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US 12,002,868 B2Granted
Display device and method of manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsDongsung Lee, Cheolho Park, Jongoh Seo, Byungsoo So, Dongmin Lee
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Abstract
A display device includes: a thin-film transistor on a substrate, the thin-film transistor including on the substrate: an active layer; a gate electrode overlapping the active layer; a source electrode and a drain electrode electrically connected to the active layer and including a first metal material; and a first capping layer which covers each of the source electrode and the drain electrode, the first capping layer having a Young's modulus greater than that of the first metal material.
Claims9
A method of manufacturing a display device, the method comprising:
- forming a photoresist layer on a substrate by applying and patterning a photosensitive material on the substrate, the photoresist layer exposing first portions of the substrate;
- forming a first conductive layer on the photoresist layer and the first portions of the substrate, the first conductive layer comprising a first metal material;
- etching a side surface of the photoresist layer having the first conductive layer thereon to expose second portions of the substrate;
- forming a second conductive layer on the first conductive layer on the photoresist layer of which the side surface is etched, on the first conductive layer on the first portions of the substrate, and on the second portions of the substrate, the second conductive layer comprising a second metal material having a Young's modulus greater than that of the first metal material;
- and
- removing the photoresist layer to form the second conductive layer covering the first conductive layer on the first portions of the substrate, the first conductive layer covered by the second conductive layer forming a conductive wiring of the display device.
3 more elements
Dependencies are inferred from the claim text.