# US 12,005,445 B2 · Micro-pump fluidic strategy for fabricating perovskite microwire array-based devices on semiconductor platforms and method

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- Number: US 12,005,445 B2
- Document ID: US12005445B2
- Status: Granted
- Kind: B2
- Application number: 17/323,228
- Filed: 2021-05-18
- Published: 2021-11-18
- Granted: 2024-06-11
- Earliest claimed: 2020-05-18
- Assignees: King Abdullah University of Science and Technology
- Applicants: King Abdullah University of Science and Technology
- Inventors: Bin Xin; Iman S. Roqan
- Web page: https://patentgrep.com/patent/US12005445B2

## CPC

- B01L 3/502715: {characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces}
- B01L 3/502707: {characterised by the manufacture of the container or its components}
- B81B 1/006: {Microdevices formed as a single homogeneous piece, i.e. wherein the mechanical function is obtained by the use of the device, e.g. cutters}
- B81C 1/00119: {Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems}
- H10F 77/12: Active materials
- H10F 77/1437: {Quantum wires or nanorods}
- B01L 2200/10: Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
- B01L 2300/0663: Whole sensors
- B01L 2300/0819: Microarrays; Biochips
- B01L 2300/0896: Nanoscaled
- B81B 2201/05: Microfluidics
- B81B 2203/033: Trenches
- B81B 2203/0338: Channels
- B81B 2203/04: Electrodes
- B81C 2201/0197: Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

A method for making ion-crystal semiconductor material based micro- and/or nanowires, MNWs, embedded into a semiconductor substrate, includes forming a structure into the semiconductor substrate, wherein the structure has each of a width and a depth less than 10 μm; pumping an ion-crystal semiconductor material as an ion solution into the structure, wherein the pumping is achieved exclusively due to capillary forces; flowing the ion solution through the structure to fill the structure; crystallizing the ion-crystal semiconductor material inside the structure to form the MNWs; and adding electrodes to ends of the MNWs.

## Claims

### Claim 1

A lab-on-chip device comprising:
a semiconductor substrate;
a power source integrated into the semiconductor substrate;
a sensor integrated into the semiconductor substrate; and
a processor integrated into the semiconductor substrate,
wherein the processor is configured to receive a measurement from the sensor and the power source is configured to supply electrical power to the sensor and the processor,
wherein each of the power source, the sensor, and the processor comprises a plurality of micro- and/or nanowires, MNWs, embedded in corresponding plurality of micro-channels, which extend along a surface of the semiconductor substrate, and
wherein each of a width and a depth of each micro-channel of the plural micro-channels is less than 10 μm.

### Claim 2 (depends on 1)

The device of claim 1, wherein each MNW of the plural MNWs includes an ion-crystal semiconductor material.

### Claim 3 (depends on 1)

The device of claim 1, wherein the plural micro-channels are parallel, linear, micro-channels.

### Claim 4 (depends on 3)

The device of claim 3, further comprising:
additional micro-channels that are non-linear.

### Claim 5 (depends on 1)

The device of claim 1, wherein a width of each micro-channel of the micro-channels is less than 1 μm.

### Claim 6 (depends on 1)

The device of claim 1, further comprising:
an oxide layer provided between the plural micro-channels and the plural MNWs.

### Claim 7 (depends on 1)

The device of claim 1, wherein each MNW of the plural MNWs includes a perovskite material.