# US 12,004,368 B2 · Display device including thin encapsulation layer containing silicon oxynitride layer

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- Number: US 12,004,368 B2
- Document ID: US12004368B2
- Status: Granted
- Kind: B2
- Application number: 17/406,229
- Filed: 2021-08-19
- Published: 2022-06-16
- Granted: 2024-06-04
- Earliest claimed: 2020-12-10
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Juwon Lee; Ojun Kwon; Ran Kim; Soonmi Choi
- Web page: https://patentgrep.com/patent/US12004368B2

## CPC

- H10K 71/00: Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K 59/8731: {multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers}
- G09G 3/3275: Details of drivers for data electrodes
- G09G 3/3283: in which the data driver supplies a variable data current for setting the current through, or the voltage across, the light-emitting elements
- G09G 3/3291: in which the data driver supplies a variable data voltage for setting the current through, or the voltage across, the light-emitting elements
- G09G 2300/0408: Integration of the drivers onto the display substrate
- H10K 59/12: Active-matrix OLED [AMOLED] displays
- H10K 59/122: Pixel-defining structures or layers, e.g. banks
- H10K 59/124: Insulating layers formed between TFT elements and OLED elements
- H10K 77/111: {Flexible substrates}
- H10K 2102/311: {Flexible OLED}
- H10K 2102/361: {Temperature}
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- G09G: ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION (arrangements for transferring data between digital computers and displays G06F3/14; static indicating arrangements comprising an association of a number of separate sources or light control cells G09F9/00; static indicating arrangements comprising integral associations of a number of light sources H01J, H01K, H10H, H05B33/12; scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission, details thereof H04N1/00)

## Abstract

A display device includes a light emitting structure disposed on a substrate, and a thin film encapsulation layer disposed on the light emitting structure and including an inorganic layer containing silicon oxynitride and an organic layer. A portion of the inorganic layer has a stress intensity factor of about 1.6 MPa or more.

## Claims

### Claim 1

A display device comprising:
a light emitting structure disposed on a substrate; and
a thin film encapsulation layer disposed on the light emitting structure and including an inorganic layer that contains silicon oxynitride and an organic layer,
wherein a portion of the inorganic layer has a stress intensity factor of about 1.6 MPa or more,
wherein the inorganic layer includes:
a first inorganic layer disposed between the light emitting structure and the organic layer and containing silicon oxynitride; and
a second inorganic layer disposed on the organic layer and containing silicon oxynitride,
wherein the first inorganic layer includes:
a first barrier layer contacting the organic layer; and
a second barrier layer contacting the light emitting structure,
wherein the first barrier layer is disposed between the organic layer and the second barrier layer, and
wherein a number of dangling bonds of the first barrier layer is less than a number of dangling bonds of the second barrier layer.

### Claim 2 (depends on 1)

The display device of claim 1,
wherein the inorganic layer has a refractive index of about 1.8 or less.

### Claim 3 (depends on 1)

The display device of claim 1,
wherein a portion of the first inorganic layer has a stress intensity factor of about 1.6 MPa or more.

### Claim 4 (depends on 1)

The display device of claim 1,
wherein a portion of the second inorganic layer has a stress intensity factor of about 1.6 MPa or more.

### Claim 5 (depends on 1)

The display device of claim 1,
wherein the first barrier layer has a stress intensity factor of about 1.6 MPa or more; and
wherein the second barrier layer has a stress intensity factor of less than about 1.6 MPa.

### Claim 6 (depends on 5)

The display device of claim 5,
wherein a difference between a refractive index of the first barrier layer and a refractive index of the second barrier layer is less than about 0.05.

### Claim 7

A display device comprising:
a light emitting structure disposed on a substrate; and
a thin film encapsulation layer disposed on the light emitting structure and including an inorganic layer that contains silicon oxynitride and an organic layer,
wherein a portion of the inorganic layer has a spin density of less than about 9.0×1018 spins/cm3,
wherein the inorganic layer includes:
a first inorganic layer disposed between the light emitting structure and the organic layer and containing silicon oxynitride; and
a second inorganic layer disposed on the organic layer and containing silicon oxynitride,
wherein the first inorganic layer includes:
a first barrier layer contacting the organic layer; and
a second barrier layer contacting the light emitting structure,
wherein the first barrier layer is disposed between the organic layer and the second barrier layer, and
wherein a number of dangling bonds of the first barrier layer is less than a number of dangling bonds of the second barrier layer.

### Claim 8 (depends on 7)

The display device of claim 7,
wherein the first barrier layer has a spin density of less than about 9.0×1018 spins/cm3 and the second barrier layer has a spin density of about 9.0×1018 spins/cm3 or more.

### Claim 9 (depends on 8)

The display device of claim 8,
wherein the first barrier layer has a stress intensity factor of about 1.6 MPa or more, and
wherein the second barrier layer has a stress intensity factor of less than about 1.6 MPa.

### Claim 10 (depends on 8)

The display device of claim 8,
wherein each of a refractive index of the first barrier layer and a refractive index of the second barrier layer is about 1.8 or less, and
wherein a difference between the refractive index of the first barrier layer and the refractive index of the second barrier layer is less than about 0.05.

### Claim 11 (depends on 8)

The display device of claim 8,
wherein the first barrier layer is not oxidized under a temperature of about 85° C. and a humidity of about 85% for about 500 hours.
