# US 12,003,228 B2 · Air-gap type FBAR

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- Number: US 12,003,228 B2
- Document ID: US12003228B2
- Status: Granted
- Kind: B2
- Application number: 17/338,761
- Filed: 2021-06-04
- Published: 2022-09-15
- Granted: 2024-06-04
- Earliest claimed: 2021-03-10
- Assignees: Wisol Co., Ltd.
- Applicants: Wisol Co., Ltd.
- Inventors: Byung Hun Kim; Yong Hun Ko
- Web page: https://patentgrep.com/patent/US12003228B2

## CPC

- H03H 9/173: {Air-gaps}
- H03H 9/02118: {of lateral leakage between adjacent resonators}
- H03H 9/13: for networks consisting of piezoelectric or electrostrictive materials (for networks using surface acoustic waves H03H9/145)
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

An air-gap type film bulk acoustic resonator (FBAR) according to the present invention may include: a substrate comprising an air gap portion on an upper surface thereof; a lower electrode formed on the substrate; a piezoelectric layer formed on the lower electrode; an upper electrode formed on the piezoelectric layer; a protective layer formed on the upper electrode; and a beam structure extended in a dome shape from one side of the upper electrode to define a space portion between the upper electrode and the piezoelectric layer, wherein one end of the beam structure is in contact with the piezoelectric layer.

## Claims

### Claim 1

An air-gap type film bulk acoustic resonator (FBAR) comprising:
a substrate comprising an air gap portion on an upper surface thereof;
a lower electrode formed on the substrate;
a piezoelectric layer formed on the lower electrode;
an upper electrode formed on the piezoelectric layer; and
a beam structure comprising a protective layer formed on the upper electrode and extending in a dome shape from one side of the upper electrode to define a space portion between the upper electrode and the piezoelectric layer,
wherein one end of the beam structure is in contact with the piezoelectric layer, and
wherein an end of the protective layer protrudes beyond an end of the beam structure by a predetermined length.

### Claim 2 (depends on 1)

The air-gap type FBAR of claim 1, wherein the beam structure is formed above the air gap portion with respect to a vertical virtual surface extending from a gap edge of the air gap portion.

### Claim 3 (depends on 1)

The air-gap type FBAR of claim 1, wherein the space portion is filled with one of air and SiO2 whose density is lower than the density of a material constituting the upper electrode or the piezoelectric layer.

### Claim 4 (depends on 1)

The air-gap type FBAR of claim 1, wherein a width of the one end of the beam structure in contact with the piezoelectric layer is 50 nm to 200 nm.

### Claim 5 (depends on 4)

The air-gap type FBAR of claim 4, wherein a height of the space portion is equal to or less than ½ of a thickness of the upper electrode and a width of a horizontal width of the space portion is 1 μm to 5 μm.

### Claim 6 (depends on 1)

The air-gap type FBAR of claim 1, further comprising a conductive metal pattern layer deposited at a position a predetermined distance apart from the one end of the beam structure.

### Claim 7 (depends on 1)

The air-gap type FBAR of claim 1, wherein a structure groove is formed on a lower surface of the beam structure that corresponds to an upper portion of the space portion.

### Claim 8 (depends on 1)

The air-gap type FBAR of claim 1, wherein a piezoelectric groove is formed on an upper surface of the piezoelectric layer that corresponds to a lower portion of the space portion.

### Claim 9 (depends on 1)

The air-gap type FBAR of claim 1, wherein a lower portion of the space portion comprises a tilted portion of an upper surface of the piezoelectric layer.

### Claim 10 (depends on 9)

The air-gap type FBAR of claim 9, wherein a lower electrode edge corresponding to one end of the lower electrode is positioned inside an upper surface of the air gap portion.

### Claim 11

An air-gap type film bulk acoustic resonator (FBAR) comprising:
a substrate comprising an air gap portion on an upper surface thereof;
a lower electrode formed on the substrate;
a piezoelectric layer formed on the lower electrode;
an upper electrode formed on the piezoelectric layer; and
a beam structure extending in a dome-shape from one side of the upper electrode to define a space portion between the upper electrode and the piezoelectric layer,
wherein one end of the beam structure is in direct contact with the piezoelectric layer,
wherein the one end comprises a first end in contact with an upper surface of the piezoelectric layer by a predetermined width and a second end extending in a diagonal direction from the first end and spaced apart from the upper surface of the piezoelectric layer.

### Claim 12 (depends on 11)

The air-gap type FBAR of claim 11, wherein the beam structure is formed above the air gap portion with respect to a vertical virtual surface extending from a gap edge of the air gap portion.

### Claim 13 (depends on 11)

The air-gap type FBAR of claim 11, wherein the space portion is filled with one of air and SiO2 whose density is lower than the density of a material constituting the upper electrode or the piezoelectric layer.

### Claim 14 (depends on 11)

The air-gap type FBAR of claim 11, wherein a shape of a side surface of the one end of the beam structure is either a V-like shape or a U-like shape.