 - Earliest claimed: 2020-10-23 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Mukhles Sowwan; Samer Banna - Web page: https://patentgrep.com/patent/US12005446B2 ## CPC - B01L 3/502715: {characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces} - G01N 15/0266: {with electrical classification} - G01N 15/1023: {Microstructural devices for non-optical measurement} - G01N 15/1031: by measuring electrical or magnetic effects - B01L 2300/0645: Electrodes - B01L 2300/0858: Side walls - B01L 2300/0864: comprising only one inlet and multiple receiving wells, e.g. for separation, splitting - G01N 2015/0294: {Particle shape} - G01N 2015/1006: {for cytology} - G01N 2015/1024: {Counting particles by non-optical means} - G01N 2015/1029: {Particle size} - G01N 2015/103: {Particle shape} - B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract Embodiments of apparatus and methods for counting cells in a liquid sample are provided herein. In some embodiments, an apparatus for counting cells in a liquid sample includes: a flow-splitting chamber fluidly coupled to a collection chamber; an input tube configured to deliver a liquid sample to the flow-splitting chamber; a spaced apart array of posts along a flow path configured to redirect the liquid sample into a plurality of streams; a plurality of sensing zones corresponding to the plurality of streams; and a plurality of sensing electrodes, wherein each sensing electrode is disposed in a corresponding sensing zone of the plurality of sensing zones and configured to detect a change in electrical impedance as the liquid sample flows through the plurality of sensing zones. ## Claims ### Claim 1 An apparatus for counting cells in a liquid sample, comprising: a flow-splitting chamber fluidly coupled to a collection chamber; an input tube configured to deliver a liquid sample containing cells to the flow-splitting chamber; a spaced apart array of posts arranged in the flow-splitting chamber in a plurality of rows of posts along a flow path to define a plurality of channels therebetween and configured to redirect the liquid sample into a plurality of streams corresponding to the number of channels defined by a last row of posts in the plurality of rows of posts; a plurality of sensing zones corresponding to the plurality of streams; and a plurality of sensing electrodes, wherein each sensing electrode is disposed in a corresponding sensing zone of the plurality of sensing zones and configured to detect a change in electrical impedance as cells in the liquid sample flow through the plurality of sensing zones. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the flow-splitting chamber includes sidewalls that taper radially outward from the input tube towards the collection chamber. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the spaced apart array of posts have a triangular cross-sectional shape. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the spaced apart array of posts are arranged in a plurality of rows of posts, wherein from the input tube towards the collection chamber, each row of the plurality of rows of post includes a greater number of posts than any preceding row of the plurality of rows of posts. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the plurality of streams extend parallel to one another. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the spaced apart array of posts are arranged uniformly in the flow-splitting chamber. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein each of the plurality of streams have a width of about 20 to about 50 microns. ### Claim 8 (depends on 1) The apparatus of claim 1, further comprising: a first electrode electrically coupled to the flow-splitting chamber, wherein the first electrode is disposed between the last row of posts of the plurality of rows of posts and a second to last row of posts of the plurality of rows of posts; and a second electrode electrically coupled to the collection chamber downstream of the plurality of rows of posts. ### Claim 9 (depends on 8) The apparatus of claim 8, further comprising an insulating layer disposed between the first electrode and the second electrode. ### Claim 10 A cell manufacturing apparatus, comprising: a master device having a controller for processing control programs; and a cell counting device electrically coupled to the master device to facilitate transfer of data therebetween and fluidly coupled to the master device, wherein the cell counting device comprises: a flow-splitting chamber fluidly coupled to a collection chamber, wherein at least one of the flow-splitting chamber and the collection chamber are fluidly coupled to the master device, wherein the flow-splitting chamber includes a spaced apart array of posts in the flow-splitting chamber along a flow path and configured to redirect a liquid sample containing cells into a plurality of streams, wherein the spaced apart array of posts are arranged uniformly in the flow-splitting chamber: an input tube configured to deliver the liquid sample to the flow-splitting chamber; a plurality of sensing zones corresponding to the plurality of streams; a first electrode electrically coupled to the flow-splitting chamber; a second electrode electrically coupled to the collection chamber; and a plurality of sensing electrodes, wherein each sensing electrode is disposed in a corresponding sensing zone of the plurality of sensing zones and configured to detect a change in electrical impedance as the cells in the liquid sample flow through the plurality of sensing zones. ### Claim 11 (depends on 10) The cell manufacturing apparatus of claim 10, further comprising an input tube extending from the master device to the flow-splitting chamber for delivering the liquid sample from the master device to the flow-splitting chamber. ### Claim 12 (depends on 10) The cell manufacturing apparatus of claim 10, further comprising an auxiliary device fluidly coupled to the collection chamber, wherein the auxiliary device is configured to at least one of: clean the liquid sample; perform a cell selection process on the liquid sample; perform a chemical enrichment process on the liquid sample; perform an activation, transduction, or transfection process on the liquid sample; or perform a cell multiplication process on the liquid sample. ### Claim 13 (depends on 10) The cell manufacturing apparatus of claim 10, further comprising an output tube extending from the collection chamber to the master device for delivering the liquid sample from the collection chamber to the master device. ### Claim 14 (depends on 10) The cell manufacturing apparatus of claim 10, wherein each of the plurality of streams have a width of about 20 to about 50 microns. ### Claim 15 An apparatus for counting cells in a liquid sample, comprising: a flow-splitting chamber fluidly coupled to a collection chamber; an input tube configured to deliver a liquid sample containing cells to the flow-splitting chamber; a spaced apart array of posts having a triangular cross sectional shape arranged in the flow-splitting chamber in a plurality of rows of posts along a flow path to define a plurality of channels therebetween and configured to redirect the liquid sample into a plurality of streams corresponding to the number of channels defined by a last row of posts in the plurality of rows of posts; a plurality of sensing zones corresponding to the plurality of streams; a plurality of sensing electrodes, wherein each sensing electrode is disposed in a corresponding sensing zone of the plurality of sensing zones and configured to detect a change in electrical impedance as the cells in the liquid sample flow through the plurality of sensing zones; a first electrode electrically coupled to the flow-splitting chamber, wherein the first electrode is disposed between the last row of posts of the plurality of rows of posts and a second to last row of posts of the plurality of rows of posts; and a second electrode electrically coupled to the collection chamber downstream of the plurality of rows of posts.