Short or near short etch rework
AssigneeInternational Business Machines Corporation
InventorsColin Edward Masterson, John R. Dangler, Tory Johnson, Austin Carter, Gunnar Mills
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AssigneeInternational Business Machines Corporation
InventorsColin Edward Masterson, John R. Dangler, Tory Johnson, Austin Carter, Gunnar Mills
Estimating the term…
Embodiments are directed to short and/or near short etch rework. A microfluidic device is positioned on a portion of a circuit having a defect. The microfluidic device is caused to dispense etchant that removes the defect of the circuit, where a flow of the etchant is controlled to access the portion of the circuit having the defect to thereby etch away the defect, the flow of the etchant being obstructed from accessing other portions of the circuit. The microfluidic device is used to extract the etchant from the portion of the circuit such that the etchant avoids contact with the other portions of the circuit. The microfluidic device is removed from the circuit.
A computer-implemented method comprising:
A computer-implemented method comprising:
Dependencies are inferred from the claim text.