# US 12,002,902 B2 · Light emitting device, and method for manufacturing thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,002,902 B2 - Document ID: US12002902B2 - Status: Granted - Kind: B2 - Application number: 17/985,993 - Filed: 2022-11-14 - Published: 2023-03-09 - Granted: 2024-06-04 - Earliest claimed: 2013-10-28 - Assignees: Nichia Corporation - Applicants: Nichia Corporation - Inventors: Masatsugu Ichikawa - Web page: https://patentgrep.com/patent/US12002902B2 ## CPC - H10H 20/82: Roughened surfaces, e.g. at the interface between epitaxial layers - H10H 20/018: {Bonding of wafers} - H10H 20/0361: {of wavelength conversion means} - H10H 20/0363: {of optical field-shaping means} - H10H 20/851: Wavelength conversion means - H10H 20/853: characterised by their shape - H10H 20/855: Optical field-shaping means, e.g. lenses - H10W 72/20: Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps - H10W 74/00: Encapsulations, e.g. protective coatings - H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL} - H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A method for manufacturing a light emitting device includes: roughening a light extracting surface of a semiconductor light emitting element, forming a first light transmissive layer on an entirety of the roughened light extracting surface, flattening a surface of a first light transmissive layer that is on a side opposite the semiconductor light emitting element, forming a second light transmissive layer on an entirety of a surface of an optical member, flattening a surface of the second light transmissive layer that is on a side opposite the optical member, and directly bonding the flattened surface of the first light transmissive layer and the flattened surface of second transmissive layer by performing surface-activated bonding, atomic diffusion bonding, or hydroxyl bonding. ## Claims ### Claim 1 A method for manufacturing a light emitting device comprising an optical member provided on a light extracting surface side of a semiconductor light emitting element via a first light transmissive layer and a second light transmissive layer, the method comprising steps of: (a) roughening said light extracting surface of said semiconductor light emitting element, (b) forming said first light transmissive layer on an entirety of said roughened light extracting surface, (c) after forming said first light transmissive layer, flattening a surface of said first light transmissive layer that is on a side opposite said semiconductor light emitting element, (d) forming said second light transmissive layer on an entirety of a surface of said optical member, (e) after forming said second light transmissive layer, flattening a surface of said second light transmissive layer that is on a side opposite said optical member, and (f) after flattening said surface of said first light transmissive layer and said surface of said second light transmissive layer, directly bonding said flattened surface of said first light transmissive layer and said flattened surface of said second light transmissive layer by performing surface-activated bonding, atomic diffusion bonding, or hydroxyl bonding. ### Claim 2 (depends on 1) The method for manufacturing a light emitting device according to claim 1, further comprising: before the step (a), performing a step (g) of forming said semiconductor light emitting element on a growth substrate, performing a step (h) of removing said growth substrate from said semiconductor light emitting element formed on said growth substrate, and performing a step (i) of polishing a stripped surface of said semiconductor light emitting element that is exposed by the step (h), wherein: in the step (a), said polished stripped surface is roughened to form said light extracting surface. ### Claim 3 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein an arithmetic average roughness Ra of both of said flattened surface of said first light transmissive layer and said flattened surface of said second transmissive layer is 1 nm or less. ### Claim 4 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein said first light transmissive layer and/or said second light transmissive layer is formed of at least one inorganic dielectric material selected from the group consisting of SiO2, SiON, TiO2 and Al2O3, or an organic-inorganic hybrid material comprising at least one selected from the group consisting of SiO2, SiON, TiO2 and Al2O3, as an inorganic component. ### Claim 5 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein said first light transmissive layer and/or said second transmissive layer is formed of a material consisting essentially of Si, 0, and N. ### Claim 6 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein a refractive index of said first light transmissive layer and/or a refractive index of said second light transmissive layer is in a range of 1.4 to 2.0. ### Claim 7 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein a difference between a refractive index of the first light transmissive layer and a refractive index of the optical member is in a range of ±0.3 based on absolute values of the refractive indexes of the first light transmissive layer and the optical member. ### Claim 8 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein said optical member is a fluorescent plate, a sapphire substrate, a GaN substrate or a lens. ### Claim 9 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein the optical member is inhomogeneous and comprises an inorganic material and fluorescent material particles, and wherein a first plurality of the fluorescent material particles are partially exposed from the inorganic material, and a second plurality of the fluorescent material particles are entirely embedded in the inorganic material. ### Claim 10 (depends on 1) The method for manufacturing a light emitting device according to claim 1, wherein an arithmetic average roughness Ra of said surface of said optical member on which said second light transmissive layer is formed is greater than 1 nm. ### Claim 11 (depends on 1) The method for manufacturing a light emitting device according to claim 1, further comprising: before the step (a), performing a step (j) of attaching a supporting substrate onto a side opposite to a light extracting surface side of said semiconductor light emitting element; and after the step (f), performing a step (k) of removing said supporting substrate. ### Claim 12 (depends on 11) The method for manufacturing a light emitting device according to claim 11, wherein, in the step (a), said supporting substrate is attached onto a side opposite to light extracting surface sides of a plurality of semiconductor light emitting elements; and wherein the method further comprising, after the step (k), performing a step of cutting to separate the plurality of semiconductor light emitting elements into individual light emitting devices. ### Claim 13 (depends on 1) The method for manufacturing a light emitting device according to claim 1, further comprising: before the step (f), performing a chipping process.