# US 12,003,195 B2 · MEMS actuation system

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- Number: US 12,003,195 B2
- Document ID: US12003195B2
- Status: Granted
- Kind: B2
- Application number: 16/584,567
- Filed: 2019-09-26
- Published: 2020-03-26
- Granted: 2024-06-04
- Earliest claimed: 2018-09-26
- Assignees: Mems Drive (Nanjing) Co., Ltd.
- Applicants: MEMS Drive, Inc.
- Inventors: Guiqin Wang; Matthew Ng; Xiaolei Liu
- Web page: https://patentgrep.com/patent/US12003195B2

## CPC

- H02N 2/028: {along multiple or arbitrary translation directions, e.g. XYZ stages}
- B81B 3/0021: {Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00)}
- G02B 5/208: {for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation}
- G02B 7/09: adapted for automatic focusing or varying magnification
- G02B 27/646: {compensating for small deviations, e.g. due to vibration or shake (movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68)}
- G03B 3/10: Power-operated focusing
- G03B 5/00: Adjustment of optical system relative to image or object surface other than for focusing
- G03B 5/02: Lateral adjustment of lens
- G03B 5/04: Vertical adjustment of lens; Rising fronts
- G03B 11/00: Filters or other obturators specially adapted for photographic purposes
- G03B 13/36: Autofocus systems
- H02K 41/0356: {moving along a straight path}
- H02N 1/008: {Laterally driven motors, e.g. of the comb-drive type}
- B81B 2203/053: Translation according to an axis perpendicular to the substrate
- B81B 2203/055: Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
- G02B 13/004: {having four lenses}
- G03B 2205/0007: Movement of one or more optical elements for control of motion blur
- G03B 2205/0015: by displacing one or more optical elements normal to the optical axis
- G03B 2205/0061: using piezoelectric actuators
- H02K 2201/18: Machines moving with multiple degrees of freedom
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR (optical parts of such apparatus G02B; photosensitive materials or processes for photographic purposes G03C; apparatus for processing exposed photographic materials G03D)
- H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53})

## Abstract

A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.

## Claims

### Claim 1

A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
a MEMS actuator configured to provide linear three-axis movement, the MEMS actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator; and
an optoelectronic device coupled to the MEMS actuator;
wherein the in-plane MEMS actuator includes hybrid actuator including:
an in-plane MEMS actuator portion including at least two motion stages including a respective polarized magnetic material/magnet associated with each motion stage and having differing polarizations:
an in-plane electromagnetic actuator portion including a magnetic plate assembly to which at least two magnetic assemblies are attached, including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly, the magnetic assemblies configured to interact with a respective polarized magnetic material/magnet.

### Claim 2 (depends on 1)

The multi-axis MEMS assembly of claim 1 wherein the optoelectronic device is coupled to one or more of:
the in-plane MEMS actuator; and
the out-of-plane MEMS actuator.

### Claim 3 (depends on 1)

The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is an image stabilization actuator.

### Claim 4 (depends on 1)

The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is configured to provide linear X-axis movement and linear Y-axis movement.

### Claim 5 (depends on 4)

The multi-axis MEMS assembly of claim 4 wherein the in-plane MEMS actuator is further configured to provide rotational Z-axis movement.

### Claim 6 (depends on 1)

The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is an autofocus actuator.

### Claim 7 (depends on 1)

The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is configured to provide linear Z-axis movement.

### Claim 8 (depends on 1)

The multi-axis MEMS assembly of claim 1 wherein the at least two magnetic assemblies are configured to enable in-plane displacement of the optoelectronic device.

### Claim 9 (depends on 8)

The multi-axis MEMS assembly of claim 8 wherein the at least two magnetic assemblies include more than two magnetic assemblies.

### Claim 10 (depends on 9)

The multi-axis MEMS assembly of claim 9 wherein the more than two magnetic assemblies are configured to enable at least one of X-axis and Y-axis displacement of the optoelectronic device.

### Claim 11

A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
a MEMS actuator configured to provide linear three-axis movement, the MEMS actuator including:
an in-plane MEMS actuator including an electromagnetic actuator portion, and
an out-of-plane MEMS actuator; and
an optoelectronic device coupled to the MEMS actuator;
wherein the in-plane MEMS actuator is a hybrid actuator including:
at least two respective polarized magnetic material/magnets each associated with a respective motion stage of a MEMS actuator portion of the in-plane MEMS actuator, wherein the at least two respective polarized magnetic material/magnets have a differing polarizations; and
a magnetic plate assembly having at least two magnetic assemblies of the electromagnetic actuator portion configured to interact with a respective polarized magnetic material/magnet, the at least magnetic assemblies including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly.

### Claim 12 (depends on 11)

The multi-axis MEMS assembly of claim 11 wherein the at least two magnetic assemblies are configured to enable in-plane displacement of the optoelectronic device.

### Claim 13 (depends on 12)

The multi-axis MEMS assembly of claim 12 wherein the at least two magnetic assemblies include more than two magnetic assemblies.

### Claim 14 (depends on 13)

The multi-axis MEMS assembly of claim 13 wherein the more than two magnetic assemblies are configured to enable at least one of X-axis and Y-axis displacement of the optoelectronic device.

### Claim 15

A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
a MEMS actuator configured to provide linear multi-axis movement, the MEMS actuator including:
a hybrid in-plane MEMS actuator portion including at least two motion stages including a respective polarized magnetic material/magnet associated with each motion stage and having differing polarizations; and
an in-plane electromagnetic actuator portion including a magnetic plate assembly having at least two magnetic assemblies configured to interact with a respective polarized magnetic material/magnet, the at least two magnetic assemblies including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly; and
an optoelectronic device coupled to the MEMS actuator.

### Claim 16 (depends on 15)

The multi-axis MEMS assembly of claim 15 wherein the at least two magnetic assemblies are configured to enable in-plane displacement of the optoelectronic device.

### Claim 17 (depends on 16)

The multi-axis MEMS assembly of claim 16 wherein the at least two magnetic assemblies include more than two magnetic assemblies.

### Claim 18 (depends on 17)

The multi-axis MEMS assembly of claim 17 wherein the more than two magnetic assemblies are configured to enable at least one of X-axis and Y-axis displacement of the optoelectronic device.

### Claim 19 (depends on 18)

The multi-axis MEMS assembly of claim 18 wherein the more than two magnetic assemblies are further configured to provide rotational Z-axis movement.